ATE219831T1 - Vorrichtung zum schutz gegen kontamination - Google Patents
Vorrichtung zum schutz gegen kontaminationInfo
- Publication number
- ATE219831T1 ATE219831T1 AT96913582T AT96913582T ATE219831T1 AT E219831 T1 ATE219831 T1 AT E219831T1 AT 96913582 T AT96913582 T AT 96913582T AT 96913582 T AT96913582 T AT 96913582T AT E219831 T1 ATE219831 T1 AT E219831T1
- Authority
- AT
- Austria
- Prior art keywords
- work surface
- pct
- gas stream
- direction substantially
- materials
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Ventilation (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Prevention Of Fouling (AREA)
- Prostheses (AREA)
- Main Body Construction Of Washing Machines And Laundry Dryers (AREA)
- Air Bags (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
- Cleaning In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9504526A FR2733036B1 (fr) | 1995-04-14 | 1995-04-14 | Dispositif de protection anti-contamination rapprochee |
PCT/FR1996/000563 WO1996032613A1 (fr) | 1995-04-14 | 1996-04-12 | Dispositif de protection anti-contamination rapprochee |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE219831T1 true ATE219831T1 (de) | 2002-07-15 |
Family
ID=9478140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT96913582T ATE219831T1 (de) | 1995-04-14 | 1996-04-12 | Vorrichtung zum schutz gegen kontamination |
Country Status (9)
Country | Link |
---|---|
US (1) | US6035549A (de) |
EP (1) | EP0830549B1 (de) |
JP (1) | JP4113256B2 (de) |
AT (1) | ATE219831T1 (de) |
CA (1) | CA2218416C (de) |
DE (1) | DE69622037T2 (de) |
ES (1) | ES2176454T3 (de) |
FR (1) | FR2733036B1 (de) |
WO (1) | WO1996032613A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19712975A1 (de) * | 1997-03-27 | 1998-10-01 | Gwe Ges Fuer Wasseraufbereitun | Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine |
US6096135A (en) * | 1998-07-21 | 2000-08-01 | Applied Materials, Inc. | Method and apparatus for reducing contamination of a substrate in a substrate processing system |
FR2785040B1 (fr) | 1998-10-22 | 2001-01-19 | U N I R Ultra Propre Nutrition | Dispositif et procede pour la protection rapprochee de produits ou objets sensibles a des agents contaminants vehicules par l'air ambiant |
US20040251175A1 (en) * | 1998-10-30 | 2004-12-16 | Adams Thomas C. | Apparatuses and methods for making glued screen assemblies |
US7350315B2 (en) | 2003-12-22 | 2008-04-01 | Lam Research Corporation | Edge wheel dry manifold |
US7089687B2 (en) * | 2004-09-30 | 2006-08-15 | Lam Research Corporation | Wafer edge wheel with drying function |
FR2973100B1 (fr) * | 2011-03-22 | 2018-02-09 | Institut National De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture (Irstea) | Installation de diffusion de flux d'air |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4021928A (en) * | 1973-12-18 | 1977-05-10 | Research Corporation | Cross-flow modular tobacco curing system |
FR2485700B1 (fr) * | 1980-06-24 | 1986-02-28 | Aurore Sa | Procede pour etablir un ecoulement laminaire determine et poste de travail en comportant application |
US4750276A (en) * | 1984-05-10 | 1988-06-14 | Donald Paul Smith | Impingement thermal treatment apparatus with collector plate |
US4872400A (en) * | 1988-12-12 | 1989-10-10 | Air Concepts, Inc. | Laboratory work station with controllable environment |
JP2644912B2 (ja) * | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
FI88541C (fi) * | 1991-04-23 | 1993-05-25 | Ilmateollisuus Oy | Foerfarande och anordning foer att aostadkomma en luftvaexling foer ett behandlingsrum |
US5211106A (en) * | 1991-05-22 | 1993-05-18 | Oscar Mayer Foods Corporation | Apparatus and method for cooking casingless shaped food products |
US5351415A (en) * | 1992-05-18 | 1994-10-04 | Convey, Inc. | Method and apparatus for maintaining clean articles |
DE69205571T2 (de) * | 1992-08-04 | 1996-06-13 | Ibm | Unter Druck stehende Koppelsysteme zum Transferieren von einem Halbleiterwafer zwischen einem tragbaren abdichtbaren unter druckstehenden Behälter und einer Bearbeitungsanlage. |
ES2078717T3 (es) * | 1992-08-04 | 1995-12-16 | Ibm | Aparato de reparticion con un sistema de distribucion y alimentacion de gas para manipular y almacenar recipientes transportables estancos a presion. |
US5628121A (en) * | 1995-12-01 | 1997-05-13 | Convey, Inc. | Method and apparatus for maintaining sensitive articles in a contaminant-free environment |
US5724748A (en) * | 1996-07-24 | 1998-03-10 | Brooks; Ray G. | Apparatus for packaging contaminant-sensitive articles and resulting package |
-
1995
- 1995-04-14 FR FR9504526A patent/FR2733036B1/fr not_active Expired - Fee Related
-
1996
- 1996-04-12 DE DE69622037T patent/DE69622037T2/de not_active Expired - Fee Related
- 1996-04-12 CA CA002218416A patent/CA2218416C/fr not_active Expired - Fee Related
- 1996-04-12 WO PCT/FR1996/000563 patent/WO1996032613A1/fr active IP Right Grant
- 1996-04-12 US US08/945,341 patent/US6035549A/en not_active Expired - Fee Related
- 1996-04-12 JP JP53078096A patent/JP4113256B2/ja not_active Expired - Fee Related
- 1996-04-12 ES ES96913582T patent/ES2176454T3/es not_active Expired - Lifetime
- 1996-04-12 EP EP96913582A patent/EP0830549B1/de not_active Expired - Lifetime
- 1996-04-12 AT AT96913582T patent/ATE219831T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH11503815A (ja) | 1999-03-30 |
DE69622037D1 (de) | 2002-08-01 |
WO1996032613A1 (fr) | 1996-10-17 |
JP4113256B2 (ja) | 2008-07-09 |
FR2733036B1 (fr) | 1997-07-04 |
EP0830549B1 (de) | 2002-06-26 |
EP0830549A1 (de) | 1998-03-25 |
ES2176454T3 (es) | 2002-12-01 |
CA2218416C (fr) | 2008-07-08 |
DE69622037T2 (de) | 2002-11-21 |
FR2733036A1 (fr) | 1996-10-18 |
CA2218416A1 (fr) | 1996-10-17 |
US6035549A (en) | 2000-03-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69117824D1 (de) | Vorrichtung und Verfahren zum Substratschutz während Substratbearbeitung | |
DE69123680D1 (de) | Verfahren und Vorrichtung zum Schutz von Mehrfachrechner-Softwarekopien gegen unberechtigte Benutzung | |
DE69114725D1 (de) | Vorrichtung zum Abgeben eines Aerosols. | |
DE69014319D1 (de) | Vorrichtung zum Schützen und Verarbeiten von Banknoten und Wertgegenstände. | |
DE69524606D1 (de) | Vorrichtung und verfahren zum heiss-vakuumdrapieren von verbundwerkstoffen | |
DE69414370D1 (de) | Verfahren und vorrichtung zum plasmaschneiden | |
DE69202513D1 (de) | Verfahren zum Erzeugen eines Explosionsdruckes und Vorrichtung dafür. | |
DE59711035D1 (de) | Vorrichtung zum schutz eines elektronischen geräts | |
DE69620487D1 (de) | Vorrichtung zum Wegblasen und/oder Aufsaugen von Schmutz | |
DE69521509D1 (de) | Vorrichtung zum schutz gegen überspannung von bolzen, schrauben und dergleichen | |
DE59712262D1 (de) | Vorrichtung und verfahren zum ansteuern wenigstens eines kapazitiven stellgliedes | |
DE69618220D1 (de) | Vorrichtung zum halsschutzen | |
DE69420585D1 (de) | Vorrichtung zum schützen vor stosswellen und splittern | |
DE69112908D1 (de) | Verfahren und Vorrichtung zum Schutz von Thyristoren. | |
DE69425562D1 (de) | Verfahren und Vorrichtung zum Zuführen von Blättern | |
DE59004330D1 (de) | Vorrichtung zum entfernen oxidierbarer bzw. verbrennbarer partikel aus abgasen. | |
ATE219831T1 (de) | Vorrichtung zum schutz gegen kontamination | |
DE69104698D1 (de) | Vorrichtung zum Zuführen und Trennen von Blättern. | |
DE69005815D1 (de) | Verfahren und gerät zum plasmaschneiden. | |
DE59906176D1 (de) | Sprühfeuchtwerk | |
DE59600989D1 (de) | Vorrichtung zum Bogentransport | |
DE59605427D1 (de) | Vorrichtung zum beidseitigen Feinstbearbeiten eines Werkstücks | |
TW279242B (en) | The wasted-gas processing method & device for CVD apparatus | |
DE59803859D1 (de) | Vorrichtung und verfahren zum ableiten von kondensat aus druckgassystemen | |
DE69106435D1 (de) | Verfahren und Vorrichtung zum Behandeln von Blattstapeln. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |