GB1343843A - Electrical resistance element wirh a semiconductor overlay and method of fabrication thereof - Google Patents

Electrical resistance element wirh a semiconductor overlay and method of fabrication thereof

Info

Publication number
GB1343843A
GB1343843A GB2603371*A GB2603371A GB1343843A GB 1343843 A GB1343843 A GB 1343843A GB 2603371 A GB2603371 A GB 2603371A GB 1343843 A GB1343843 A GB 1343843A
Authority
GB
United Kingdom
Prior art keywords
trays
deposition
resistors
germanium
resistive track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2603371*A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bunker Ramo Corp
Original Assignee
Bunker Ramo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bunker Ramo Corp filed Critical Bunker Ramo Corp
Publication of GB1343843A publication Critical patent/GB1343843A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/30—Adjustable resistors the contact sliding along resistive element
    • H01C10/308—Adjustable resistors the contact sliding along resistive element consisting of a thin film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

1343843 Coating resistors with semiconductor material BUNKER-RAMO CORP 19 April 1971 [11 May 1970] 26033/71 Heading C7F [Also in Division H1] In a flash evaporation apparatus depressions 92 in trays 91 hold resistor elements and holes in the trays permit deposition on only the resistive track which is of nickel-cromium-iron alloy, or cement layer. The apparatus is evacuated to 2 x 10<SP>-5</SP> torr, the trays of resistors are preheated to 300‹ C and germanium in granular form in the vibratory feeder-hopper 100 is fed on to the tantalum or molybdenum boat 105 at 1850‹ C. A glass monitor 116 is provided. After deposition, the temperature is allowed to fall to 115‹ C and the bell jar vented to the atmosphere. Sputtering, thermal evaporation, electron beam evaporation, deposition from plasma may also be used. The thin-fim resistor formed has thus a protective coating of a semi-conductor material preferably germanium or silicon, or else indium antimonide, titanium oxide, or ferric oxide over its resistive track.
GB2603371*A 1970-05-11 1971-04-19 Electrical resistance element wirh a semiconductor overlay and method of fabrication thereof Expired GB1343843A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3604770A 1970-05-11 1970-05-11

Publications (1)

Publication Number Publication Date
GB1343843A true GB1343843A (en) 1974-01-16

Family

ID=21886305

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2603371*A Expired GB1343843A (en) 1970-05-11 1971-04-19 Electrical resistance element wirh a semiconductor overlay and method of fabrication thereof

Country Status (8)

Country Link
US (1) US3673539A (en)
CA (1) CA938687A (en)
CH (1) CH525542A (en)
DE (1) DE2116785A1 (en)
FR (1) FR2088468B3 (en)
GB (1) GB1343843A (en)
IL (1) IL36479A (en)
NL (1) NL7104640A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371861A (en) * 1980-12-11 1983-02-01 Honeywell Inc. Ni-fe thin-film temperature sensor
DE3271993D1 (en) * 1981-04-10 1986-08-21 Braun Ag Electric contact, particularly for printed circuits of small electric appliances
FR2547946B1 (en) * 1983-06-22 1986-01-24 Nitto Electric Ind Co CURSOR VARIABLE RESISTANCE ELEMENT
US4651123A (en) * 1984-08-06 1987-03-17 International Hydraulic Systems, Inc Linear potentiometer
US4772866A (en) * 1986-04-11 1988-09-20 Willens Ronald H Device including a temperature sensor
US4746896A (en) * 1986-05-08 1988-05-24 North American Philips Corp. Layered film resistor with high resistance and high stability
US4845839A (en) * 1988-10-31 1989-07-11 Hamilton Standard Controls, Inc. Method of making a resistive element
US5554965A (en) * 1994-11-02 1996-09-10 The Erie Ceramic Arts Company Lubricated variable resistance control having resistive pads on conductive path
JP3978380B2 (en) * 2002-08-12 2007-09-19 アルプス電気株式会社 Variable resistor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2799756A (en) * 1953-07-29 1957-07-16 Gen Electric Precision potentiometer
US3240625A (en) * 1962-01-10 1966-03-15 Air Reduction Semiconductor film resistor
US3368919A (en) * 1964-07-29 1968-02-13 Sylvania Electric Prod Composite protective coat for thin film devices
US3353134A (en) * 1964-08-17 1967-11-14 Amphenol Corp Resistive element and variable resistor

Also Published As

Publication number Publication date
FR2088468B3 (en) 1974-02-15
DE2116785A1 (en) 1971-12-02
NL7104640A (en) 1971-11-15
IL36479A0 (en) 1971-05-26
CH525542A (en) 1972-07-15
IL36479A (en) 1973-06-29
US3673539A (en) 1972-06-27
FR2088468A3 (en) 1972-01-07
CA938687A (en) 1973-12-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees