FI823028A0 - Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer - Google Patents

Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer

Info

Publication number
FI823028A0
FI823028A0 FI823028A FI823028A FI823028A0 FI 823028 A0 FI823028 A0 FI 823028A0 FI 823028 A FI823028 A FI 823028A FI 823028 A FI823028 A FI 823028A FI 823028 A0 FI823028 A0 FI 823028A0
Authority
FI
Finland
Prior art keywords
interferometer
foer
straeckor
koherent
korta
Prior art date
Application number
FI823028A
Other languages
English (en)
Finnish (fi)
Inventor
Kalevi Juhani Kalliomaeki
Reijo Albert Kivelae
Raimo Vilho Saarimaa
Original Assignee
Kalevi Juhani Kalliomaeki
Reijo Albert Kivelae
Raimo Vilho Saarimaa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kalevi Juhani Kalliomaeki, Reijo Albert Kivelae, Raimo Vilho Saarimaa filed Critical Kalevi Juhani Kalliomaeki
Priority to FI823028A priority Critical patent/FI823028A0/fi
Publication of FI823028A0 publication Critical patent/FI823028A0/fi
Priority to GB08323179A priority patent/GB2126338B/en
Priority to DE3331175A priority patent/DE3331175C2/de
Priority to US06/527,958 priority patent/US4647205A/en
Priority to FR8313954A priority patent/FR2532415B1/fr
Priority to FI833111A priority patent/FI66690C/fi
Priority to JP58161175A priority patent/JPS59131106A/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FI823028A 1982-09-01 1982-09-01 Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer FI823028A0 (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI823028A FI823028A0 (fi) 1982-09-01 1982-09-01 Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer
GB08323179A GB2126338B (en) 1982-09-01 1983-08-30 Interferometric measurement of short distances
DE3331175A DE3331175C2 (de) 1982-09-01 1983-08-30 Verfahren und Vorrichtung zur interferometrischen Bestimmung der Dicke eines transparenten Gegenstandes
US06/527,958 US4647205A (en) 1982-09-01 1983-08-31 Method and interferometer for the measurement of short distances
FR8313954A FR2532415B1 (fr) 1982-09-01 1983-08-31 Procede et interferometre pour mesurer des distances courtes
FI833111A FI66690C (fi) 1982-09-01 1983-09-01 Foerfarande och interferometer foer maetning av korta straeckor med hjaelp av ickekoherent ljus
JP58161175A JPS59131106A (ja) 1982-09-01 1983-09-01 干渉計およびこれを用いて微少距離を測定する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI823028A FI823028A0 (fi) 1982-09-01 1982-09-01 Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer

Publications (1)

Publication Number Publication Date
FI823028A0 true FI823028A0 (fi) 1982-09-01

Family

ID=8515980

Family Applications (1)

Application Number Title Priority Date Filing Date
FI823028A FI823028A0 (fi) 1982-09-01 1982-09-01 Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer

Country Status (6)

Country Link
US (1) US4647205A (fr)
JP (1) JPS59131106A (fr)
DE (1) DE3331175C2 (fr)
FI (1) FI823028A0 (fr)
FR (1) FR2532415B1 (fr)
GB (1) GB2126338B (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176902A (ja) * 1984-09-25 1986-04-19 Yamazaki Mazak Corp 非接触形プロ−ブ
US4958931A (en) * 1989-04-14 1990-09-25 Litton Systems, Inc. System utilizing an achromatic null lens for correcting aberrations in a spherical wavefront
DE3917556A1 (de) * 1989-05-30 1990-12-06 Oskar Hubert Richt Sensor zur erfassung der membranbewegung eines lautsprechers
ATE131927T1 (de) * 1989-06-30 1996-01-15 Renishaw Plc Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten
EP0480027A4 (en) * 1989-06-30 1993-06-09 Nauchno-Proizvodstvenny Kooperativ "Fokon" Method and device for determining the thickness of a glass tube
DE4110230A1 (de) * 1991-03-28 1992-10-01 Zeiss Carl Fa Vorrichtung zur interferometrischen messung der dicke einer transparenten schicht
US5418612A (en) * 1992-02-27 1995-05-23 Renishaw, Plc Method of and apparatus for determining surface contour of diffusely reflecting objects
US5633712A (en) * 1995-08-28 1997-05-27 Hewlett-Packard Company Method and apparatus for determining the thickness and index of refraction of a film using low coherence reflectometry and a reference surfaces
DE10148919A1 (de) * 2001-10-04 2003-04-10 Philips Corp Intellectual Pty Verfahren und Vorrichtung zur Ortung bewegter Gegenstände
US20060091294A1 (en) * 2004-10-29 2006-05-04 Michael Frank Apparatus and method for interference suppression in optical or radiation sensors
JP4939304B2 (ja) * 2007-05-24 2012-05-23 東レエンジニアリング株式会社 透明膜の膜厚測定方法およびその装置
SG185368A1 (en) * 2010-05-18 2012-12-28 Marposs Spa Method and apparatus for optically measuring by interferometry the thickness of an object
DE102020133404A1 (de) 2020-12-14 2022-06-15 NoKra Optische Prüftechnik und Automation GmbH Abstandsmessung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319515A (en) * 1963-08-27 1967-05-16 Du Pont Interferometric optical phase discrimination apparatus
US3563663A (en) * 1966-07-13 1971-02-16 Barringer Research Ltd Analysis of spectra by correlation of interference patterns
US3768910A (en) * 1972-05-25 1973-10-30 Zygo Corp Detecting the position of a surface by focus modulating the illuminating beam
JPS5413133B2 (fr) * 1973-05-24 1979-05-29
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
US4355903A (en) * 1980-02-08 1982-10-26 Rca Corporation Thin film thickness monitor

Also Published As

Publication number Publication date
DE3331175A1 (de) 1984-03-01
GB8323179D0 (en) 1983-09-28
JPS59131106A (ja) 1984-07-27
FR2532415B1 (fr) 1987-03-27
FR2532415A1 (fr) 1984-03-02
US4647205A (en) 1987-03-03
DE3331175C2 (de) 1995-11-30
GB2126338B (en) 1986-02-05
JPH0423202B2 (fr) 1992-04-21
GB2126338A (en) 1984-03-21

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