SE391405B - PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATE - Google Patents
PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATEInfo
- Publication number
- SE391405B SE391405B SE7305532A SE7305532A SE391405B SE 391405 B SE391405 B SE 391405B SE 7305532 A SE7305532 A SE 7305532A SE 7305532 A SE7305532 A SE 7305532A SE 391405 B SE391405 B SE 391405B
- Authority
- SE
- Sweden
- Prior art keywords
- monsters
- resist
- procedure
- substrate
- resistance
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Electron Beam Exposure (AREA)
- Electrophotography Using Other Than Carlson'S Method (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Paints Or Removers (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24930872A | 1972-05-01 | 1972-05-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
SE391405B true SE391405B (en) | 1977-02-14 |
Family
ID=22942915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7305532A SE391405B (en) | 1972-05-01 | 1973-04-18 | PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATE |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS512375B2 (en) |
BE (1) | BE798860A (en) |
DE (1) | DE2321684C3 (en) |
FR (1) | FR2183020B1 (en) |
GB (1) | GB1403834A (en) |
IT (1) | IT980926B (en) |
NL (1) | NL154015B (en) |
SE (1) | SE391405B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1421805A (en) * | 1972-11-13 | 1976-01-21 | Ibm | Method of forming a positive resist |
US3893127A (en) * | 1973-09-27 | 1975-07-01 | Rca Corp | Electron beam recording media |
US4289845A (en) * | 1978-05-22 | 1981-09-15 | Bell Telephone Laboratories, Inc. | Fabrication based on radiation sensitive resists and related products |
JPS59222928A (en) * | 1983-06-02 | 1984-12-14 | Matsushita Electronics Corp | Manufacture of mask |
-
1973
- 1973-04-18 SE SE7305532A patent/SE391405B/en unknown
- 1973-04-25 JP JP4629473A patent/JPS512375B2/ja not_active Expired
- 1973-04-25 FR FR7314988A patent/FR2183020B1/fr not_active Expired
- 1973-04-27 IT IT6819373A patent/IT980926B/en active
- 1973-04-27 BE BE130538A patent/BE798860A/en not_active IP Right Cessation
- 1973-04-27 NL NL7305933A patent/NL154015B/en not_active IP Right Cessation
- 1973-04-28 DE DE19732321684 patent/DE2321684C3/en not_active Expired
- 1973-04-30 GB GB2036473A patent/GB1403834A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2183020B1 (en) | 1976-11-12 |
DE2321684B1 (en) | 1974-01-31 |
BE798860A (en) | 1973-08-16 |
IT980926B (en) | 1974-10-10 |
GB1403834A (en) | 1975-08-28 |
DE2321684C3 (en) | 1979-07-26 |
NL7305933A (en) | 1973-11-05 |
JPS512375B2 (en) | 1976-01-26 |
NL154015B (en) | 1977-07-15 |
FR2183020A1 (en) | 1973-12-14 |
DE2321684A1 (en) | 1973-11-15 |
JPS4942352A (en) | 1974-04-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE7800424L (en) | PROCEDURE FOR SIGNING OVER A SUBSTANCE | |
SE410997B (en) | HIGHLY RESISTANT COATING CONSISTING OF SEVERAL LAYERS ON A SUBSTRATE | |
SE7710800L (en) | PROCEDURE FOR THE SUBSTITUTION OF AN EPITAXIAL LAYER ON A SUBSTRATE | |
NO149176C (en) | PROCEDURE FOR N-PHOSPHONOMETHYL-Glycine PREPARATION | |
AT345475B (en) | SUBSTRATE | |
RO88521A (en) | PROCEDURE FOR OBTAINING A CORONARY PREPARATION | |
NO139689C (en) | PROCEDURE FOR THE MANUFACTURE OF LATEX | |
NO144223C (en) | PROCEDURE FOR THE MANUFACTURING OF EXTENSIVE PAPER | |
NL7507269A (en) | THIN LAYER CIRCUIT. | |
NO143089C (en) | PROCEDURE FOR PRE-FORMATING A PLATE COAT FOR A CONVEKT-CONCAVATED SUBSTRATE | |
SE386279B (en) | CONNECTION DEVICE FOR DIGITAL SATURATION OF THE FREQUENCY AT A METSIGNAL WITHIN A METTIME INTERVAL. | |
SE390114B (en) | PROCEDURE FOR EVAPORATION OF A VETSKA | |
SE401217B (en) | PROCEDURE FOR PREPARING A COATING LAYER ON TRAFFICED SURFACES | |
SE399064B (en) | PROCEDURE FOR THE PREPARATION OF A NEW DOPAMINE DERIVATIVE | |
SE412662B (en) | PROCEDURE FOR MANUFACTURING A THIN LAYER CAPACITOR | |
SE384056B (en) | PROCEDURE FOR ADJUSTING THE THICKNESS OF A MATERIAL PATH | |
SE386210B (en) | INCLUDED MARKING A SUBSTRATE | |
SE412408B (en) | PROCEDURE FOR APPLICATION OF A CURRENT COATING OF URETANACRYLATE MATERIAL ON A SUBSTRATE | |
NO136498C (en) | PROCEDURES FOR THE PREPARATION OF A SACCHARASE INHIBITOR | |
SE7508869L (en) | CIRCUIT FOR FORMATION OF A PRE-DETERMINED POINT IMPEDANCE. | |
NO137815C (en) | PROCEDURE FOR PREPARING A MULTI-LAYER FIBER-ARMED HARDENING PLASTIC | |
IT1029819B (en) | SITTILE LAYER VAPORIZER | |
SE391405B (en) | PROCEDURE FOR RESISTANCE OF RESIST MONSTERS ON A SUBSTRATE | |
NO148285C (en) | PROCEDURE FOR MANUFACTURING MULTILAYER MATERIALS | |
SE416953B (en) | ANALOGY PROCEDURE FOR PREPARING SUBSTITUTED PHENYLAMIDINOCARBAMIDE COMPOUNDS |