FR2692047B1 - SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION. - Google Patents

SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION.

Info

Publication number
FR2692047B1
FR2692047B1 FR9206791A FR9206791A FR2692047B1 FR 2692047 B1 FR2692047 B1 FR 2692047B1 FR 9206791 A FR9206791 A FR 9206791A FR 9206791 A FR9206791 A FR 9206791A FR 2692047 B1 FR2692047 B1 FR 2692047B1
Authority
FR
France
Prior art keywords
voltage
face
pct
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9206791A
Other languages
French (fr)
Other versions
FR2692047A1 (en
Inventor
Muriel Loesch
Francis Menil
Claude Lucat
Pascale Dutronc
Veronique Marteau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Engie SA
Original Assignee
Gaz de France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9206791A priority Critical patent/FR2692047B1/en
Application filed by Gaz de France SA filed Critical Gaz de France SA
Priority to PCT/FR1993/000534 priority patent/WO1993024827A1/en
Priority to EP93913090A priority patent/EP0597078B1/en
Priority to US08/185,806 priority patent/US5573728A/en
Priority to JP6500271A priority patent/JPH07500916A/en
Priority to ES93913090T priority patent/ES2107036T3/en
Priority to AT93913090T priority patent/ATE157450T1/en
Priority to CA002114633A priority patent/CA2114633A1/en
Priority to DE69313406T priority patent/DE69313406D1/en
Publication of FR2692047A1 publication Critical patent/FR2692047A1/en
Application granted granted Critical
Publication of FR2692047B1 publication Critical patent/FR2692047B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature

Abstract

PCT No. PCT/FR93/00534 Sec. 371 Date Jan. 28, 1994 Sec. 102(e) Date Jan. 28, 1994 PCT Filed Jun. 4, 1993 PCT Pub. No. WO93/24827 PCT Pub. Date Dec. 9, 1993A device for selective detection of gas, enabling a first gas to be detected relative to a second gas, the device having a solid state sensor provided with an insulating substrate having a first face and a second face, a heater element deposited on the first face of said substrate, metal electrodes deposited on the second face of said substrate, and a semiconductor layer formed on said electrode and over the second face of said substrate. Detection is performed by simultaneously determining a voltage U representative of the resistance of the semiconductor element of the solid state sensor and the voltage difference S between a voltage representative of the temperature of the heater element of said solid state sensor and a voltage representative of the temperature of a heater element of a reference sensor, the voltage U and the voltage difference S each being compared with a different and predetermined threshold voltage in order to enable selective detection of gas.
FR9206791A 1992-06-04 1992-06-04 SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION. Expired - Fee Related FR2692047B1 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR9206791A FR2692047B1 (en) 1992-06-04 1992-06-04 SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION.
EP93913090A EP0597078B1 (en) 1992-06-04 1993-06-04 Selective gas detection device
US08/185,806 US5573728A (en) 1992-06-04 1993-06-04 Device for selective detection of gas
JP6500271A JPH07500916A (en) 1992-06-04 1993-06-04 Selective gas detection device
PCT/FR1993/000534 WO1993024827A1 (en) 1992-06-04 1993-06-04 Selective gas detection device
ES93913090T ES2107036T3 (en) 1992-06-04 1993-06-04 GASES SELECTIVE DETECTION DEVICE.
AT93913090T ATE157450T1 (en) 1992-06-04 1993-06-04 DEVICE FOR SELECTIVE DETECTION OF GASES
CA002114633A CA2114633A1 (en) 1992-06-04 1993-06-04 Selective gas detection device
DE69313406T DE69313406D1 (en) 1992-06-04 1993-06-04 DEVICE FOR SELECTIVE DETECTION OF GASES

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9206791A FR2692047B1 (en) 1992-06-04 1992-06-04 SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION.

Publications (2)

Publication Number Publication Date
FR2692047A1 FR2692047A1 (en) 1993-12-10
FR2692047B1 true FR2692047B1 (en) 1995-08-04

Family

ID=9430444

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9206791A Expired - Fee Related FR2692047B1 (en) 1992-06-04 1992-06-04 SELECTIVE GAS DETECTION SENSOR AND DEVICE FOR ITS IMPLEMENTATION.

