GB1082562A - Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition - Google Patents

Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition

Info

Publication number
GB1082562A
GB1082562A GB950965A GB950965A GB1082562A GB 1082562 A GB1082562 A GB 1082562A GB 950965 A GB950965 A GB 950965A GB 950965 A GB950965 A GB 950965A GB 1082562 A GB1082562 A GB 1082562A
Authority
GB
United Kingdom
Prior art keywords
workpieces
holder
coating
vapour
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB950965A
Inventor
Diaz Armando Baussola
Tony Ian Putner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB950965A priority Critical patent/GB1082562A/en
Priority to FR52247A priority patent/FR1470757A/en
Publication of GB1082562A publication Critical patent/GB1082562A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

<PICT:1082562/C6-C7/1> In a vapour deposition process of coating both faces of a plurality of workpieces, such as lenses or electrical resistors, the workpieces are mounted on the periphery of a circular holder which rotates about a horizontal axis in a vacuum chamber which contains two vapour sources, one located inside the circular holder and the other outside and below the holder, and the rotating workpieces are cleaned ionically by glow discharge prior to coating. In a preferred embodiment shown in Fig. 3 the rotary holder 16 in the form of an annular ring is rotated by motor 14 and workpieces 18 are retained on the holder by spring clips 17. Vapour sources 19 and heater 20 are supported by base-plate 12' and electrodes 6 produce the glow discharge. A light source and photo-meter may be incorporated in the apparatus for measuring the deposition. More than two vapour sources may be used and they may be adjusted in a horizontal or vertical plane, the horizontal adjustment being effected from outside the chamber.
GB950965A 1965-03-05 1965-03-05 Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition Expired GB1082562A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB950965A GB1082562A (en) 1965-03-05 1965-03-05 Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition
FR52247A FR1470757A (en) 1965-03-05 1966-03-05 Surface coating process, by vaporized deposition as well as objects obtained by said coating process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB950965A GB1082562A (en) 1965-03-05 1965-03-05 Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition

Publications (1)

Publication Number Publication Date
GB1082562A true GB1082562A (en) 1967-09-06

Family

ID=9873337

Family Applications (1)

Application Number Title Priority Date Filing Date
GB950965A Expired GB1082562A (en) 1965-03-05 1965-03-05 Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition

Country Status (1)

Country Link
GB (1) GB1082562A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810811A1 (en) * 1977-03-17 1978-09-21 Balzers Hochvakuum VACUUM EVAPORATION SYSTEM
EP1496136A1 (en) * 2003-07-07 2005-01-12 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Vacuum Evaporator
WO2005098082A2 (en) * 2004-04-06 2005-10-20 Carl Zeiss Vision Gmbh Device for coating both sides of a substrate with a hydrophobic layer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2810811A1 (en) * 1977-03-17 1978-09-21 Balzers Hochvakuum VACUUM EVAPORATION SYSTEM
EP1496136A1 (en) * 2003-07-07 2005-01-12 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Vacuum Evaporator
US7131392B2 (en) 2003-07-07 2006-11-07 Kobe Steel, Ltd. Vacuum evaporator
WO2005098082A2 (en) * 2004-04-06 2005-10-20 Carl Zeiss Vision Gmbh Device for coating both sides of a substrate with a hydrophobic layer
WO2005098082A3 (en) * 2004-04-06 2006-03-09 Carl Zeiss Vision Gmbh Device for coating both sides of a substrate with a hydrophobic layer

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