FR2736103B1 - Pompe turbomoleculaire - Google Patents

Pompe turbomoleculaire

Info

Publication number: FR2736103B1
Authority: FR; France
Prior art keywords: turbomolecular pump; turbomolecular; pump
Prior art date: 1995-06-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR9507922A

Other languages

English (en)

Other versions

FR2736103A1 (fr

Inventor

Jean Claude Broisin

Olivier Dauvillier

Amede Denis Perrillat

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum SAS

Original Assignee

Alcatel CIT SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-06-30

Filing date

1995-06-30

Publication date

1997-08-08

1995-06-30 Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA

1995-06-30 Priority to FR9507922A priority Critical patent/FR2736103B1/fr

1996-06-24 Priority to DE69623700T priority patent/DE69623700T2/de

1996-06-24 Priority to EP96401388A priority patent/EP0751297B1/fr

1996-06-27 Priority to US08/671,555 priority patent/US5722819A/en

1996-06-28 Priority to JP16961196A priority patent/JP3766138B2/ja

1997-01-03 Publication of FR2736103A1 publication Critical patent/FR2736103A1/fr

1997-08-08 Application granted granted Critical

1997-08-08 Publication of FR2736103B1 publication Critical patent/FR2736103B1/fr

2015-06-30 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

FR9507922A 1995-06-30 1995-06-30 Pompe turbomoleculaire Expired - Fee Related FR2736103B1 (fr)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
FR9507922A FR2736103B1 (fr)	1995-06-30	1995-06-30	Pompe turbomoleculaire
DE69623700T DE69623700T2 (de)	1995-06-30	1996-06-24	Turbomolekularpumpe
EP96401388A EP0751297B1 (fr)	1995-06-30	1996-06-24	Pompe turbomoléculaire
US08/671,555 US5722819A (en)	1995-06-30	1996-06-27	Molecular drag pump
JP16961196A JP3766138B2 (ja)	1995-06-30	1996-06-28	分子吸引ポンプ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9507922A FR2736103B1 (fr)	1995-06-30	1995-06-30	Pompe turbomoleculaire

Publications (2)

Publication Number	Publication Date
FR2736103A1 FR2736103A1 (fr)	1997-01-03
FR2736103B1 true FR2736103B1 (fr)	1997-08-08

Family

ID=9480585

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR9507922A Expired - Fee Related FR2736103B1 (fr)	1995-06-30	1995-06-30	Pompe turbomoleculaire

Country Status (5)

Country	Link
US (1)	US5722819A (fr)
EP (1)	EP0751297B1 (fr)
JP (1)	JP3766138B2 (fr)
DE (1)	DE69623700T2 (fr)
FR (1)	FR2736103B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19901340B4 (de) †	1998-05-26	2016-03-24	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
DE59912626D1 (de) *	1998-05-26	2006-02-16	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
JP3013083B2 (ja)	1998-06-23	2000-02-28	セイコー精機株式会社	ターボ分子ポンプ
DE19951954A1 (de) *	1999-10-28	2001-05-03	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE19956015A1 (de) *	1999-11-22	2001-05-23	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE102006020710A1 (de)	2006-05-04	2007-11-08	Pfeiffer Vacuum Gmbh	Vakuumpumpe mit Gehäuse
DE102007027354A1 (de) *	2007-06-11	2008-12-18	Oerlikon Leybold Vacuum Gmbh	Turbomolekularpumpe
GB2568066A (en) *	2017-11-02	2019-05-08	Edwards Ltd	Stator blade unit for a turbomolecular pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2218615A1 (de) *	1972-04-18	1973-10-31	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe mit rotor und stator
FR2224009A5 (fr) *	1973-03-30	1974-10-25	Cit Alcatel
EP0129709A3 (fr) *	1983-04-26	1985-03-06	Anelva Corporation	Pompe moléculaire combinée pour faciliter le nettoyage
FR2611819B1 (fr) *	1987-02-25	1989-05-05	Cit Alcatel	Pompe a vide, rotative
JPH01190990A (ja) *	1988-01-26	1989-08-01	Osaka Shinku Kiki Seisakusho:Kk	真空ポンプ
CH674785A5 (en) *	1988-03-07	1990-07-13	Dino Systems Limited	Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
US5501583A (en) *	1992-08-19	1996-03-26	Hitachi, Ltd.	Turbo vacuum pump
EP0603694A1 (fr) *	1992-12-24	1994-06-29	BALZERS-PFEIFFER GmbH	Système à vide
JPH0783189A (ja) *	1993-09-17	1995-03-28	Hitachi Ltd	ターボ真空ポンプ
JPH0886298A (ja) *	1994-09-19	1996-04-02	Hitachi Ltd	ドライターボ真空ポンプ

