GB1438502A - Field emission electron sources - Google Patents

Field emission electron sources

Info

Publication number
GB1438502A
GB1438502A GB2616672A GB2616672A GB1438502A GB 1438502 A GB1438502 A GB 1438502A GB 2616672 A GB2616672 A GB 2616672A GB 2616672 A GB2616672 A GB 2616672A GB 1438502 A GB1438502 A GB 1438502A
Authority
GB
United Kingdom
Prior art keywords
cathode
tip
anode
field emission
bombarded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2616672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VACUUM GENERATORS Ltd
Original Assignee
VACUUM GENERATORS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VACUUM GENERATORS Ltd filed Critical VACUUM GENERATORS Ltd
Priority to GB2616672A priority Critical patent/GB1438502A/en
Priority to DE19732328406 priority patent/DE2328406A1/en
Publication of GB1438502A publication Critical patent/GB1438502A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1438502 Field emission cathodes VACUUM GENERATORS Ltd 31 May 1973 [5 June 1972] 26166/72 Heading H1D A cathode assembly comprises a field emission tip 3, an anode 4 and another cathode 5 disposed to bombard those anode surfaces which in use are bombarded by electrons from the tip. The anode bombardment assists in removing gas molecules during thermal outgassing, a positive potential being applied to the anode and tip. An electron microscope gun includes a circular wire or strip thermionic cathode 5 and first and second circular focusing field electrodes 4, 6. The second electrode can also be bombarded via a ring of apertures 9 in electrode 4; alternatively a further cathode may be provided. The tip is a whisker of W or Ir. In another embodiment the cathode 5 is a straight coil with a shield beneath to prevent vapour deposition.
GB2616672A 1972-06-05 1972-06-05 Field emission electron sources Expired GB1438502A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2616672A GB1438502A (en) 1972-06-05 1972-06-05 Field emission electron sources
DE19732328406 DE2328406A1 (en) 1972-06-05 1973-06-04 FIELD EMISSION ELECTRON SOURCE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2616672A GB1438502A (en) 1972-06-05 1972-06-05 Field emission electron sources

Publications (1)

Publication Number Publication Date
GB1438502A true GB1438502A (en) 1976-06-09

Family

ID=10239381

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2616672A Expired GB1438502A (en) 1972-06-05 1972-06-05 Field emission electron sources

Country Status (2)

Country Link
DE (1) DE2328406A1 (en)
GB (1) GB1438502A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8500596A (en) * 1985-03-04 1986-10-01 Philips Nv DEVICE EQUIPPED WITH A SEMICONDUCTOR CATHOD.

Also Published As

Publication number Publication date
DE2328406A1 (en) 1973-12-20

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19930530