FR2657999B1 - Tube a vide micro-miniature et procede de fabrication. - Google Patents
Tube a vide micro-miniature et procede de fabrication.Info
- Publication number
- FR2657999B1 FR2657999B1 FR9100964A FR9100964A FR2657999B1 FR 2657999 B1 FR2657999 B1 FR 2657999B1 FR 9100964 A FR9100964 A FR 9100964A FR 9100964 A FR9100964 A FR 9100964A FR 2657999 B1 FR2657999 B1 FR 2657999B1
- Authority
- FR
- France
- Prior art keywords
- micro
- manufacturing
- vacuum tube
- miniature vacuum
- miniature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J21/00—Vacuum tubes
- H01J21/02—Tubes with a single discharge path
- H01J21/06—Tubes with a single discharge path having electrostatic control means only
- H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
- H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012690A JP2968014B2 (ja) | 1990-01-29 | 1990-01-29 | 微小真空管及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2657999A1 FR2657999A1 (fr) | 1991-08-09 |
FR2657999B1 true FR2657999B1 (fr) | 1996-11-22 |
Family
ID=12018430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9100964A Expired - Fee Related FR2657999B1 (fr) | 1990-01-29 | 1991-01-29 | Tube a vide micro-miniature et procede de fabrication. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5245247A (fr) |
JP (1) | JP2968014B2 (fr) |
FR (1) | FR2657999B1 (fr) |
GB (1) | GB2242064B (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2613669B2 (ja) * | 1990-09-27 | 1997-05-28 | 工業技術院長 | 電界放出素子及びその製造方法 |
JP3231528B2 (ja) * | 1993-08-17 | 2001-11-26 | 株式会社東芝 | 電界放出型冷陰極およびその製造方法 |
KR970000963B1 (ko) * | 1992-12-22 | 1997-01-21 | 재단법인 한국전자통신연구소 | 광게이트를 갖는 진공 트랜지스터 및 그 제조방법 |
US5502314A (en) * | 1993-07-05 | 1996-03-26 | Matsushita Electric Industrial Co., Ltd. | Field-emission element having a cathode with a small radius |
US5610471A (en) * | 1993-07-07 | 1997-03-11 | Varian Associates, Inc. | Single field emission device |
US5340997A (en) * | 1993-09-20 | 1994-08-23 | Hewlett-Packard Company | Electrostatically shielded field emission microelectronic device |
US5401963A (en) * | 1993-11-01 | 1995-03-28 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
US5793152A (en) * | 1993-12-03 | 1998-08-11 | Frederick M. Mako | Gated field-emitters with integrated planar lenses |
JPH0850850A (ja) * | 1994-08-09 | 1996-02-20 | Agency Of Ind Science & Technol | 電界放出型電子放出素子およびその製造方法 |
DE19609234A1 (de) * | 1996-03-09 | 1997-09-11 | Deutsche Telekom Ag | Röhrensysteme und Herstellungsverfahren hierzu |
US6989631B2 (en) * | 2001-06-08 | 2006-01-24 | Sony Corporation | Carbon cathode of a field emission display with in-laid isolation barrier and support |
US6624590B2 (en) * | 2001-06-08 | 2003-09-23 | Sony Corporation | Method for driving a field emission display |
US7002290B2 (en) * | 2001-06-08 | 2006-02-21 | Sony Corporation | Carbon cathode of a field emission display with integrated isolation barrier and support on substrate |
US6682382B2 (en) * | 2001-06-08 | 2004-01-27 | Sony Corporation | Method for making wires with a specific cross section for a field emission display |
US6756730B2 (en) * | 2001-06-08 | 2004-06-29 | Sony Corporation | Field emission display utilizing a cathode frame-type gate and anode with alignment method |
US6663454B2 (en) * | 2001-06-08 | 2003-12-16 | Sony Corporation | Method for aligning field emission display components |
