FR3031749B1 - Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs - Google Patents
Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs Download PDFInfo
- Publication number
- FR3031749B1 FR3031749B1 FR1550466A FR1550466A FR3031749B1 FR 3031749 B1 FR3031749 B1 FR 3031749B1 FR 1550466 A FR1550466 A FR 1550466A FR 1550466 A FR1550466 A FR 1550466A FR 3031749 B1 FR3031749 B1 FR 3031749B1
- Authority
- FR
- France
- Prior art keywords
- ordinated
- enhancing
- block copolymer
- copolymer films
- dimensional uniformity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229920001400 block copolymer Polymers 0.000 title 1
- 230000002708 enhancing effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L53/00—Compositions of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0254—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/06—Hydrocarbons
- C08F212/08—Styrene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/12—Esters of monohydric alcohols or phenols
- C08F220/14—Methyl esters, e.g. methyl (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
- C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2353/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2453/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/16—Applications used for films
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Graft Or Block Polymers (AREA)
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1550466A FR3031749B1 (fr) | 2015-01-21 | 2015-01-21 | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs |
JP2017537908A JP2018506183A (ja) | 2015-01-21 | 2016-01-21 | ブロックコポリマーの秩序膜(ordered film)の限界寸法均一性を向上させるための方法 |
US15/545,068 US20180203348A1 (en) | 2015-01-21 | 2016-01-21 | Process for improving the critical dimension uniformity of ordered films of block copolymers |
KR1020177023124A KR20170118744A (ko) | 2015-01-21 | 2016-01-21 | 블록 공중합체의 질서화된 필름의 임계 치수 균일성 개선 방법 |
TW105101872A TWI598395B (zh) | 2015-01-21 | 2016-01-21 | 改良嵌段共聚物的有序膜之臨界尺度均勻性之方法 |
CN201680017108.9A CN107406660A (zh) | 2015-01-21 | 2016-01-21 | 用于改善嵌段共聚物的有序膜的关键尺寸均匀性的方法 |
SG11201705896UA SG11201705896UA (en) | 2015-01-21 | 2016-01-21 | Method for improving the critical dimension uniformity of ordered films of block copolymers |
PCT/FR2016/050113 WO2016116705A1 (fr) | 2015-01-21 | 2016-01-21 | Procédé d'amélioration de l'uniformité de dimension critique de films ordonnés de copolymères à blocs |
EP16703591.4A EP3247747A1 (fr) | 2015-01-21 | 2016-01-21 | Procédé d'amélioration de l'uniformité de dimension critique de films ordonnés de copolymères à blocs |
US16/656,103 US20200057368A1 (en) | 2015-01-21 | 2019-10-17 | Process for improving the critical dimension uniformity of ordered films of block copolymers |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1550466 | 2015-01-21 | ||
FR1550466A FR3031749B1 (fr) | 2015-01-21 | 2015-01-21 | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3031749A1 FR3031749A1 (fr) | 2016-07-22 |
FR3031749B1 true FR3031749B1 (fr) | 2018-09-28 |
Family
ID=52779889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1550466A Active FR3031749B1 (fr) | 2015-01-21 | 2015-01-21 | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs |
Country Status (9)
Country | Link |
---|---|
US (2) | US20180203348A1 (fr) |
EP (1) | EP3247747A1 (fr) |
JP (1) | JP2018506183A (fr) |
KR (1) | KR20170118744A (fr) |
CN (1) | CN107406660A (fr) |
FR (1) | FR3031749B1 (fr) |
SG (1) | SG11201705896UA (fr) |
TW (1) | TWI598395B (fr) |
WO (1) | WO2016116705A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3031748B1 (fr) * | 2015-01-21 | 2018-09-28 | Arkema France | Procede de reduction du temps d'assemblage des films ordones de copolymere a blocs |
FR3075800B1 (fr) * | 2017-12-21 | 2020-10-09 | Arkema France | Couches anti adhesives pour les procedes d'impression par transfert |
US20220236639A1 (en) * | 2021-01-22 | 2022-07-28 | Tokyo Electron Limited | Directed self-assembly |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4127682B2 (ja) * | 1999-06-07 | 2008-07-30 | 株式会社東芝 | パターン形成方法 |
US8133534B2 (en) * | 2004-11-22 | 2012-03-13 | Wisconsin Alumni Research Foundation | Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials |
WO2009145204A1 (fr) * | 2008-05-30 | 2009-12-03 | Canon Kabushiki Kaisha | Film de copolymère séquencé et son procédé de fabrication |
US8821978B2 (en) * | 2009-12-18 | 2014-09-02 | International Business Machines Corporation | Methods of directed self-assembly and layered structures formed therefrom |
WO2011128120A1 (fr) * | 2010-04-14 | 2011-10-20 | Asml Netherlands B.V. | Procédé pour la production d'une couche ordonnée de polymère apte à l'autoassemblage destinée à être utilisée en lithographie |
JP5300799B2 (ja) * | 2010-07-28 | 2013-09-25 | 株式会社東芝 | パターン形成方法及びポリマーアロイ下地材料 |
JP5694109B2 (ja) * | 2011-09-26 | 2015-04-01 | 株式会社東芝 | パターン形成方法 |
FR2983773B1 (fr) | 2011-12-09 | 2014-10-24 | Arkema France | Procede de preparation de surfaces |
US8513356B1 (en) * | 2012-02-10 | 2013-08-20 | Dow Global Technologies Llc | Diblock copolymer blend composition |
US9012545B2 (en) * | 2012-08-31 | 2015-04-21 | Rohm And Haas Electronic Materials Llc | Composition and method for preparing pattern on a substrate |
-
2015
- 2015-01-21 FR FR1550466A patent/FR3031749B1/fr active Active
-
2016
- 2016-01-21 SG SG11201705896UA patent/SG11201705896UA/en unknown
- 2016-01-21 US US15/545,068 patent/US20180203348A1/en not_active Abandoned
- 2016-01-21 KR KR1020177023124A patent/KR20170118744A/ko not_active Application Discontinuation
- 2016-01-21 JP JP2017537908A patent/JP2018506183A/ja active Pending
- 2016-01-21 TW TW105101872A patent/TWI598395B/zh active
- 2016-01-21 EP EP16703591.4A patent/EP3247747A1/fr not_active Withdrawn
- 2016-01-21 CN CN201680017108.9A patent/CN107406660A/zh active Pending
- 2016-01-21 WO PCT/FR2016/050113 patent/WO2016116705A1/fr active Application Filing
-
2019
- 2019-10-17 US US16/656,103 patent/US20200057368A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
SG11201705896UA (en) | 2017-08-30 |
WO2016116705A1 (fr) | 2016-07-28 |
FR3031749A1 (fr) | 2016-07-22 |
KR20170118744A (ko) | 2017-10-25 |
TW201700593A (zh) | 2017-01-01 |
TWI598395B (zh) | 2017-09-11 |
US20200057368A1 (en) | 2020-02-20 |
US20180203348A1 (en) | 2018-07-19 |
CN107406660A (zh) | 2017-11-28 |
EP3247747A1 (fr) | 2017-11-29 |
JP2018506183A (ja) | 2018-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR3032366B1 (fr) | Procede de tri selectif | |
FR3021455B1 (fr) | Procede d'aplanissement d'evidements remplis de cuivre | |
FR3038894B1 (fr) | Procede de fabrication d'aluminates de calcium | |
FR3028043B1 (fr) | Procede de detection d'une contamination a la merule | |
HUE052138T2 (hu) | Eljárás mikropórusos mûanyag film elõállítására | |
FR3044953B1 (fr) | Dispositif de moule de thermoformage par aspiration et procede de fabrication le mettant en oeuvre | |
IL261451B (en) | A layered metrology system on every surface | |
FR3038312B1 (fr) | Procede de preparation de polyols | |
FR3036473B1 (fr) | Procede de mesure de la position d'une structure mobile | |
FR3019310B1 (fr) | Procede de geo-localisation de l'environnement d'un porteur | |
FR3031749B1 (fr) | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs | |
FR3019967B1 (fr) | Procede d'ostreiculture ameliore | |
HUE051622T2 (hu) | Eljárás mikropórusos mûanyag film elõállítására | |
HUE048832T2 (hu) | Eljárás mikropórusos mûanyag film elõállítására | |
FR3038247B1 (fr) | Machine d'etirage de film | |
SG11201804695VA (en) | Process for reducing the structuring time of ordered films of block copolymer | |
SG11201804781VA (en) | Process for improving the critical dimension uniformity of ordered films of block copolymer | |
EP3462946A4 (fr) | Appareil du type vêtement ajustable | |
FR3042869B1 (fr) | Procede de caracterisation d'un objet en materiau composite | |
FR3022176B1 (fr) | Dispositif de moule de thermoformage et procede de fabrication le mettant en oeuvre | |
MA47014A (fr) | Procédé de purification d'antibiotiques lipopeptidiques | |
MA46385A (fr) | Procede de preparation de monohydrogenophosphate de calcium | |
PL3349962T3 (pl) | Urządzenie do wytwarzania rur z tworzyw sztucznych | |
FR3038111B1 (fr) | Procede de segmentation d'image | |
FR3031750B1 (fr) | Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20160722 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
PLFP | Fee payment |
Year of fee payment: 8 |
|
PLFP | Fee payment |
Year of fee payment: 9 |
|
PLFP | Fee payment |
Year of fee payment: 10 |