CH494582A - Ultra-vacuum levitation evaporation device - Google Patents

Ultra-vacuum levitation evaporation device

Info

Publication number
CH494582A
CH494582A CH336669A CH336669A CH494582A CH 494582 A CH494582 A CH 494582A CH 336669 A CH336669 A CH 336669A CH 336669 A CH336669 A CH 336669A CH 494582 A CH494582 A CH 494582A
Authority
CH
Switzerland
Prior art keywords
ultra
evaporation device
vacuum levitation
levitation evaporation
vacuum
Prior art date
Application number
CH336669A
Other languages
French (fr)
Inventor
Jean Van Audenhove
Joyeux Jean
Parengh Maurits
Original Assignee
Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Euratom filed Critical Euratom
Publication of CH494582A publication Critical patent/CH494582A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/10—Vacuum distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/32—Arrangements for simultaneous levitation and heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
CH336669A 1968-04-05 1969-03-05 Ultra-vacuum levitation evaporation device CH494582A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE713308 1968-04-05

Publications (1)

Publication Number Publication Date
CH494582A true CH494582A (en) 1970-08-15

Family

ID=3852706

Family Applications (1)

Application Number Title Priority Date Filing Date
CH336669A CH494582A (en) 1968-04-05 1969-03-05 Ultra-vacuum levitation evaporation device

Country Status (8)

Country Link
US (1) US3575133A (en)
BE (1) BE713308A (en)
CH (1) CH494582A (en)
FR (1) FR2005635A1 (en)
GB (1) GB1217443A (en)
LU (1) LU58103A1 (en)
NL (1) NL6905225A (en)
SE (1) SE346338B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2917841A1 (en) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS
EP0392067A1 (en) * 1989-04-14 1990-10-17 Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto Vacuum induction furnace
US5254173A (en) * 1992-01-31 1993-10-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Turntable mechanism
KR100461283B1 (en) * 2000-12-30 2004-12-14 현대엘씨디주식회사 Organic source boat structure for organic electro-luminescent display fabricating apparatus
NL1020059C2 (en) * 2002-02-21 2003-08-25 Corus Technology B V Method and device for coating a substrate.
US9920418B1 (en) 2010-09-27 2018-03-20 James Stabile Physical vapor deposition apparatus having a tapered chamber

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
FR1273518A (en) * 1960-10-28 1961-10-13 Ass Elect Ind Improvements to vacuum vaporizers
US3173283A (en) * 1960-12-27 1965-03-16 Vogtmann Hans Process and apparatus for loading extrusion presses
US3476170A (en) * 1967-05-15 1969-11-04 Traub Co The Casting method with laser beam melting of levitated mass

Also Published As

Publication number Publication date
SE346338B (en) 1972-07-03
DE1907542A1 (en) 1969-10-30
BE713308A (en) 1968-10-07
US3575133A (en) 1971-04-13
GB1217443A (en) 1970-12-31
LU58103A1 (en) 1969-06-03
FR2005635A1 (en) 1969-12-12
NL6905225A (en) 1969-10-07
DE1907542B2 (en) 1976-10-28

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Legal Events

Date Code Title Description
PL Patent ceased