1995
- 1995-06-30 FR FR9507922A patent/FR2736103B1/fr not_active Expired - Fee Related
1996
- 1996-06-24 EP EP96401388A patent/EP0751297B1/fr not_active Expired - Lifetime
- 1996-06-24 DE DE69623700T patent/DE69623700T2/de not_active Expired - Lifetime
- 1996-06-27 US US08/671,555 patent/US5722819A/en not_active Expired - Lifetime
- 1996-06-28 JP JP16961196A patent/JP3766138B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP3766138B2 (ja)	2006-04-12
DE69623700D1 (de)	2002-10-24
FR2736103A1 (fr)	1997-01-03
JPH0914185A (ja)	1997-01-14
EP0751297A1 (fr)	1997-01-02
DE69623700T2 (de)	2003-07-31
US5722819A (en)	1998-03-03
EP0751297B1 (fr)	2002-09-18

Legal Events

Date	Code	Title	Description
2002-12-13	TP	Transmission of property
2007-08-03	CD	Change of name or company name
2012-03-16	TP	Transmission of property	Owner name: ADIXEN VACUUM PRODUCTS, FR Effective date: 20120130
2014-03-28	ST	Notification of lapse	Effective date: 20140228

Publication	Publication Date	Title
DE69625401T2 (de)	2003-10-30	Vakuumpumpe
DE69600306D1 (de)	1998-06-25	Turbomolekularpumpe
DE69616336D1 (de)	2001-11-29	Peristaltikpumpe
FR2753236B1 (fr)	1998-12-04	Pompe peristaltique miniature
FR2753235B1 (fr)	1998-12-04	Pompe peristaltique portable
DE69609666T2 (de)	2000-12-07	Kreiselpumpe
FR2735535B1 (fr)	1997-07-11	Pompe turbomoleculaire
DE19681677T1 (de)	1998-10-29	Kreiselpumpe
FR2739148B1 (fr)	2001-02-23	Pompe entrainee magnetiquement
DE69409555D1 (de)	1998-05-20	Turbomolekularpumpe
DE59508322D1 (de)	2000-06-15	Pumpenlaufrad
DE69508163D1 (de)	1999-04-15	Turbomolekular-Vakuumpumpe
FR2736103B1 (fr)	1997-08-08	Pompe turbomoleculaire
FR2776029B1 (fr)	2000-06-23	Pompe turbomoleculaire
FR2744176B1 (fr)	1998-04-10	Pompe peristaltique
DE59608719D1 (de)	2002-03-21	Vakuumpumpe
DE59604148D1 (de)	2000-02-17	Kreiselpumpe
DE19681665T1 (de)	1998-12-17	Flügelpumpe
FR2689570B1 (fr)	1994-05-27	Pompe volumetrique.
KR970041760U (ko)	1997-07-29	베인펌프
DE69622300T2 (de)	2002-11-14	Diffusionspumpe
FR2744496B1 (fr)	1998-04-24	Pompe oleohydraulique
DE29514009U1 (de)	1995-11-09	Vakuumpumpe
KR970041707U (ko)	1997-07-29	복식펌프
DE59603824D1 (de)	2000-01-13	Kreiselpumpe