FR3063740B1 - Elements de chambres a vide en alliage d’aluminium stables a haute temperature - Google Patents
Elements de chambres a vide en alliage d’aluminium stables a haute temperature Download PDFInfo
- Publication number
- FR3063740B1 FR3063740B1 FR1751981A FR1751981A FR3063740B1 FR 3063740 B1 FR3063740 B1 FR 3063740B1 FR 1751981 A FR1751981 A FR 1751981A FR 1751981 A FR1751981 A FR 1751981A FR 3063740 B1 FR3063740 B1 FR 3063740B1
- Authority
- FR
- France
- Prior art keywords
- high temperature
- aluminum alloy
- thickness
- temperature stable
- chamber elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910000838 Al alloy Inorganic materials 0.000 title abstract 2
- 238000003754 machining Methods 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000004381 surface treatment Methods 0.000 abstract 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
- C22F1/05—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys of the Al-Si-Mg type, i.e. containing silicon and magnesium in approximately equal proportions
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
- C22C21/02—Alloys based on aluminium with silicon as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
- C22C21/06—Alloys based on aluminium with magnesium as the next major constituent
- C22C21/08—Alloys based on aluminium with magnesium as the next major constituent with silicon
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
- C22F1/043—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with silicon as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
- C22F1/047—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with magnesium as the next major constituent
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/10—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Heat Treatment Of Sheet Steel (AREA)
- ing And Chemical Polishing (AREA)
- Laminated Bodies (AREA)
- Heat Treatment Of Steel (AREA)
- Particle Accelerators (AREA)
- Powder Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Abstract
L'invention concerne un élément de chambre à vide obtenu par usinage et traitement de surface d'une tôle d'épaisseur au moins égale à 10 mm en alliage d'aluminium de composition, en % en poids, Si : 0,4 - 0,7 ; Mg : 0,4 - 1,0 ; le rapport en % en poids Mg/Si étant inférieur à 1,8 ; Ti : 0,01 - 0,15, Fe 0,08 - 0,25 ; Cu < 0,35 ; Mn < 0,4 ; Cr : < 0,25 ; Zn < 0,04 ; autres éléments < 0,05 chacun et < 0,15 au total, reste aluminium, caractérisée en ce que la taille de grain de ladite tôle est telle que la longueur moyenne d'interception linéaire l, mesurée dans le plan L/TC selon la norme ASTM E112, est au moins égale à 350 µm entre surface et ½ épaisseur. L'invention concerne également le procédé de fabrication d'un tel élément de chambre à vide. Les produits selon l'invention sont particulièrement avantageux en particulier en termes de résistance à la déformation par fluage à haute température, tout ayant des propriétés élevées de résistance à la corrosion, d'homogénéité des propriétés dans l'épaisseur et d'aptitude à l'usinage.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1751981A FR3063740B1 (fr) | 2017-03-10 | 2017-03-10 | Elements de chambres a vide en alliage d’aluminium stables a haute temperature |
CN201880017403.3A CN110402296B (zh) | 2017-03-10 | 2018-03-01 | 高温稳定的铝合金真空室元件 |
KR1020197029492A KR102584052B1 (ko) | 2017-03-10 | 2018-03-01 | 고온 안정성의 알루미늄 합금 진공 챔버 요소 |
SG11201907957Y SG11201907957YA (en) | 2017-03-10 | 2018-03-01 | Aluminium alloy vacuum chamber elements stable at high temperature |
JP2019571109A JP2020510761A (ja) | 2017-03-10 | 2018-03-01 | 高温安定性のあるアルミニウム合金製真空チャンバ要素 |
US16/492,085 US11248280B2 (en) | 2017-03-10 | 2018-03-01 | Aluminium alloy vacuum chamber elements stable at high temperature |
EP18714563.6A EP3592875B1 (fr) | 2017-03-10 | 2018-03-01 | Elements de chambres a vide en alliage d'aluminium stables a haute temperature |
PCT/FR2018/050481 WO2018162823A1 (fr) | 2017-03-10 | 2018-03-01 | Elements de chambres a vide en alliage d'aluminium stables a haute temperature |
TW107108171A TW201840864A (zh) | 2017-03-10 | 2018-03-09 | 高溫穩定的鋁合金真空腔室元件 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1751981 | 2017-03-10 | ||
FR1751981A FR3063740B1 (fr) | 2017-03-10 | 2017-03-10 | Elements de chambres a vide en alliage d’aluminium stables a haute temperature |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3063740A1 FR3063740A1 (fr) | 2018-09-14 |
FR3063740B1 true FR3063740B1 (fr) | 2019-03-15 |
Family
ID=59325372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1751981A Active FR3063740B1 (fr) | 2017-03-10 | 2017-03-10 | Elements de chambres a vide en alliage d’aluminium stables a haute temperature |
Country Status (9)
Country | Link |
---|---|
US (1) | US11248280B2 (fr) |
EP (1) | EP3592875B1 (fr) |
JP (1) | JP2020510761A (fr) |
KR (1) | KR102584052B1 (fr) |
CN (1) | CN110402296B (fr) |
FR (1) | FR3063740B1 (fr) |
SG (1) | SG11201907957YA (fr) |
TW (1) | TW201840864A (fr) |
WO (1) | WO2018162823A1 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102578561B1 (ko) | 2019-03-13 | 2023-09-15 | 노벨리스 인크. | 시효-경화성 및 고 성형성 알루미늄 합금, 이로 제조된 모놀리식 시트 및 이를 포함하는 클래드 알루미늄 합금 제품 |
CN110129633B (zh) * | 2019-05-23 | 2020-06-05 | 江苏亨通电力特种导线有限公司 | 家具用铝合金铆钉线及其制备方法 |
FR3101641B1 (fr) | 2019-10-04 | 2022-01-21 | Constellium Issoire | Tôles de précision en alliage d’aluminium |
CN111041294B9 (zh) * | 2019-12-31 | 2021-03-12 | 辽宁忠旺集团有限公司 | 具有高长期热稳定性的6系低合金成分及其制备方法 |
EP3922743B1 (fr) * | 2020-06-10 | 2024-07-24 | Novelis Koblenz GmbH | Procédé de fabrication de plaque d'aluminium pour chambres à vide |
CN113234972A (zh) * | 2021-04-30 | 2021-08-10 | 广东坚美铝型材厂(集团)有限公司 | 一种铝合金建筑模板及其制备方法 |
CN113684400A (zh) * | 2021-08-22 | 2021-11-23 | 山东华建铝业科技有限公司 | 一种高性能光伏铝合金边框及其生产工艺 |
FR3136242B1 (fr) | 2022-06-01 | 2024-05-03 | Constellium Valais | Tôles pour éléments de chambres à vide en alliage d’aluminium |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6027629A (en) | 1994-11-16 | 2000-02-22 | Kabushiki Kaisha Kobe Seiko Sho | Vacuum chamber made of aluminum or its alloys, and surface treatment and material for the vacuum chamber |
JPH11140690A (ja) | 1997-11-14 | 1999-05-25 | Kobe Steel Ltd | 耐熱割れ性および耐食性に優れたAl材料 |
JP3997009B2 (ja) * | 1998-10-07 | 2007-10-24 | 株式会社神戸製鋼所 | 高速動部品用アルミニウム合金鍛造材 |
JP3919996B2 (ja) | 2000-02-04 | 2007-05-30 | 株式会社神戸製鋼所 | プラズマ処理装置用アルミニウム合金、プラズマ処理装置用アルミニウム合金部材およびプラズマ処理装置 |
US6521046B2 (en) | 2000-02-04 | 2003-02-18 | Kabushiki Kaisha Kobe Seiko Sho | Chamber material made of Al alloy and heater block |
JP2003034894A (ja) | 2001-07-25 | 2003-02-07 | Kobe Steel Ltd | 耐腐食性に優れたAl合金部材 |
US7033447B2 (en) | 2002-02-08 | 2006-04-25 | Applied Materials, Inc. | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus |
US6565984B1 (en) | 2002-05-28 | 2003-05-20 | Applied Materials Inc. | Clean aluminum alloy for semiconductor processing equipment |
JP2004225113A (ja) | 2003-01-23 | 2004-08-12 | Kobe Steel Ltd | 耐腐食性及び耐プラズマ性に優れたAl合金部材 |
JP4168066B2 (ja) * | 2006-08-11 | 2008-10-22 | 株式会社神戸製鋼所 | プラズマ処理装置に用いられる陽極酸化処理用アルミニウム合金およびその製造方法、陽極酸化皮膜を有するアルミニウム合金部材、ならびにプラズマ処理装置 |
JP5064935B2 (ja) | 2007-08-22 | 2012-10-31 | 株式会社神戸製鋼所 | 耐久性と低汚染性を兼備した陽極酸化処理アルミニウム合金 |
FR2955336B1 (fr) | 2010-01-20 | 2013-02-15 | Alcan Rhenalu | Procede de fabrication de produits en alliage 6xxx pour chambre a vide |
FR2996857B1 (fr) | 2012-10-17 | 2015-02-27 | Constellium France | Elements de chambres a vide en alliage d'aluminium |
-
2017
- 2017-03-10 FR FR1751981A patent/FR3063740B1/fr active Active
-
2018
- 2018-03-01 US US16/492,085 patent/US11248280B2/en active Active
- 2018-03-01 CN CN201880017403.3A patent/CN110402296B/zh active Active
- 2018-03-01 KR KR1020197029492A patent/KR102584052B1/ko active IP Right Grant
- 2018-03-01 EP EP18714563.6A patent/EP3592875B1/fr active Active
- 2018-03-01 SG SG11201907957Y patent/SG11201907957YA/en unknown
- 2018-03-01 JP JP2019571109A patent/JP2020510761A/ja active Pending
- 2018-03-01 WO PCT/FR2018/050481 patent/WO2018162823A1/fr active Application Filing
- 2018-03-09 TW TW107108171A patent/TW201840864A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2020510761A (ja) | 2020-04-09 |
KR102584052B1 (ko) | 2023-09-27 |
TW201840864A (zh) | 2018-11-16 |
FR3063740A1 (fr) | 2018-09-14 |
US11248280B2 (en) | 2022-02-15 |
EP3592875A1 (fr) | 2020-01-15 |
KR20190126851A (ko) | 2019-11-12 |
CN110402296B (zh) | 2021-04-20 |
CN110402296A (zh) | 2019-11-01 |
EP3592875B1 (fr) | 2024-05-01 |
SG11201907957YA (en) | 2019-11-28 |
EP3592875C0 (fr) | 2024-05-01 |
US20210130933A1 (en) | 2021-05-06 |
WO2018162823A1 (fr) | 2018-09-13 |
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