GB8917836D0 - Molecular vacuum pump - Google Patents

Molecular vacuum pump

Info

Publication number
GB8917836D0
GB8917836D0 GB898917836A GB8917836A GB8917836D0 GB 8917836 D0 GB8917836 D0 GB 8917836D0 GB 898917836 A GB898917836 A GB 898917836A GB 8917836 A GB8917836 A GB 8917836A GB 8917836 D0 GB8917836 D0 GB 8917836D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
molecular vacuum
molecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB898917836A
Other versions
GB2221255A (en
GB2221255B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEMIKHOV KONSTANTIN E
SERGEEV VLADIMIR P
SHARSHIN SERGEI N
SHOLOKHOV VALERY B
VIKHREV VLADIMIR I
Original Assignee
DEMIKHOV KONSTANTIN E
SERGEEV VLADIMIR P
SHARSHIN SERGEI N
SHOLOKHOV VALERY B
VIKHREV VLADIMIR I
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DEMIKHOV KONSTANTIN E, SERGEEV VLADIMIR P, SHARSHIN SERGEI N, SHOLOKHOV VALERY B, VIKHREV VLADIMIR I filed Critical DEMIKHOV KONSTANTIN E
Publication of GB8917836D0 publication Critical patent/GB8917836D0/en
Publication of GB2221255A publication Critical patent/GB2221255A/en
Application granted granted Critical
Publication of GB2221255B publication Critical patent/GB2221255B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB8917836A 1988-01-05 1988-01-05 Molecular vacuum pump Expired - Lifetime GB2221255B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8917836D0 true GB8917836D0 (en) 1989-11-01
GB2221255A GB2221255A (en) 1990-01-31
GB2221255B GB2221255B (en) 1991-10-16

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8917836A Expired - Lifetime GB2221255B (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Country Status (6)

Country Link
JP (1) JPH02502840A (en)
DE (1) DE3891201T1 (en)
FI (1) FI894157A0 (en)
FR (1) FR2630167B1 (en)
GB (1) GB2221255B (en)
WO (1) WO1989006320A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
DE19846188A1 (en) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump with stator and rotor
DE19937392A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Friction vacuum pump with active pump elements

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
BE790969A (en) * 1971-11-16 1973-05-07 Cit Alcatel PIVOT FOR ROTARY MOLECULAR PUMPS
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE
JPS6341695A (en) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd Turbo-molecular pump

Also Published As

Publication number Publication date
GB2221255A (en) 1990-01-31
FI894157A0 (en) 1989-09-04
GB2221255B (en) 1991-10-16
DE3891201T1 (en) 1990-01-11
FR2630167A1 (en) 1989-10-20
WO1989006320A1 (en) 1989-07-13
JPH02502840A (en) 1990-09-06
FR2630167B1 (en) 1990-08-31

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940105