GB1421805A - Method of forming a positive resist - Google Patents
Method of forming a positive resistInfo
- Publication number
- GB1421805A GB1421805A GB4110673A GB4110673A GB1421805A GB 1421805 A GB1421805 A GB 1421805A GB 4110673 A GB4110673 A GB 4110673A GB 4110673 A GB4110673 A GB 4110673A GB 1421805 A GB1421805 A GB 1421805A
- Authority
- GB
- United Kingdom
- Prior art keywords
- ene
- polymers
- olefine
- sulphur dioxide
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
1421805 Olefin-sulphur dioxide polymers INTERNATIONAL BUSINESS MACHINES CORP 31 Aug 1973 [13 Nov 1972] 41106/73 Heading C3P [Also in Division G2] Olefine-sulphone polymers containing the unit-[CR 1 H-CR 2 H] n -SO 2 wherein n is 1 or 2, R 1 and R 2 are H, alkyl, substituted alkyl or aryl or together form an alicyclic ring are prepared by heating the olefine and sulphur dioxide in the presence of azobisisobutyronitrile catalyst. Specified olefines are cis-but-2-ene, but-1- ene, pent-1-ene, cyclopentene, hex-1-ene, 4- bromo-but-1-ene and styrene. The polymers are used in electron-sensitive processes (see Division G2).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30623472A | 1972-11-13 | 1972-11-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1421805A true GB1421805A (en) | 1976-01-21 |
Family
ID=23184410
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB4110673A Expired GB1421805A (en) | 1972-11-13 | 1973-08-31 | Method of forming a positive resist |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS4979525A (en) |
CA (1) | CA1286905C (en) |
DE (1) | DE2355701A1 (en) |
FR (1) | FR2206527B1 (en) |
GB (1) | GB1421805A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3893127A (en) * | 1973-09-27 | 1975-07-01 | Rca Corp | Electron beam recording media |
JPS63502936A (en) * | 1986-03-24 | 1988-10-27 | アメリカン テレフォン アンド テレグラフ カムパニー | Pattern transfer process for integrated circuit device fabrication |
DE19917790A1 (en) * | 1999-04-20 | 2000-11-02 | Hoechst Trespaphan Gmbh | Biaxially oriented film for the production of ceramic capacitors |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535137A (en) * | 1967-01-13 | 1970-10-20 | Ibm | Method of fabricating etch resistant masks |
SE391405B (en) * | 1972-05-01 | 1977-02-14 | Western Electric Co | PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATE |
-
1973
- 1973-08-31 GB GB4110673A patent/GB1421805A/en not_active Expired
- 1973-09-19 FR FR7334210A patent/FR2206527B1/fr not_active Expired
- 1973-10-26 CA CA 184354 patent/CA1286905C/en not_active Expired - Fee Related
- 1973-10-26 JP JP12003673A patent/JPS4979525A/ja active Pending
- 1973-11-07 DE DE19732355701 patent/DE2355701A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2206527A1 (en) | 1974-06-07 |
JPS4979525A (en) | 1974-08-01 |
DE2355701A1 (en) | 1974-05-16 |
FR2206527B1 (en) | 1978-01-13 |
CA1286905C (en) | 1991-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |