FR2820833B1 - Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir - Google Patents
Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroirInfo
- Publication number
- FR2820833B1 FR2820833B1 FR0102065A FR0102065A FR2820833B1 FR 2820833 B1 FR2820833 B1 FR 2820833B1 FR 0102065 A FR0102065 A FR 0102065A FR 0102065 A FR0102065 A FR 0102065A FR 2820833 B1 FR2820833 B1 FR 2820833B1
- Authority
- FR
- France
- Prior art keywords
- micro
- mirrors
- mirror
- matrix
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0181—See-saws
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0102065A FR2820833B1 (fr) | 2001-02-15 | 2001-02-15 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir |
PCT/FR2002/000545 WO2002065186A2 (fr) | 2001-02-15 | 2002-02-13 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. |
JP2002564645A JP2004522996A (ja) | 2001-02-15 | 2002-02-13 | 旋回する光マイクロミラー、マイクロミラーのマトリックス、およびマイクロミラーの製造方法 |
EP02704815A EP1390793A2 (fr) | 2001-02-15 | 2002-02-13 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. |
CA002437816A CA2437816A1 (fr) | 2001-02-15 | 2002-02-13 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. |
US10/468,060 US20040061961A1 (en) | 2001-02-15 | 2002-02-13 | Pivoting optical micromirror, array for such micromirrors and method for making same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0102065A FR2820833B1 (fr) | 2001-02-15 | 2001-02-15 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2820833A1 FR2820833A1 (fr) | 2002-08-16 |
FR2820833B1 true FR2820833B1 (fr) | 2004-05-28 |
Family
ID=8860053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0102065A Expired - Fee Related FR2820833B1 (fr) | 2001-02-15 | 2001-02-15 | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir |
Country Status (6)
Country | Link |
---|---|
US (1) | US20040061961A1 (fr) |
EP (1) | EP1390793A2 (fr) |
JP (1) | JP2004522996A (fr) |
CA (1) | CA2437816A1 (fr) |
FR (1) | FR2820833B1 (fr) |
WO (1) | WO2002065186A2 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002258174A (ja) * | 2001-03-02 | 2002-09-11 | Seiko Epson Corp | 光変調装置及びそれを有する電子機器 |
US6912336B2 (en) * | 2002-03-15 | 2005-06-28 | Nippon Telegraph And Telephone Corporation | Optical switch device |
US6800212B2 (en) * | 2002-05-15 | 2004-10-05 | The Regents Of The University Of California | Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection |
US20050094241A1 (en) * | 2003-11-01 | 2005-05-05 | Fusao Ishii | Electromechanical micromirror devices and methods of manufacturing the same |
US7183618B2 (en) * | 2004-08-14 | 2007-02-27 | Fusao Ishii | Hinge for micro-mirror devices |
US7209290B2 (en) * | 2004-05-25 | 2007-04-24 | Samsung Electro-Mechanics Co., Ltd. | Diffractive thin-film piezoelectric micromirror and method of producing the same |
US7372617B2 (en) * | 2005-07-06 | 2008-05-13 | Peter Enoksson | Hidden hinge MEMS device |
KR100709325B1 (ko) | 2005-11-16 | 2007-04-20 | 삼성전자주식회사 | 마이크로 미러 액튜에이터 |
US7598688B2 (en) * | 2006-06-22 | 2009-10-06 | Orbotech Ltd | Tilting device |
JP2009233836A (ja) * | 2008-03-28 | 2009-10-15 | Yamaha Corp | Memsおよびmems製造方法 |
JP6106970B2 (ja) * | 2012-07-02 | 2017-04-05 | 株式会社ニコン | 空間光変調器および露光装置 |
JP2014203844A (ja) * | 2013-04-01 | 2014-10-27 | 株式会社東芝 | Mems装置及びその製造方法 |
CN109991730B (zh) * | 2019-03-12 | 2021-06-15 | 上海集成电路研发中心有限公司 | 一种微镜结构 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
US5096279A (en) * | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US5620931A (en) * | 1990-08-17 | 1997-04-15 | Analog Devices, Inc. | Methods for fabricating monolithic device containing circuitry and suspended microstructure |
DE4229507C2 (de) * | 1991-10-30 | 2002-03-07 | Cms Mikrosysteme Gmbh | Mikromechanischer 3-D-Aktor |
EP0539889A3 (en) * | 1991-10-30 | 1993-07-28 | Steinbichler, Hans, Dr. | Micromechanical actuator |
US5212582A (en) * | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
US5708521A (en) * | 1993-05-04 | 1998-01-13 | Daewoo Electronics Co., Ltd. | Actuated mirror array for use in optical projection system |
US5629790A (en) * | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US5485304A (en) * | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
KR100243190B1 (ko) * | 1996-06-10 | 2000-02-01 | 윤종용 | 가동미러장치 및 그 제조방법 |
US6061323A (en) * | 1996-07-30 | 2000-05-09 | Seagate Technology, Inc. | Data storage system having an improved surface micro-machined mirror |
DE19712201A1 (de) * | 1997-03-24 | 1998-10-01 | Bodenseewerk Geraetetech | Mikromechanische Spiegel-Anordnung |
DE19800745A1 (de) * | 1998-01-12 | 1999-07-15 | Bosch Gmbh Robert | Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung |
US6020272A (en) * | 1998-10-08 | 2000-02-01 | Sandia Corporation | Method for forming suspended micromechanical structures |
-
2001
- 2001-02-15 FR FR0102065A patent/FR2820833B1/fr not_active Expired - Fee Related
-
2002
- 2002-02-13 CA CA002437816A patent/CA2437816A1/fr not_active Abandoned
- 2002-02-13 US US10/468,060 patent/US20040061961A1/en not_active Abandoned
- 2002-02-13 EP EP02704815A patent/EP1390793A2/fr not_active Withdrawn
- 2002-02-13 WO PCT/FR2002/000545 patent/WO2002065186A2/fr not_active Application Discontinuation
- 2002-02-13 JP JP2002564645A patent/JP2004522996A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
FR2820833A1 (fr) | 2002-08-16 |
US20040061961A1 (en) | 2004-04-01 |
JP2004522996A (ja) | 2004-07-29 |
WO2002065186A2 (fr) | 2002-08-22 |
WO2002065186A3 (fr) | 2003-11-27 |
EP1390793A2 (fr) | 2004-02-25 |
CA2437816A1 (fr) | 2002-08-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20071030 |