GB1003378A - Monitoring the thickness of films being vacuum deposited - Google Patents
Monitoring the thickness of films being vacuum depositedInfo
- Publication number
- GB1003378A GB1003378A GB1214264A GB1214264A GB1003378A GB 1003378 A GB1003378 A GB 1003378A GB 1214264 A GB1214264 A GB 1214264A GB 1214264 A GB1214264 A GB 1214264A GB 1003378 A GB1003378 A GB 1003378A
- Authority
- GB
- United Kingdom
- Prior art keywords
- workpieces
- thickness
- chamber
- vessel
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
Abstract
The thickness of thin films deposited from material heated in a rotating vessel on one or more stationary workpieces in a vacuum is monitored by detecting the film thickness deposited on a stationary workpiece, e.g. by directing a ligh beam on to it and measuring the beam after it has passed through or been reflected from the workpiece. As shown, a plurality of workpieces 4 are placed on a <PICT:1003378/C6-C7/1> stationary support 5 on legs 6 within a chamber 1 sealingly mounted on a base plate 2. A vessel 7 containing the material to be evaporated is carried by copper arms 8 and 9 mounted on a shaft, comprising copper core 10 and outer conductor 11 insulated by an intermediate layer 12, passing through the base plate 2. The chamber is evacuated, and the vessel is rotated by belt drive 15 driven by a motor 17 while it is heated by supplying current to conductors 10 and 11 via slip-ring assembly 14 so that material is deposited evenly on all the workpieces. The film thickness on one of the workpieces 4a is continously tested during deposition by passing a light beam 21 through pressure resistant windows 19 and 20, which may be in the base, sides or roof of the chamber. When the thickness has reached the desired value, deposition is terminated, e.g. by operating a shutter which interrupts the evaporant stream. The method may be applied to the manufacture of optical filters, semi-conductors or thin magnetic films.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1214264A GB1003378A (en) | 1964-03-23 | 1964-03-23 | Monitoring the thickness of films being vacuum deposited |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1214264A GB1003378A (en) | 1964-03-23 | 1964-03-23 | Monitoring the thickness of films being vacuum deposited |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1003378A true GB1003378A (en) | 1965-09-02 |
Family
ID=9999114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1214264A Expired GB1003378A (en) | 1964-03-23 | 1964-03-23 | Monitoring the thickness of films being vacuum deposited |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1003378A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4121537A (en) * | 1976-03-19 | 1978-10-24 | Hitachi, Ltd. | Apparatus for vacuum deposition |
| CN108728810A (en) * | 2018-08-16 | 2018-11-02 | 广东振华科技股份有限公司 | A kind of vacuum and low temperature magnetron sputtering coater |
-
1964
- 1964-03-23 GB GB1214264A patent/GB1003378A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4121537A (en) * | 1976-03-19 | 1978-10-24 | Hitachi, Ltd. | Apparatus for vacuum deposition |
| CN108728810A (en) * | 2018-08-16 | 2018-11-02 | 广东振华科技股份有限公司 | A kind of vacuum and low temperature magnetron sputtering coater |
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