FI894157A0 - MOLEKYLVAKUUMPUMP. - Google Patents
MOLEKYLVAKUUMPUMP.Info
- Publication number
- FI894157A0 FI894157A0 FI894157A FI894157A FI894157A0 FI 894157 A0 FI894157 A0 FI 894157A0 FI 894157 A FI894157 A FI 894157A FI 894157 A FI894157 A FI 894157A FI 894157 A0 FI894157 A0 FI 894157A0
- Authority
- FI
- Finland
- Prior art keywords
- molekylvakuumpump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/SU1988/000001 WO1989006320A1 (en) | 1988-01-05 | 1988-01-05 | Molecular vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
FI894157A0 true FI894157A0 (en) | 1989-09-04 |
Family
ID=21617173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI894157A FI894157A0 (en) | 1988-01-05 | 1989-09-04 | MOLEKYLVAKUUMPUMP. |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH02502840A (en) |
DE (1) | DE3891201T1 (en) |
FI (1) | FI894157A0 (en) |
FR (1) | FR2630167B1 (en) |
GB (1) | GB2221255B (en) |
WO (1) | WO1989006320A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1238201B (en) * | 1989-11-03 | 1993-07-09 | Varian Spa | METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED. |
DE4216237A1 (en) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gas friction vacuum pump |
DE19846188A1 (en) | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Friction vacuum pump with stator and rotor |
DE19937392A1 (en) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Friction vacuum pump with active pump elements |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1626621A (en) * | 1925-08-28 | 1927-05-03 | Middendorf George | Compressor for refrigerators or the like |
FR1293546A (en) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Improvements to rotary molecular pumps |
BE790969A (en) * | 1971-11-16 | 1973-05-07 | Cit Alcatel | PIVOT FOR ROTARY MOLECULAR PUMPS |
FR2244370A5 (en) * | 1973-09-14 | 1975-04-11 | Cit Alcatel | |
NL8105614A (en) * | 1981-12-14 | 1983-07-01 | Ultra Centrifuge Nederland Nv | HIGH VACUUM MOLECULAR PUMP. |
DE3613344A1 (en) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE |
JPS6341695A (en) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | Turbo-molecular pump |
-
1988
- 1988-01-05 DE DE883891201T patent/DE3891201T1/en not_active Withdrawn
- 1988-01-05 JP JP63501741A patent/JPH02502840A/en active Pending
- 1988-01-05 WO PCT/SU1988/000001 patent/WO1989006320A1/en active Application Filing
- 1988-01-05 GB GB8917836A patent/GB2221255B/en not_active Expired - Lifetime
- 1988-04-13 FR FR888804896A patent/FR2630167B1/en not_active Expired - Fee Related
-
1989
- 1989-09-04 FI FI894157A patent/FI894157A0/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
GB2221255A (en) | 1990-01-31 |
GB2221255B (en) | 1991-10-16 |
DE3891201T1 (en) | 1990-01-11 |
FR2630167A1 (en) | 1989-10-20 |
WO1989006320A1 (en) | 1989-07-13 |
GB8917836D0 (en) | 1989-11-01 |
JPH02502840A (en) | 1990-09-06 |
FR2630167B1 (en) | 1990-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA | Application withdrawn |
Owner name: DEMIKHOV, KONSTANTIN EVGENIEVICH Owner name: SHARSHIN, SERGEI NIKOLAEVICH Owner name: SERGEEV, VLADIMIR PAVLOVICH Owner name: SHOLOKHOV, VALERY BORISOVICH Owner name: VIKHREV, VLADIMIR ILIICH |