GB2162996A - Method of fabricating solar cells - Google Patents

Method of fabricating solar cells

Info

Publication number
GB2162996A
GB2162996A GB08515901A GB8515901A GB2162996A GB 2162996 A GB2162996 A GB 2162996A GB 08515901 A GB08515901 A GB 08515901A GB 8515901 A GB8515901 A GB 8515901A GB 2162996 A GB2162996 A GB 2162996A
Authority
GB
United Kingdom
Prior art keywords
solar cells
plating
front surface
altered
surface layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08515901A
Other versions
GB2162996B (en
GB8515901D0 (en
Inventor
Douglas A Yates
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Solar CSP Inc
Original Assignee
Mobil Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/681,003 external-priority patent/US4609565A/en
Application filed by Mobil Solar Energy Corp filed Critical Mobil Solar Energy Corp
Publication of GB8515901D0 publication Critical patent/GB8515901D0/en
Publication of GB2162996A publication Critical patent/GB2162996A/en
Application granted granted Critical
Publication of GB2162996B publication Critical patent/GB2162996B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

A solar cell fabrication procedure which is characterized by (1) removal of the front surface electrode plating mask after preliminary metallization of the front surface electrodes, (2) a passivation step which, inter alia, results in the formation of an altered silicon substrate surface layer, and (3) use of the altered surface layer as a plating mask for subsequent metallization steps involving, for example, immersion plating of nickel and immersion plating of electroplating of copper.
GB08515901A 1983-12-19 1984-12-14 Method of fabricating solar cells Expired GB2162996B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US56306183A 1983-12-19 1983-12-19
US65927984A 1984-10-10 1984-10-10
US06/681,003 US4609565A (en) 1984-10-10 1984-12-13 Method of fabricating solar cells
PCT/US1984/002065 WO1985002939A1 (en) 1983-12-19 1984-12-14 Method of fabricating solar cells

Publications (3)

Publication Number Publication Date
GB8515901D0 GB8515901D0 (en) 1985-07-24
GB2162996A true GB2162996A (en) 1986-02-12
GB2162996B GB2162996B (en) 1987-08-12

Family

ID=27415903

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08515901A Expired GB2162996B (en) 1983-12-19 1984-12-14 Method of fabricating solar cells

Country Status (9)

Country Link
EP (1) EP0167589A4 (en)
JP (1) JPS61500756A (en)
AU (1) AU574761B2 (en)
CH (1) CH669476A5 (en)
DE (1) DE3490612T1 (en)
GB (1) GB2162996B (en)
NL (1) NL8420338A (en)
SE (1) SE456624B (en)
WO (1) WO1985002939A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2160360B (en) * 1983-12-19 1987-09-16 Mobil Solar Energy Corp Method of fabricating solar cells
US4650695A (en) * 1985-05-13 1987-03-17 Mobil Solar Energy Corporation Method of fabricating solar cells
NL2009382C2 (en) 2012-08-29 2014-03-18 M4Si B V Method for manufacturing a solar cell and solar cell obtained therewith.

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004044A (en) * 1975-05-09 1977-01-18 International Business Machines Corporation Method for forming patterned films utilizing a transparent lift-off mask
US4214966A (en) * 1979-03-20 1980-07-29 Bell Telephone Laboratories, Incorporated Process useful in the fabrication of articles with metallized surfaces
US4224084A (en) * 1979-04-16 1980-09-23 Rca Corporation Method and structure for passivating a semiconductor device
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4289381A (en) * 1979-07-02 1981-09-15 Hughes Aircraft Company High selectivity thin film polarizer
US4314874A (en) * 1979-10-09 1982-02-09 Mitsubishi Denki Kabushiki Kaisha Method for forming a fine pattern of an aluminum film
US4436761A (en) * 1981-07-30 1984-03-13 Agency Of Industrial Science & Technology Method for treatment of metal substrate for growth of hydrogen-containing semiconductor film

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4347264A (en) * 1975-09-18 1982-08-31 Solarex Corporation Method of applying contacts to a silicon wafer and product formed thereby
US4152824A (en) * 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
US4343830A (en) * 1980-11-13 1982-08-10 Motorola, Inc. Method for improving the efficiency of solar cells having imperfections
AU573696B2 (en) * 1983-12-19 1988-06-16 Mobil Solar Energy Corp. Ion milling
GB2160360B (en) * 1983-12-19 1987-09-16 Mobil Solar Energy Corp Method of fabricating solar cells

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004044A (en) * 1975-05-09 1977-01-18 International Business Machines Corporation Method for forming patterned films utilizing a transparent lift-off mask
US4214966A (en) * 1979-03-20 1980-07-29 Bell Telephone Laboratories, Incorporated Process useful in the fabrication of articles with metallized surfaces
US4224084A (en) * 1979-04-16 1980-09-23 Rca Corporation Method and structure for passivating a semiconductor device
US4289381A (en) * 1979-07-02 1981-09-15 Hughes Aircraft Company High selectivity thin film polarizer
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4314874A (en) * 1979-10-09 1982-02-09 Mitsubishi Denki Kabushiki Kaisha Method for forming a fine pattern of an aluminum film
US4436761A (en) * 1981-07-30 1984-03-13 Agency Of Industrial Science & Technology Method for treatment of metal substrate for growth of hydrogen-containing semiconductor film

Also Published As

Publication number Publication date
SE8503833D0 (en) 1985-08-16
WO1985002939A1 (en) 1985-07-04
EP0167589A1 (en) 1986-01-15
EP0167589A4 (en) 1989-01-19
CH669476A5 (en) 1989-03-15
JPS61500756A (en) 1986-04-17
GB2162996B (en) 1987-08-12
DE3490612T1 (en) 1985-11-28
AU3888685A (en) 1985-07-12
SE456624B (en) 1988-10-17
AU574761B2 (en) 1988-07-14
SE8503833L (en) 1985-08-16
GB8515901D0 (en) 1985-07-24
NL8420338A (en) 1985-11-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee