FR2532415B1 - Procede et interferometre pour mesurer des distances courtes - Google Patents

Procede et interferometre pour mesurer des distances courtes

Info

Publication number
FR2532415B1
FR2532415B1 FR8313954A FR8313954A FR2532415B1 FR 2532415 B1 FR2532415 B1 FR 2532415B1 FR 8313954 A FR8313954 A FR 8313954A FR 8313954 A FR8313954 A FR 8313954A FR 2532415 B1 FR2532415 B1 FR 2532415B1
Authority
FR
France
Prior art keywords
interferometer
short distances
measuring short
measuring
distances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8313954A
Other languages
English (en)
Other versions
FR2532415A1 (fr
Inventor
Kalevi Juhani Kalliomaki
Reijo Albert Kivela
Raimo Vilho Saarimaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOPWAVE INSTRUMENTS Oy
Original Assignee
TOPWAVE INSTRUMENTS Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOPWAVE INSTRUMENTS Oy filed Critical TOPWAVE INSTRUMENTS Oy
Publication of FR2532415A1 publication Critical patent/FR2532415A1/fr
Application granted granted Critical
Publication of FR2532415B1 publication Critical patent/FR2532415B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8313954A 1982-09-01 1983-08-31 Procede et interferometre pour mesurer des distances courtes Expired FR2532415B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI823028A FI823028A0 (fi) 1982-09-01 1982-09-01 Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer

Publications (2)

Publication Number Publication Date
FR2532415A1 FR2532415A1 (fr) 1984-03-02
FR2532415B1 true FR2532415B1 (fr) 1987-03-27

Family

ID=8515980

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8313954A Expired FR2532415B1 (fr) 1982-09-01 1983-08-31 Procede et interferometre pour mesurer des distances courtes

Country Status (6)

Country Link
US (1) US4647205A (fr)
JP (1) JPS59131106A (fr)
DE (1) DE3331175C2 (fr)
FI (1) FI823028A0 (fr)
FR (1) FR2532415B1 (fr)
GB (1) GB2126338B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176902A (ja) * 1984-09-25 1986-04-19 Yamazaki Mazak Corp 非接触形プロ−ブ
US4958931A (en) * 1989-04-14 1990-09-25 Litton Systems, Inc. System utilizing an achromatic null lens for correcting aberrations in a spherical wavefront
DE3917556A1 (de) * 1989-05-30 1990-12-06 Oskar Hubert Richt Sensor zur erfassung der membranbewegung eines lautsprechers
JPH05500853A (ja) * 1989-06-30 1993-02-18 ナウチノ　プロイズヴォドストヴェンニ　コーペラティヴ　“フォコン” ガラス管壁の厚さを決定するための方法及び装置
WO1991000496A1 (fr) * 1989-06-30 1991-01-10 Nauchno-Proizvodstvenny Kooperativ 'fokon' Procede et dispositif de determination du profil de surface d'objets de diffusion-reflection
DE4110230A1 (de) * 1991-03-28 1992-10-01 Zeiss Carl Fa Vorrichtung zur interferometrischen messung der dicke einer transparenten schicht
US5418612A (en) * 1992-02-27 1995-05-23 Renishaw, Plc Method of and apparatus for determining surface contour of diffusely reflecting objects
US5633712A (en) * 1995-08-28 1997-05-27 Hewlett-Packard Company Method and apparatus for determining the thickness and index of refraction of a film using low coherence reflectometry and a reference surfaces
DE10148919A1 (de) * 2001-10-04 2003-04-10 Philips Corp Intellectual Pty Verfahren und Vorrichtung zur Ortung bewegter Gegenstände
US20060091294A1 (en) * 2004-10-29 2006-05-04 Michael Frank Apparatus and method for interference suppression in optical or radiation sensors
JP4939304B2 (ja) * 2007-05-24 2012-05-23 東レエンジニアリング株式会社 透明膜の膜厚測定方法およびその装置
ES2473241T3 (es) * 2010-05-18 2014-07-04 Marposs Societa' Per Azioni Método y aparato para medir �pticamente por interferometr�a el espesor de un objeto
DE102020133404A1 (de) 2020-12-14 2022-06-15 NoKra Optische Prüftechnik und Automation GmbH Abstandsmessung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319515A (en) * 1963-08-27 1967-05-16 Du Pont Interferometric optical phase discrimination apparatus
US3563663A (en) * 1966-07-13 1971-02-16 Barringer Research Ltd Analysis of spectra by correlation of interference patterns
US3768910A (en) * 1972-05-25 1973-10-30 Zygo Corp Detecting the position of a surface by focus modulating the illuminating beam
JPS5413133B2 (fr) * 1973-05-24 1979-05-29
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
US4355903A (en) * 1980-02-08 1982-10-26 Rca Corporation Thin film thickness monitor

Also Published As

Publication number Publication date
DE3331175C2 (de) 1995-11-30
GB2126338B (en) 1986-02-05
DE3331175A1 (de) 1984-03-01
JPH0423202B2 (fr) 1992-04-21
FI823028A0 (fi) 1982-09-01
FR2532415A1 (fr) 1984-03-02
GB2126338A (en) 1984-03-21
JPS59131106A (ja) 1984-07-27
US4647205A (en) 1987-03-03
GB8323179D0 (en) 1983-09-28

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Legal Events

Date Code Title Description
ST Notification of lapse