US6791278B2 (en) * | 2002-04-16 | 2004-09-14 | Sony Corporation | Field emission display using line cathode structure |
US6873118B2 (en) * | 2002-04-16 | 2005-03-29 | Sony Corporation | Field emission cathode structure using perforated gate |
US6747416B2 (en) * | 2002-04-16 | 2004-06-08 | Sony Corporation | Field emission display with deflecting MEMS electrodes |
US7012582B2 (en) * | 2002-11-27 | 2006-03-14 | Sony Corporation | Spacer-less field emission display |
US20040145299A1 (en) * | 2003-01-24 | 2004-07-29 | Sony Corporation | Line patterned gate structure for a field emission display |
US7071629B2 (en) * | 2003-03-31 | 2006-07-04 | Sony Corporation | Image display device incorporating driver circuits on active substrate and other methods to reduce interconnects |
US20040189552A1 (en) * | 2003-03-31 | 2004-09-30 | Sony Corporation | Image display device incorporating driver circuits on active substrate to reduce interconnects |
MX2007000765A (es) | 2004-07-20 | 2007-03-28 | Warner Lambert Co | Formas cristalinas de sal de calcio del acido (r-(r*, r*))-2- (4-fluorofenil)- beta,gama- dihidroxi-5- (1-metiletil)-3 -fenil-4-((fenilamino) (carbonil)-1ih -pirrol-1- heptanoico (2:1). |
JP4811520B2 (ja) * | 2009-02-20 | 2011-11-09 | 住友金属鉱山株式会社 | 半導体装置用基板の製造方法、半導体装置の製造方法、半導体装置用基板及び半導体装置 |
CN110246889B (zh) * | 2019-05-10 | 2021-05-28 | 西安交通大学 | 一种双栅型真空场发射三极管结构及其制作方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3814968A (en) * | 1972-02-11 | 1974-06-04 | Lucas Industries Ltd | Solid state radiation sensitive field electron emitter and methods of fabrication thereof |
US4168213A (en) * | 1976-04-29 | 1979-09-18 | U.S. Philips Corporation | Field emission device and method of forming same |
US4578614A (en) * | 1982-07-23 | 1986-03-25 | The United States Of America As Represented By The Secretary Of The Navy | Ultra-fast field emitter array vacuum integrated circuit switching device |
US4513308A (en) * | 1982-09-23 | 1985-04-23 | The United States Of America As Represented By The Secretary Of The Navy | p-n Junction controlled field emitter array cathode |
NL8600676A (nl) * | 1986-03-17 | 1987-10-16 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenstroom. |
GB8621600D0 (en) * | 1986-09-08 | 1987-03-18 | Gen Electric Co Plc | Vacuum devices |
US4904895A (en) * | 1987-05-06 | 1990-02-27 | Canon Kabushiki Kaisha | Electron emission device |
GB8720792D0 (en) * | 1987-09-04 | 1987-10-14 | Gen Electric Co Plc | Vacuum devices |
US4855636A (en) * | 1987-10-08 | 1989-08-08 | Busta Heinz H | Micromachined cold cathode vacuum tube device and method of making |
JP2623738B2 (ja) * | 1988-08-08 | 1997-06-25 | 松下電器産業株式会社 | 画像表示装置 |
JPH0340332A (ja) * | 1989-07-07 | 1991-02-21 | Matsushita Electric Ind Co Ltd | 電界放出型スウィチング素子およびその製造方法 |
-
1990
- 1990-01-29 JP JP2012690A patent/JP2968014B2/ja not_active Expired - Lifetime
-
1991
- 1991-01-22 US US07/644,995 patent/US5245247A/en not_active Expired - Fee Related
- 1991-01-23 GB GB9101507A patent/GB2242064B/en not_active Expired - Fee Related
- 1991-01-29 FR FR9100964A patent/FR2657999B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2242064B (en) | 1994-05-25 |
US5245247A (en) | 1993-09-14 |
JP2968014B2 (ja) | 1999-10-25 |
FR2657999A1 (fr) | 1991-08-09 |
GB9101507D0 (en) | 1991-03-06 |
GB2242064A (en) | 1991-09-18 |
JPH03225725A (ja) | 1991-10-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |