GB2276448B - Method of searching the centre of a band shaped region - Google Patents

Method of searching the centre of a band shaped region

Info

Publication number
GB2276448B
GB2276448B GB9405402A GB9405402A GB2276448B GB 2276448 B GB2276448 B GB 2276448B GB 9405402 A GB9405402 A GB 9405402A GB 9405402 A GB9405402 A GB 9405402A GB 2276448 B GB2276448 B GB 2276448B
Authority
GB
United Kingdom
Prior art keywords
searching
centre
shaped region
band shaped
band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9405402A
Other versions
GB9405402D0 (en
GB2276448A (en
Inventor
Haruo Takahashi
Kiyoshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of GB9405402D0 publication Critical patent/GB9405402D0/en
Publication of GB2276448A publication Critical patent/GB2276448A/en
Application granted granted Critical
Publication of GB2276448B publication Critical patent/GB2276448B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Analysis (AREA)
GB9405402A 1993-03-19 1994-03-18 Method of searching the centre of a band shaped region Expired - Lifetime GB2276448B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06052493A JP3258118B2 (en) 1993-03-19 1993-03-19 How to detect the center of a strip sample

Publications (3)

Publication Number Publication Date
GB9405402D0 GB9405402D0 (en) 1994-05-04
GB2276448A GB2276448A (en) 1994-09-28
GB2276448B true GB2276448B (en) 1997-08-06

Family

ID=13144793

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9405402A Expired - Lifetime GB2276448B (en) 1993-03-19 1994-03-18 Method of searching the centre of a band shaped region

Country Status (5)

Country Link
US (1) US5425066A (en)
JP (1) JP3258118B2 (en)
KR (1) KR100288330B1 (en)
GB (1) GB2276448B (en)
TW (1) TW233340B (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2964137B2 (en) * 1997-04-08 1999-10-18 セイコーインスツルメンツ株式会社 X-ray fluorescence analyzer that can detect the center of a sample
RU2180439C2 (en) 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Process of generation of image of internal structure of object with use of x-rays and device for its realization
US7804934B2 (en) 2004-12-22 2010-09-28 Jordan Valley Semiconductors Ltd. Accurate measurement of layer dimensions using XRF
WO2006115254A1 (en) 2005-04-25 2006-11-02 Matsushita Electric Industrial Co., Ltd. Automatic gain control circuit and signal reproducing device
IL180482A0 (en) * 2007-01-01 2007-06-03 Jordan Valley Semiconductors Inspection of small features using x - ray fluorescence
US8447549B2 (en) * 2011-02-11 2013-05-21 Quality Vision International, Inc. Tolerance evaluation with reduced measured points
US9390984B2 (en) 2011-10-11 2016-07-12 Bruker Jv Israel Ltd. X-ray inspection of bumps on a semiconductor substrate
US9389192B2 (en) 2013-03-24 2016-07-12 Bruker Jv Israel Ltd. Estimation of XRF intensity from an array of micro-bumps
US9632043B2 (en) 2014-05-13 2017-04-25 Bruker Jv Israel Ltd. Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF
JP6305247B2 (en) * 2014-06-13 2018-04-04 株式会社日立ハイテクサイエンス X-ray fluorescence analyzer
US9829448B2 (en) 2014-10-30 2017-11-28 Bruker Jv Israel Ltd. Measurement of small features using XRF
JP2022013497A (en) 2020-07-03 2022-01-18 株式会社日立ハイテクサイエンス X-ray analysis device
DE102021116258A1 (en) 2021-06-23 2022-12-29 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Measurement object, method and device for operating an X-ray source
CN113945591B (en) * 2021-09-14 2023-10-24 中国电子科技集团公司第十一研究所 Half-peak width automatic test fixture

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE292540C (en) *
JP2748128B2 (en) * 1988-09-07 1998-05-06 キヤノン株式会社 Electron beam generator
JP2613513B2 (en) * 1991-11-05 1997-05-28 理学電機工業株式会社 X-ray fluorescence analysis method
JPH0581700U (en) * 1992-04-07 1993-11-05 セイコー電子工業株式会社 X-ray fluorescence film thickness measuring device

Also Published As

Publication number Publication date
JPH06273146A (en) 1994-09-30
KR100288330B1 (en) 2002-02-19
KR940022055A (en) 1994-10-20
TW233340B (en) 1994-11-01
US5425066A (en) 1995-06-13
GB9405402D0 (en) 1994-05-04
GB2276448A (en) 1994-09-28
JP3258118B2 (en) 2002-02-18

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Expiry date: 20140317