FR2814234B1 - Capteur a circuit d'interconnexion tridimensionnel - Google Patents

Capteur a circuit d'interconnexion tridimensionnel

Info

Publication number
FR2814234B1
FR2814234B1 FR0011919A FR0011919A FR2814234B1 FR 2814234 B1 FR2814234 B1 FR 2814234B1 FR 0011919 A FR0011919 A FR 0011919A FR 0011919 A FR0011919 A FR 0011919A FR 2814234 B1 FR2814234 B1 FR 2814234B1
Authority
FR
France
Prior art keywords
conducting
conducting elements
base
tracks
interconnection circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0011919A
Other languages
English (en)
Other versions
FR2814234A1 (fr
Inventor
Jose Beitia
Olivier Daligny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Priority to FR0011919A priority Critical patent/FR2814234B1/fr
Priority to GB0122402A priority patent/GB2371624A/en
Priority to US09/954,202 priority patent/US20020033046A1/en
Publication of FR2814234A1 publication Critical patent/FR2814234A1/fr
Application granted granted Critical
Publication of FR2814234B1 publication Critical patent/FR2814234B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
FR0011919A 2000-09-19 2000-09-19 Capteur a circuit d'interconnexion tridimensionnel Expired - Fee Related FR2814234B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0011919A FR2814234B1 (fr) 2000-09-19 2000-09-19 Capteur a circuit d'interconnexion tridimensionnel
GB0122402A GB2371624A (en) 2000-09-19 2001-09-17 Sensor with a three-dimensional interconnection circuit.
US09/954,202 US20020033046A1 (en) 2000-09-19 2001-09-18 Sensor with a three-dimensional interconnection circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0011919A FR2814234B1 (fr) 2000-09-19 2000-09-19 Capteur a circuit d'interconnexion tridimensionnel

Publications (2)

Publication Number Publication Date
FR2814234A1 FR2814234A1 (fr) 2002-03-22
FR2814234B1 true FR2814234B1 (fr) 2002-12-06

Family

ID=8854443

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0011919A Expired - Fee Related FR2814234B1 (fr) 2000-09-19 2000-09-19 Capteur a circuit d'interconnexion tridimensionnel

Country Status (3)

Country Link
US (1) US20020033046A1 (fr)
FR (1) FR2814234B1 (fr)
GB (1) GB2371624A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2174161B1 (fr) * 2007-07-25 2015-03-25 Koninklijke Philips N.V. Systèmes d'imagerie par rm/tep
FR2969750B1 (fr) * 2010-12-22 2013-02-08 Sagem Defense Securite Gyroscope vibrant et procede de fabrication
US8991249B2 (en) 2011-05-23 2015-03-31 Sagem Defense Securite Vibrating gyroscope and treatment process
JP6155885B2 (ja) * 2013-06-19 2017-07-05 セイコーエプソン株式会社 電子デバイスの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233334A (ja) * 1990-02-08 1991-10-17 Nec Corp 半導体圧力センサ
FR2692349B1 (fr) * 1992-06-11 1994-09-02 Sagem Gyromètre à poutre vibrante, à excitation piézo-électrique.
JPH08114459A (ja) * 1994-10-14 1996-05-07 Nec Home Electron Ltd 振動ジャイロ
JP3496191B2 (ja) * 1994-12-26 2004-02-09 Ｎｅｃトーキン株式会社 圧電デバイス
JPH09138175A (ja) * 1995-11-14 1997-05-27 Omron Corp 圧力センサ装置およびそれを用いた圧力測定装置
JP3721798B2 (ja) * 1998-01-13 2005-11-30 株式会社村田製作所 超音波センサ

Also Published As

Publication number Publication date
US20020033046A1 (en) 2002-03-21
GB0122402D0 (en) 2001-11-07
FR2814234A1 (fr) 2002-03-22
GB2371624A (en) 2002-07-31

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20140530