GB2221255B - Molecular vacuum pump - Google Patents

Molecular vacuum pump

Info

Publication number
GB2221255B
GB2221255B GB8917836A GB8917836A GB2221255B GB 2221255 B GB2221255 B GB 2221255B GB 8917836 A GB8917836 A GB 8917836A GB 8917836 A GB8917836 A GB 8917836A GB 2221255 B GB2221255 B GB 2221255B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
molecular vacuum
molecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8917836A
Other versions
GB2221255A (en
GB8917836D0 (en
Inventor
Valery Borisovich Sholokhov
Konstantin Evgenievic Demikhov
Vladimir Iliich Vikhrev
Vladimir Pavlovich Sergeev
Sergei Nikolaevich Sharshin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB8917836D0 publication Critical patent/GB8917836D0/en
Publication of GB2221255A publication Critical patent/GB2221255A/en
Application granted granted Critical
Publication of GB2221255B publication Critical patent/GB2221255B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046Combinations of two or more different types of pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB8917836A 1988-01-05 1988-01-05 Molecular vacuum pump Expired - Lifetime GB2221255B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Publications (3)

Publication Number Publication Date
GB8917836D0 GB8917836D0 (en) 1989-11-01
GB2221255A GB2221255A (en) 1990-01-31
GB2221255B true GB2221255B (en) 1991-10-16

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8917836A Expired - Lifetime GB2221255B (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Country Status (6)

Country Link
JP (1) JPH02502840A (en)
DE (1) DE3891201T1 (en)
FI (1) FI894157A0 (en)
FR (1) FR2630167B1 (en)
GB (1) GB2221255B (en)
WO (1) WO1989006320A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
DE19846188A1 (en) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump with stator and rotor
DE19937392A1 (en) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Friction vacuum pump with active pump elements

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (en) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Improvements to rotary molecular pumps
JPS6341695A (en) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd Turbo-molecular pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618C2 (en) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molecular vacuum pump
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (en) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. High-vacuum molecular pump
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Also Published As

Publication number Publication date
FR2630167B1 (en) 1990-08-31
GB2221255A (en) 1990-01-31
JPH02502840A (en) 1990-09-06
DE3891201T1 (en) 1990-01-11
FR2630167A1 (en) 1989-10-20
FI894157A0 (en) 1989-09-04
GB8917836D0 (en) 1989-11-01
WO1989006320A1 (en) 1989-07-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940105