FR2820834B1 - Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede - Google Patents

Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede

Info

Publication number
FR2820834B1
FR2820834B1 FR0102067A FR0102067A FR2820834B1 FR 2820834 B1 FR2820834 B1 FR 2820834B1 FR 0102067 A FR0102067 A FR 0102067A FR 0102067 A FR0102067 A FR 0102067A FR 2820834 B1 FR2820834 B1 FR 2820834B1
Authority
FR
France
Prior art keywords
mirror
micro
manufacturing
matrix obtained
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0102067A
Other languages
English (en)
Other versions
FR2820834A1 (fr
Inventor
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teem Photonics SA
Original Assignee
Teem Photonics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics SA filed Critical Teem Photonics SA
Priority to FR0102067A priority Critical patent/FR2820834B1/fr
Priority to US10/467,174 priority patent/US7022249B2/en
Priority to EP02704816A priority patent/EP1390794A2/fr
Priority to PCT/FR2002/000546 priority patent/WO2002065187A2/fr
Priority to JP2002564646A priority patent/JP2004522997A/ja
Priority to CA002437817A priority patent/CA2437817A1/fr
Publication of FR2820834A1 publication Critical patent/FR2820834A1/fr
Application granted granted Critical
Publication of FR2820834B1 publication Critical patent/FR2820834B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
FR0102067A 2001-02-15 2001-02-15 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede Expired - Fee Related FR2820834B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0102067A FR2820834B1 (fr) 2001-02-15 2001-02-15 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
US10/467,174 US7022249B2 (en) 2001-02-15 2002-02-13 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
EP02704816A EP1390794A2 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede
PCT/FR2002/000546 WO2002065187A2 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede
JP2002564646A JP2004522997A (ja) 2001-02-15 2002-02-13 光マイクロミラーならびにマイクロミラーの製造方法、この方法により得られる複数マイクロミラーのアレイ
CA002437817A CA2437817A1 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0102067A FR2820834B1 (fr) 2001-02-15 2001-02-15 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede

Publications (2)

Publication Number Publication Date
FR2820834A1 FR2820834A1 (fr) 2002-08-16
FR2820834B1 true FR2820834B1 (fr) 2004-06-25

Family

ID=8860054

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0102067A Expired - Fee Related FR2820834B1 (fr) 2001-02-15 2001-02-15 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede

Country Status (6)

Country Link
US (1) US7022249B2 (fr)
EP (1) EP1390794A2 (fr)
JP (1) JP2004522997A (fr)
CA (1) CA2437817A1 (fr)
FR (1) FR2820834B1 (fr)
WO (1) WO2002065187A2 (fr)

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FR2854993B1 (fr) * 2003-05-15 2005-07-15 Suisse Electronique Microtech Resonateurs integres et base de temps incorporant de tels resonateurs
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US8045254B2 (en) * 2003-11-01 2011-10-25 Silicon Quest Kabushiki-Kaisha Structure body electrically connected via semiconductor material layer
US7760415B2 (en) * 2003-11-01 2010-07-20 Silicon Quest Kabushiki-Kaisha Micro mirror device
US7957050B2 (en) 2003-11-01 2011-06-07 Silicon Quest Kabushiki-Kaisha Mirror device comprising layered electrode
US20090195858A1 (en) * 2003-11-01 2009-08-06 Naoya Sugimoto Changing an electrode function
US7835062B2 (en) * 2006-08-30 2010-11-16 Silicon Quest Kabushiki-Kaisha Mircromirror device having a vertical hinge
US7643195B2 (en) * 2003-11-01 2010-01-05 Silicon Quest Kabushiki-Kaisha Mirror device
US20090207325A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Algorithm for SLM of single hinge type
US8154474B2 (en) * 2003-11-01 2012-04-10 Silicon Quest Kabushiki Kaisha Driving method of memory access
US7973994B2 (en) * 2003-11-01 2011-07-05 Silicon Quest Kabushiki-Kaisha Spatial light modulator
US8064123B2 (en) * 2003-11-01 2011-11-22 Silicon Quest Kabushiki-Kaisha Mirror device and MEMS device comprising layered electrode
US8228595B2 (en) 2003-11-01 2012-07-24 Silicon Quest Kabushiki-Kaisha Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate
US7933060B2 (en) * 2003-11-01 2011-04-26 Silicon Quest Kabushiki-Kaisha Three states of micro mirror device
US20090207164A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Mirror control within time slot for SLM
US7755830B2 (en) * 2003-11-01 2010-07-13 Silicon Quest Kabushiki-Kaisha Micro mirror device
US8179591B2 (en) * 2003-11-01 2012-05-15 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror array device
US20090180038A1 (en) * 2003-11-01 2009-07-16 Naoya Sugimoto Mirror control within time slot for SLM
US20090207324A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Circuit for SLM's pixel
US7969395B2 (en) 2003-11-01 2011-06-28 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror device
US7733558B2 (en) * 2003-11-01 2010-06-08 Silicon Quest Kabushiki-Kaisha Display device with an addressable movable electrode
US7876488B2 (en) * 2003-11-01 2011-01-25 Silicon Quest Kabushiki-Kaisha Mirror device having vertical hinge
US7042619B1 (en) * 2004-06-18 2006-05-09 Miradia Inc. Mirror structure with single crystal silicon cross-member
US7172921B2 (en) * 2005-01-03 2007-02-06 Miradia Inc. Method and structure for forming an integrated spatial light modulator
US7139111B1 (en) * 2005-04-28 2006-11-21 Taiwan Semiconductor Manufacturing Co., Ltd. Micromirrors for micro-electro-mechanical systems and methods of fabricating the same
JP2007286172A (ja) * 2006-04-13 2007-11-01 Pentax Corp マイクロミラー、及び、電極形成方法
US8023172B2 (en) * 2006-08-30 2011-09-20 Silicon Quest Kabushiki-Kaisha Mirror device
US7652813B2 (en) * 2006-08-30 2010-01-26 Silicon Quest Kabushiki-Kaisha Mirror device
JP2008132583A (ja) 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
JP5309441B2 (ja) * 2006-11-16 2013-10-09 株式会社デンソー ２次元光走査装置
US7911672B2 (en) * 2006-12-26 2011-03-22 Zhou Tiansheng Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
US20090128462A1 (en) * 2007-11-16 2009-05-21 Naoya Sugimoto Spatial light modulator and mirror device
US20090128888A1 (en) * 2007-11-16 2009-05-21 Hirotoshi Ichikawa Mirror array device
US7848005B2 (en) * 2007-11-16 2010-12-07 Silicon Quest Kabushiki-Kaisha Spatial light modulator implemented with a mirror array device
US7876492B2 (en) * 2007-11-16 2011-01-25 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror array device
US20090128887A1 (en) * 2007-11-16 2009-05-21 Naoya Sugimoto Spatial light modulator and mirror array device
US8238018B2 (en) 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
JP2011138888A (ja) * 2009-12-28 2011-07-14 Nikon Corp 電気機械変換器、空間光変調器、露光装置およびそれらの製造方法
JP2011137961A (ja) * 2009-12-28 2011-07-14 Nikon Corp 空間光変調器、露光装置およびそれらの製造方法
WO2011080883A1 (fr) * 2009-12-28 2011-07-07 株式会社ニコン Convertisseur électromécanique, modulateur optique spatial, dispositif d'exposition, et leurs procédés de fabrication
JP5447272B2 (ja) * 2010-08-05 2014-03-19 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
CN104795311B (zh) 2014-01-21 2018-06-01 中芯国际集成电路制造(上海)有限公司 半导体器件的形成方法
US20220276615A1 (en) * 2021-02-26 2022-09-01 Honeywell International Inc. Thermal metamaterial for low power mems thermal control

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US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
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DE19857946C1 (de) * 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel
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Also Published As

Publication number Publication date
EP1390794A2 (fr) 2004-02-25
WO2002065187A3 (fr) 2003-11-27
CA2437817A1 (fr) 2002-08-22
US20040085606A1 (en) 2004-05-06
JP2004522997A (ja) 2004-07-29
WO2002065187A2 (fr) 2002-08-22
FR2820834A1 (fr) 2002-08-16
US7022249B2 (en) 2006-04-04

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20071030