GB1259165A - - Google Patents

Info

Publication number
GB1259165A
GB1259165A GB1259165DA GB1259165A GB 1259165 A GB1259165 A GB 1259165A GB 1259165D A GB1259165D A GB 1259165DA GB 1259165 A GB1259165 A GB 1259165A
Authority
GB
United Kingdom
Prior art keywords
passages
mask
hole structure
images
jan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1259165A publication Critical patent/GB1259165A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/005—Diaphragms
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)
  • Ink Jet Recording Methods And Recording Media Thereof (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
GB1259165D 1968-01-30 1969-01-29 Expired GB1259165A (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70176068A 1968-01-30 1968-01-30

Publications (1)

Publication Number Publication Date
GB1259165A true GB1259165A (sv) 1972-01-05

Family

ID=24818564

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1259165D Expired GB1259165A (sv) 1968-01-30 1969-01-29

Country Status (8)

Country Link
US (1) US3556636A (sv)
BE (1) BE727671A (sv)
BR (1) BR6906012D0 (sv)
CH (1) CH496259A (sv)
DE (1) DE1904172B2 (sv)
FR (1) FR2000965A1 (sv)
GB (1) GB1259165A (sv)
NL (1) NL6901353A (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112255715A (zh) * 2020-10-23 2021-01-22 江南大学 一种基于超薄金属薄膜实现宽带光吸收增强的方法及吸波装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678564A (en) * 1968-01-30 1972-07-25 Brunswick Corp Method of producing high resolution images and structure for use therein
US3771592A (en) * 1971-08-16 1973-11-13 Owens Illinois Inc Matrix and method of making same
US5879425A (en) * 1971-09-20 1999-03-09 Litton Systems, Inc. Method for fabrication of microchannel multiplier plates
US4116655A (en) * 1975-07-09 1978-09-26 Elliott Brothers (London) Limited Method for making optical-fibre cables
US4410394A (en) * 1980-12-23 1983-10-18 United Technologies Corporation Methods of making cooled, thermally stable composite mirrors
FR2517835A1 (fr) * 1981-12-03 1983-06-10 Fort Francois Perfectionnements apportes aux conducteurs d'image
US4516832A (en) * 1982-06-23 1985-05-14 International Business Machines Corporation Apparatus for transformation of a collimated beam into a source of _required shape and numerical aperture
US4590492A (en) * 1983-06-07 1986-05-20 The United States Of America As Represented By The Secretary Of The Air Force High resolution optical fiber print head
US5028112A (en) * 1990-06-27 1991-07-02 The United States Of America As Represented By The Secretary Of The Navy Precision multi-channel fiber optic interface and method
WO1995004264A1 (en) 1993-07-29 1995-02-09 Wesley-Jessen Corporation Inspection system for optical components
DE29901791U1 (de) * 1999-02-02 2000-07-06 Novartis Ag Linsenmesseinrichtung
US6765661B2 (en) 2001-03-09 2004-07-20 Novartis Ag Lens inspection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112255715A (zh) * 2020-10-23 2021-01-22 江南大学 一种基于超薄金属薄膜实现宽带光吸收增强的方法及吸波装置
CN112255715B (zh) * 2020-10-23 2021-12-03 江南大学 一种基于超薄金属薄膜实现宽带光吸收增强的方法及吸波装置

Also Published As

Publication number Publication date
BR6906012D0 (pt) 1973-01-18
DE1904172A1 (de) 1969-09-11
CH496259A (de) 1970-09-15
US3556636A (en) 1971-01-19
FR2000965A1 (sv) 1969-09-19
BE727671A (sv) 1969-07-30
NL6901353A (sv) 1969-08-01
DE1904172B2 (de) 1972-04-20

Similar Documents

Publication Publication Date Title
GB1259165A (sv)
DE2628099C2 (de) Verfahren zum Herstellen einer Maske
JPS5425675A (en) Electron beam exposure unit
DE2532048A1 (de) Verfahren zum herstellen eines mit oeffnungen versehenen werkstuecks
GB1283509A (en) Improvements in or relating to the manufacture of shaped components by etching
DE19516226A1 (de) Verfahren zur Herstellung einer Lochmaske
DE3823463C1 (sv)
JPS52119185A (en) Electron beam exposure equipment
US3678564A (en) Method of producing high resolution images and structure for use therein
JPS56137633A (en) Pattern forming
JPS56137632A (en) Pattern forming
DE2511205C3 (de) Verfahren zur Herstellung eines Paares zueinander gehöriger Reproduktionsmasken, die bei der Herstellung einer Farbauswahlelektrode für Farbbildröhren verwendet werden, und Vorrichtung zur Durchführung dieses Verfahrens
DE2122617C3 (sv)
JPS5349953A (en) Soft x-ray transcription mask
JPS5610930A (en) Manufacture of semiconductor device
JPS5654039A (en) Forming method for fine pattern
JPS56115535A (en) Electron beam exposure
JPS57132008A (en) Measuring method for pattern size
JPS52117077A (en) Electron beam-exposing method
JPS56125833A (en) Exposing method for electron beam
JPS53147465A (en) Forming method of patterns for lift-off
JPS5350978A (en) Electron beam exposure method
JPS52149982A (en) Forming method of electrode patterns
JPS5652754A (en) Manufacture of mask for manufacturing semiconductor device
JPS5348677A (en) Electron beam exposure method

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees