FR3037971B1 - Procede de traitement d'une piece en tantale ou en un alliage de tantale - Google Patents

Procede de traitement d'une piece en tantale ou en un alliage de tantale

Info

Publication number
FR3037971B1
FR3037971B1 FR1555872A FR1555872A FR3037971B1 FR 3037971 B1 FR3037971 B1 FR 3037971B1 FR 1555872 A FR1555872 A FR 1555872A FR 1555872 A FR1555872 A FR 1555872A FR 3037971 B1 FR3037971 B1 FR 3037971B1
Authority
FR
France
Prior art keywords
tantal
processing
alloy part
alloy
tantal alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1555872A
Other languages
English (en)
Other versions
FR3037971A1 (fr
Inventor
Dominique Cotton
Sebastien Faure
Philippe Jacquet
Vincent Vignal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1555872A priority Critical patent/FR3037971B1/fr
Priority to EP16175631.7A priority patent/EP3109339B1/fr
Priority to US15/189,778 priority patent/US10287667B2/en
Priority to JP2016125538A priority patent/JP6803156B2/ja
Priority to KR1020160079146A priority patent/KR102501313B1/ko
Publication of FR3037971A1 publication Critical patent/FR3037971A1/fr
Application granted granted Critical
Publication of FR3037971B1 publication Critical patent/FR3037971B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C27/00Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/02Alloys based on vanadium, niobium, or tantalum
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • C22C29/06Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/02Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working in inert or controlled atmosphere or vacuum
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80After-treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06Forming or maintaining special atmospheres or vacuum within heating chambers
    • F27D2007/066Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • F27D2009/007Cooling of charges therein
    • F27D2009/0081Cooling of charges therein the cooling medium being a fluid (other than a gas in direct or indirect contact with the charge)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • F27D2019/0028Regulation
    • F27D2019/0031Regulation through control of the flow of the exhaust gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • F27D2019/0028Regulation
    • F27D2019/0056Regulation involving cooling
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • F27D2019/0028Regulation
    • F27D2019/0075Regulation of the charge quantity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
FR1555872A 2015-06-25 2015-06-25 Procede de traitement d'une piece en tantale ou en un alliage de tantale Active FR3037971B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1555872A FR3037971B1 (fr) 2015-06-25 2015-06-25 Procede de traitement d'une piece en tantale ou en un alliage de tantale
EP16175631.7A EP3109339B1 (fr) 2015-06-25 2016-06-22 Procede de traitement d'une pièce en tantale ou en un alliage de tantale
US15/189,778 US10287667B2 (en) 2015-06-25 2016-06-22 Process for treating a piece of tantalum or of a tantalum alloy
JP2016125538A JP6803156B2 (ja) 2015-06-25 2016-06-24 タンタル又はタンタル合金部材を処理するための方法
KR1020160079146A KR102501313B1 (ko) 2015-06-25 2016-06-24 탄탈륨 단편 또는 탄탈륨 합금 단편의 처리 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1555872A FR3037971B1 (fr) 2015-06-25 2015-06-25 Procede de traitement d'une piece en tantale ou en un alliage de tantale

Publications (2)

Publication Number Publication Date
FR3037971A1 FR3037971A1 (fr) 2016-12-30
FR3037971B1 true FR3037971B1 (fr) 2017-07-21

Family

ID=55361566

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1555872A Active FR3037971B1 (fr) 2015-06-25 2015-06-25 Procede de traitement d'une piece en tantale ou en un alliage de tantale

Country Status (5)

Country Link
US (1) US10287667B2 (fr)
EP (1) EP3109339B1 (fr)
JP (1) JP6803156B2 (fr)
KR (1) KR102501313B1 (fr)
FR (1) FR3037971B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107164678B (zh) * 2017-04-26 2018-10-02 北京有色金属研究总院 一种高温化学容器用钽材料及其制备方法
CN112159952B (zh) * 2020-10-10 2022-07-12 哈尔滨科友半导体产业装备与技术研究院有限公司 一种能同时碳化多个钽片的装置及方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB702936A (en) * 1948-12-30 1954-01-27 Heraeus Gmbh W C Improvements relating to spinning nozzles for rayon and cellulose wool
FR1056564A (fr) * 1952-05-15 1954-03-01 Onera (Off Nat Aerospatiale) Procédé pour la formation de couches extra-dures sur les métaux et leurs alliages
US3163563A (en) * 1962-07-13 1964-12-29 Nat Res Corp Composite body formed of a tantalum alloy having an outer carburized surface layer
US4664722A (en) * 1985-10-24 1987-05-12 Hughes Tool Company-Usa Method for protecting from hardening a selected region of a steel structure
US5383981A (en) 1993-06-14 1995-01-24 The United States Of America As Represented By The United States Department Of Energy Reusable crucible for containing corrosive liquids
US5580397A (en) * 1995-01-26 1996-12-03 The United States Of America As Represented By The Department Of Energy Carbide and carbonitride surface treatment method for refractory metals
US5916377A (en) 1997-04-21 1999-06-29 The Regents Of The University Of California Packed bed carburization of tantalum and tantalum alloy
US20070059501A1 (en) * 2003-08-01 2007-03-15 The New Industry Research Organization Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode
JP3680281B2 (ja) 2003-08-01 2005-08-10 学校法人関西学院 タンタルの炭化物、タンタルの炭化物の製造方法、タンタルの炭化物配線、タンタルの炭化物電極
DE102004034807A1 (de) * 2004-07-19 2006-03-16 Ip2H Ag Lichtquelle und ein Verfahren zur mechanischen Stabilisierung des Filaments oder der Elektrode einer Lichtquelle
EP1859069A1 (fr) * 2005-02-26 2007-11-28 General Electric Company Procede pour stabiliser le substrat de superalliages a base de nickel a revetement de diffusion en aluminiure
JP4926632B2 (ja) 2006-09-27 2012-05-09 東洋炭素株式会社 タンタルと炭素結合物の製造方法、タンタルと炭素の傾斜組成構造及びタンタル−炭素複合体
JP2015050001A (ja) * 2013-08-30 2015-03-16 スタンレー電気株式会社 近赤外ヒーター
JP2015098634A (ja) * 2013-11-20 2015-05-28 スタンレー電気株式会社 炭化タンタルフィラメントの製造方法及び炭化タンタル電球の製造方法
CN107429394A (zh) * 2015-02-18 2017-12-01 麒麟株式会社 发热体及其制造方法

Also Published As

Publication number Publication date
EP3109339B1 (fr) 2017-06-21
JP2017088998A (ja) 2017-05-25
FR3037971A1 (fr) 2016-12-30
JP6803156B2 (ja) 2020-12-23
KR102501313B1 (ko) 2023-02-17
US20160376692A1 (en) 2016-12-29
EP3109339A1 (fr) 2016-12-28
KR20170001636A (ko) 2017-01-04
US10287667B2 (en) 2019-05-14

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