FR2761518B1 - Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur - Google Patents

Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur

Info

Publication number
FR2761518B1
FR2761518B1 FR9703961A FR9703961A FR2761518B1 FR 2761518 B1 FR2761518 B1 FR 2761518B1 FR 9703961 A FR9703961 A FR 9703961A FR 9703961 A FR9703961 A FR 9703961A FR 2761518 B1 FR2761518 B1 FR 2761518B1
Authority
FR
France
Prior art keywords
motor
magnetic
actuator
micro
planar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9703961A
Other languages
English (en)
Other versions
FR2761518A1 (fr
Inventor
Enzo Fullin
Raymond Vuilleumier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Priority to FR9703961A priority Critical patent/FR2761518B1/fr
Priority to DE69803893T priority patent/DE69803893T2/de
Priority to EP98400763A priority patent/EP0869519B1/fr
Priority to US09/052,980 priority patent/US6084281A/en
Publication of FR2761518A1 publication Critical patent/FR2761518A1/fr
Application granted granted Critical
Publication of FR2761518B1 publication Critical patent/FR2761518B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
FR9703961A 1997-04-01 1997-04-01 Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur Expired - Fee Related FR2761518B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9703961A FR2761518B1 (fr) 1997-04-01 1997-04-01 Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur
DE69803893T DE69803893T2 (de) 1997-04-01 1998-03-31 Planarer magnetischer Motor und magnetischer Microantrieb mit einem solchen Motor
EP98400763A EP0869519B1 (fr) 1997-04-01 1998-03-31 Moteur planaire magnétique et micro-actionneur magnétique comportant un tel moteur
US09/052,980 US6084281A (en) 1997-04-01 1998-04-01 Planar magnetic motor and magnetic microactuator comprising a motor of this type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9703961A FR2761518B1 (fr) 1997-04-01 1997-04-01 Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur

Publications (2)

Publication Number Publication Date
FR2761518A1 FR2761518A1 (fr) 1998-10-02
FR2761518B1 true FR2761518B1 (fr) 1999-05-28

Family

ID=9505400

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9703961A Expired - Fee Related FR2761518B1 (fr) 1997-04-01 1997-04-01 Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur

Country Status (4)

Country Link
US (1) US6084281A (fr)
EP (1) EP0869519B1 (fr)
DE (1) DE69803893T2 (fr)
FR (1) FR2761518B1 (fr)

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JP3714020B2 (ja) * 1999-04-20 2005-11-09 オムロン株式会社 半導体素子の密封構造
TWI248718B (en) * 1999-09-02 2006-02-01 Koninkl Philips Electronics Nv Displacement device
US6469602B2 (en) * 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
US7027682B2 (en) 1999-09-23 2006-04-11 Arizona State University Optical MEMS switching array with embedded beam-confining channels and method of operating same
US6496612B1 (en) 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US6794965B2 (en) 2001-01-18 2004-09-21 Arizona State University Micro-magnetic latching switch with relaxed permanent magnet alignment requirements
US6806610B2 (en) * 2001-02-27 2004-10-19 Monte Dilliner Magnetic motor with movable rotor and drive magnets
EP1399939A4 (fr) * 2001-05-18 2006-11-15 Microlab Inc Boitier pour commutateur de verrouillage micromagnetique
US20020196110A1 (en) * 2001-05-29 2002-12-26 Microlab, Inc. Reconfigurable power transistor using latching micromagnetic switches
JP2005503659A (ja) * 2001-09-17 2005-02-03 スタフォード，ジョン マイクロ磁気ラッチ・リレーのパッケージおよびパッケージの方法
US20030169135A1 (en) * 2001-12-21 2003-09-11 Jun Shen Latching micro-magnetic switch array
US6836194B2 (en) 2001-12-21 2004-12-28 Magfusion, Inc. Components implemented using latching micro-magnetic switches
US20030179057A1 (en) * 2002-01-08 2003-09-25 Jun Shen Packaging of a micro-magnetic switch with a patterned permanent magnet
US20030179058A1 (en) * 2002-01-18 2003-09-25 Microlab, Inc. System and method for routing input signals using single pole single throw and single pole double throw latching micro-magnetic switches
US20030137374A1 (en) * 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US20030222740A1 (en) 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
JP2006524880A (ja) 2002-09-18 2006-11-02 マグフュージョン， インコーポレイテッド 積層電気機械構造の組み立て方法
US20040121505A1 (en) 2002-09-30 2004-06-24 Magfusion, Inc. Method for fabricating a gold contact on a microswitch
US7202765B2 (en) 2003-05-14 2007-04-10 Schneider Electric Industries Sas Latchable, magnetically actuated, ground plane-isolated radio frequency microswitch
US7215229B2 (en) * 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
US20050083157A1 (en) 2003-10-15 2005-04-21 Magfusion, Inc. Micro magnetic latching switches and methods of making same
US7183884B2 (en) 2003-10-15 2007-02-27 Schneider Electric Industries Sas Micro magnetic non-latching switches and methods of making same
US7342473B2 (en) 2004-04-07 2008-03-11 Schneider Electric Industries Sas Method and apparatus for reducing cantilever stress in magnetically actuated relays
US7557470B2 (en) * 2005-01-18 2009-07-07 Massachusetts Institute Of Technology 6-axis electromagnetically-actuated meso-scale nanopositioner
US9284183B2 (en) 2005-03-04 2016-03-15 Ht Microanalytical, Inc. Method for forming normally closed micromechanical device comprising a laterally movable element
US7482899B2 (en) * 2005-10-02 2009-01-27 Jun Shen Electromechanical latching relay and method of operating same
WO2009001848A1 (fr) * 2007-06-26 2008-12-31 Panasonic Electric Works Co., Ltd. Micro-relais
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
US8068002B2 (en) * 2008-04-22 2011-11-29 Magvention (Suzhou), Ltd. Coupled electromechanical relay and method of operating same
US8836454B2 (en) * 2009-08-11 2014-09-16 Telepath Networks, Inc. Miniature magnetic switch structures
US8159320B2 (en) * 2009-09-14 2012-04-17 Meichun Ruan Latching micro-magnetic relay and method of operating same
US8436701B2 (en) 2010-02-08 2013-05-07 International Business Machines Corporation Integrated electromechanical relays
US8432240B2 (en) 2010-07-16 2013-04-30 Telepath Networks, Inc. Miniature magnetic switch structures
US8957747B2 (en) * 2010-10-27 2015-02-17 Telepath Networks, Inc. Multi integrated switching device structures
WO2012058659A2 (fr) * 2010-10-29 2012-05-03 The Regents Of The University Of California Commutateurs micro-électromécaniques de condensateurs à actionnement magnétique dans un stratifié
WO2013049196A2 (fr) 2011-09-30 2013-04-04 Telepath Networks, Inc. Structures de dispositifs de commutation intégrés multiples
US8552824B1 (en) * 2012-04-03 2013-10-08 Hamilton Sundstrand Corporation Integrated planar electromechanical contactors
WO2013184223A1 (fr) * 2012-06-05 2013-12-12 The Regents Of The University Of California Commutateurs verrouillés actionnés de manière micro-électromagnétique
US10145906B2 (en) 2015-12-17 2018-12-04 Analog Devices Global Devices, systems and methods including magnetic structures
US10190702B2 (en) * 2016-03-15 2019-01-29 Dunan Microstaq, Inc. MEMS based solenoid valve

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2101404B (en) * 1981-07-02 1984-11-28 Standard Telephones Cables Ltd Semiconductor switch device
FR2659178B1 (fr) * 1990-03-02 1992-05-15 Ebauchesfabrik Eta Ag Ensemble de bobines d'excitation, procede de fabrication d'un tel ensemble et micromoteur electromagnetique equipe de celui-ci.
JP2714736B2 (ja) * 1992-06-01 1998-02-16 シャープ株式会社 マイクロリレー
JP2560629B2 (ja) * 1993-12-08 1996-12-04 日本電気株式会社 シリコン超小形リレー
US5472539A (en) * 1994-06-06 1995-12-05 General Electric Company Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components
US5475353A (en) * 1994-09-30 1995-12-12 General Electric Company Micromachined electromagnetic switch with fixed on and off positions using three magnets
FR2742917B1 (fr) * 1995-12-22 1998-02-13 Suisse Electronique Microtech Dispositif miniature pour executer une fonction predeterminee, notamment microrelais

Also Published As

Publication number Publication date
EP0869519A1 (fr) 1998-10-07
FR2761518A1 (fr) 1998-10-02
US6084281A (en) 2000-07-04
EP0869519B1 (fr) 2002-02-20
DE69803893D1 (de) 2002-03-28
DE69803893T2 (de) 2002-10-10

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