Country Status (9)

Country Link
US (1) US5573728A (en)
EP (1) EP0597078B1 (en)
JP (1) JPH07500916A (en)
AT (1) ATE157450T1 (en)
CA (1) CA2114633A1 (en)
DE (1) DE69313406D1 (en)
ES (1) ES2107036T3 (en)
FR (1) FR2692047B1 (en)
WO (1) WO1993024827A1 (en)

Families Citing this family (21)

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US5977687A (en) * 1996-07-12 1999-11-02 Advanced Technology Materials, Inc. Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same
US5827947A (en) * 1997-01-17 1998-10-27 Advanced Technology Materials, Inc. Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same
US6244121B1 (en) 1998-03-06 2001-06-12 Applied Materials, Inc. Sensor device for non-intrusive diagnosis of a semiconductor processing system
DE19818474A1 (en) * 1998-04-24 1999-11-25 Siemens Ag Gas sensor and use
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
US6079252A (en) * 1998-05-20 2000-06-27 Advanced Technology Materials, Inc. Leak detection device, and fluid vessel assembly comprising same
US6156578A (en) * 1998-06-01 2000-12-05 Advanced Technology Materials, Inc. Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
ITMI981248A1 (en) * 1998-06-04 1999-12-04 Enitecnologie Spa PROCESS FOR THE DETERMINATION OF MTBE IN THE LAND AND IN THE AIR
US6095681A (en) * 1998-07-28 2000-08-01 The United States Of America As Represented By The Secretary Of Commerce Method for operating a sensor to differentiate between analytes in a sample
US6295861B1 (en) 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
US6166356A (en) * 1999-04-19 2000-12-26 Hewlett-Packard Temperature monitoring system
DE10066163B4 (en) * 1999-04-19 2004-12-16 Hewlett-Packard Co. (N.D.Ges.D.Staates Delaware), Palo Alto Temperature monitoring system for assemblies which dissipate energy or are heated, has monitoring device coupled to sensor and configured to generate first parameter related to temperature of first assembly
US20050233770A1 (en) * 2002-02-06 2005-10-20 Ramsey Craig C Wireless substrate-like sensor
US7289230B2 (en) * 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US20050224902A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
JP2009527764A (en) 2006-02-21 2009-07-30 サイバーオプティクス セミコンダクタ インコーポレイテッド Capacitance distance detection in semiconductor processing tools
US7893697B2 (en) 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
US8823933B2 (en) * 2006-09-29 2014-09-02 Cyberoptics Corporation Substrate-like particle sensor
US7778793B2 (en) * 2007-03-12 2010-08-17 Cyberoptics Semiconductor, Inc. Wireless sensor for semiconductor processing systems
EP2105733A1 (en) * 2008-03-26 2009-09-30 Micronas GmbH Method for measuring the concentration of a gas
EP2762868B1 (en) * 2013-01-31 2017-03-15 Sensirion AG Diffusion based metal oxide gas sensor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2737385A1 (en) * 1977-08-19 1979-03-22 Licentia Gmbh GAS DETECTING ELEMENT FOR DETECTING FATS AND ODOR SUBSTANCES
US4443791A (en) * 1978-01-05 1984-04-17 Risgin Ojars Self-compensating gas detection apparatus
JPS5766347A (en) * 1980-10-09 1982-04-22 Hitachi Ltd Detector for mixture gas
JPS6014148A (en) * 1983-07-05 1985-01-24 Nippon Soken Inc Gas sensor
US4541988A (en) * 1983-12-13 1985-09-17 Bacharach Instrument Company Constant temperature catalytic gas detection instrument
JPH01109250A (en) * 1987-10-22 1989-04-26 Toshiba Corp Gas sensor
US4911892A (en) * 1987-02-24 1990-03-27 American Intell-Sensors Corporation Apparatus for simultaneous detection of target gases
JPH07104309B2 (en) * 1987-03-20 1995-11-13 株式会社東芝 Gas sensor manufacturing method
US4847783A (en) * 1987-05-27 1989-07-11 Richard Grace Gas sensing instrument
US5047214A (en) * 1989-03-08 1991-09-10 New Cosmos Electric Co., Ltd. Smell sensing element and smell sensing device
IT1241405B (en) * 1990-03-02 1994-01-14 Eniricerche Spa GAS SENSORS TO DETERMINE GASEOUS HYDROCARBONS REALIZED WITH THIN TIN OXIDE FILMS
IT1256759B (en) * 1992-12-23 1995-12-15 Eniricerche Spa SEMICONDUCTIVE OXIDE GAS SENSOR FOR DETERMINING GASEOUS HYDROCARBONS

Also Published As

Publication number Publication date
US5573728A (en) 1996-11-12
ES2107036T3 (en) 1997-11-16
CA2114633A1 (en) 1993-12-09
EP0597078B1 (en) 1997-08-27
JPH07500916A (en) 1995-01-26
FR2692047A1 (en) 1993-12-10
EP0597078A1 (en) 1994-05-18
WO1993024827A1 (en) 1993-12-09
DE69313406D1 (en) 1997-10-02
ATE157450T1 (en) 1997-09-15

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Legal Events

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