FR2820833B1 - Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir - Google Patents

Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir

Info

Publication number
FR2820833B1
FR2820833B1 FR0102065A FR0102065A FR2820833B1 FR 2820833 B1 FR2820833 B1 FR 2820833B1 FR 0102065 A FR0102065 A FR 0102065A FR 0102065 A FR0102065 A FR 0102065A FR 2820833 B1 FR2820833 B1 FR 2820833B1
Authority
FR
France
Prior art keywords
micro
mirrors
mirror
matrix
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0102065A
Other languages
English (en)
Other versions
FR2820833A1 (fr
Inventor
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teem Photonics SA
Original Assignee
Teem Photonics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics SA filed Critical Teem Photonics SA
Priority to FR0102065A priority Critical patent/FR2820833B1/fr
Priority to PCT/FR2002/000545 priority patent/WO2002065186A2/fr
Priority to JP2002564645A priority patent/JP2004522996A/ja
Priority to EP02704815A priority patent/EP1390793A2/fr
Priority to CA002437816A priority patent/CA2437816A1/fr
Priority to US10/468,060 priority patent/US20040061961A1/en
Publication of FR2820833A1 publication Critical patent/FR2820833A1/fr
Application granted granted Critical
Publication of FR2820833B1 publication Critical patent/FR2820833B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
FR0102065A 2001-02-15 2001-02-15 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir Expired - Fee Related FR2820833B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0102065A FR2820833B1 (fr) 2001-02-15 2001-02-15 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
PCT/FR2002/000545 WO2002065186A2 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.
JP2002564645A JP2004522996A (ja) 2001-02-15 2002-02-13 旋回する光マイクロミラー、マイクロミラーのマトリックス、およびマイクロミラーの製造方法
EP02704815A EP1390793A2 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.
CA002437816A CA2437816A1 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.
US10/468,060 US20040061961A1 (en) 2001-02-15 2002-02-13 Pivoting optical micromirror, array for such micromirrors and method for making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0102065A FR2820833B1 (fr) 2001-02-15 2001-02-15 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir

Publications (2)

Publication Number Publication Date
FR2820833A1 FR2820833A1 (fr) 2002-08-16
FR2820833B1 true FR2820833B1 (fr) 2004-05-28

Family

ID=8860053

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0102065A Expired - Fee Related FR2820833B1 (fr) 2001-02-15 2001-02-15 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir

Country Status (6)

Country Link
US (1) US20040061961A1 (fr)
EP (1) EP1390793A2 (fr)
JP (1) JP2004522996A (fr)
CA (1) CA2437816A1 (fr)
FR (1) FR2820833B1 (fr)
WO (1) WO2002065186A2 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002258174A (ja) * 2001-03-02 2002-09-11 Seiko Epson Corp 光変調装置及びそれを有する電子機器
US6912336B2 (en) * 2002-03-15 2005-06-28 Nippon Telegraph And Telephone Corporation Optical switch device
US6800212B2 (en) * 2002-05-15 2004-10-05 The Regents Of The University Of California Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
US7183618B2 (en) * 2004-08-14 2007-02-27 Fusao Ishii Hinge for micro-mirror devices
US7209290B2 (en) * 2004-05-25 2007-04-24 Samsung Electro-Mechanics Co., Ltd. Diffractive thin-film piezoelectric micromirror and method of producing the same
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
KR100709325B1 (ko) 2005-11-16 2007-04-20 삼성전자주식회사 마이크로 미러 액튜에이터
US7598688B2 (en) * 2006-06-22 2009-10-06 Orbotech Ltd Tilting device
JP2009233836A (ja) * 2008-03-28 2009-10-15 Yamaha Corp Ｍｅｍｓおよびｍｅｍｓ製造方法
JP6106970B2 (ja) * 2012-07-02 2017-04-05 株式会社ニコン 空間光変調器および露光装置
JP2014203844A (ja) * 2013-04-01 2014-10-27 株式会社東芝 Ｍｅｍｓ装置及びその製造方法
CN109991730B (zh) * 2019-03-12 2021-06-15 上海集成电路研发中心有限公司 一种微镜结构

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886310A (en) * 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
DE4229507C2 (de) * 1991-10-30 2002-03-07 Cms Mikrosysteme Gmbh Mikromechanischer 3-D-Aktor
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US5708521A (en) * 1993-05-04 1998-01-13 Daewoo Electronics Co., Ltd. Actuated mirror array for use in optical projection system
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5485304A (en) * 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
KR100243190B1 (ko) * 1996-06-10 2000-02-01 윤종용 가동미러장치 및 그 제조방법
US6061323A (en) * 1996-07-30 2000-05-09 Seagate Technology, Inc. Data storage system having an improved surface micro-machined mirror
DE19712201A1 (de) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
DE19800745A1 (de) * 1998-01-12 1999-07-15 Bosch Gmbh Robert Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung
US6020272A (en) * 1998-10-08 2000-02-01 Sandia Corporation Method for forming suspended micromechanical structures

Also Published As

Publication number Publication date
FR2820833A1 (fr) 2002-08-16
US20040061961A1 (en) 2004-04-01
JP2004522996A (ja) 2004-07-29
WO2002065186A2 (fr) 2002-08-22
WO2002065186A3 (fr) 2003-11-27
EP1390793A2 (fr) 2004-02-25
CA2437816A1 (fr) 2002-08-22

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Effective date: 20071030