FR2957145B1 - Montage d'electrodes de capteur de vitesse de rotation ainsi que capteur equipe et procede de determination d'une vitesse de rotation - Google Patents

Montage d'electrodes de capteur de vitesse de rotation ainsi que capteur equipe et procede de determination d'une vitesse de rotation Download PDF

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Publication number
FR2957145B1
FR2957145B1 FR1151805A FR1151805A FR2957145B1 FR 2957145 B1 FR2957145 B1 FR 2957145B1 FR 1151805 A FR1151805 A FR 1151805A FR 1151805 A FR1151805 A FR 1151805A FR 2957145 B1 FR2957145 B1 FR 2957145B1
Authority
FR
France
Prior art keywords
rotation speed
electrode
plane
arrangement
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1151805A
Other languages
English (en)
French (fr)
Other versions
FR2957145A1 (fr
Inventor
Torsten Ohms
Daniel Christoph Meisel
Joerg Hauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2957145A1 publication Critical patent/FR2957145A1/fr
Application granted granted Critical
Publication of FR2957145B1 publication Critical patent/FR2957145B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
FR1151805A 2010-03-08 2011-03-07 Montage d'electrodes de capteur de vitesse de rotation ainsi que capteur equipe et procede de determination d'une vitesse de rotation Expired - Fee Related FR2957145B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010002657.3 2010-03-08
DE201010002657 DE102010002657A1 (de) 2010-03-08 2010-03-08 Elektrodenanordnung für einen Drehratensensor, Drehratensensor und Verfahren zur Ermittlung einer Drehrate

Publications (2)

Publication Number Publication Date
FR2957145A1 FR2957145A1 (fr) 2011-09-09
FR2957145B1 true FR2957145B1 (fr) 2018-09-07

Family

ID=44501504

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1151805A Expired - Fee Related FR2957145B1 (fr) 2010-03-08 2011-03-07 Montage d'electrodes de capteur de vitesse de rotation ainsi que capteur equipe et procede de determination d'une vitesse de rotation

Country Status (3)

Country Link
CN (1) CN102192733B (de)
DE (1) DE102010002657A1 (de)
FR (1) FR2957145B1 (de)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4884446A (en) * 1987-03-12 1989-12-05 Ljung Per B Solid state vibrating gyro
US5461916A (en) * 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
DE19523895A1 (de) 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
KR0171009B1 (ko) * 1995-12-07 1999-05-01 양승택 원판 진동형 마이크로 자이로스코프 및 그의 제조방법
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
US7984648B2 (en) * 2008-04-10 2011-07-26 Honeywell International Inc. Systems and methods for acceleration and rotational determination from an in-plane and out-of-plane MEMS device

Also Published As

Publication number Publication date
FR2957145A1 (fr) 2011-09-09
DE102010002657A1 (de) 2011-09-08
CN102192733B (zh) 2016-02-24
CN102192733A (zh) 2011-09-21

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