FR2483377B1 - - Google Patents
Info
- Publication number
- FR2483377B1 FR2483377B1 FR8110821A FR8110821A FR2483377B1 FR 2483377 B1 FR2483377 B1 FR 2483377B1 FR 8110821 A FR8110821 A FR 8110821A FR 8110821 A FR8110821 A FR 8110821A FR 2483377 B1 FR2483377 B1 FR 2483377B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD22150480A DD151387A1 (en) | 1980-06-02 | 1980-06-02 | METHOD AND DEVICE FOR AUTOMATIC TRANSPORT AND LOCATION ORIENTATION OF DISK FORMULA OBJECTS |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2483377A1 FR2483377A1 (en) | 1981-12-04 |
| FR2483377B1 true FR2483377B1 (en) | 1984-12-14 |
Family
ID=5524464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8110821A Granted FR2483377A1 (en) | 1980-06-02 | 1981-06-01 | METHOD AND DEVICE FOR AUTOMATIC TRANSPORT AND FOR POSITIONING DISK-SHAPED OBJECTS |
Country Status (3)
| Country | Link |
|---|---|
| DD (1) | DD151387A1 (en) |
| DE (1) | DE3120696A1 (en) |
| FR (1) | FR2483377A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4603897A (en) * | 1983-05-20 | 1986-08-05 | Poconics International, Inc. | Vacuum pickup apparatus |
| FR2620113B1 (en) * | 1987-08-11 | 1989-11-17 | Commissariat Energie Atomique | CONVEYOR OF STACKS STACKED IN CASSETTES |
| IT1238402B (en) * | 1990-05-11 | 1993-07-26 | Gd Spa | UNIT FOR FEEDING PRODUCTS TO AN OPERATING MACHINE |
| KR960032667A (en) * | 1995-02-28 | 1996-09-17 | 김광호 | Lead frame transfer method |
| DE102021117430A1 (en) | 2021-07-06 | 2023-01-12 | Homag Gmbh | Device and method for moving workpieces |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3717381A (en) * | 1969-07-25 | 1973-02-20 | Texas Instruments Inc | Transporting and positioning system |
| US3797889A (en) | 1971-12-30 | 1974-03-19 | Texas Instruments Inc | Workpiece alignment system |
| US3902615A (en) | 1973-03-12 | 1975-09-02 | Computervision Corp | Automatic wafer loading and pre-alignment system |
| US3865254A (en) | 1973-05-21 | 1975-02-11 | Kasker Instr Inc | Prealignment system for an optical alignment and exposure instrument |
| US3890508A (en) | 1973-12-28 | 1975-06-17 | Texas Instruments Inc | Workpiece alignment system |
| DD123848A1 (en) | 1976-01-19 | 1977-01-19 |
-
1980
- 1980-06-02 DD DD22150480A patent/DD151387A1/en unknown
-
1981
- 1981-05-23 DE DE19813120696 patent/DE3120696A1/en not_active Withdrawn
- 1981-06-01 FR FR8110821A patent/FR2483377A1/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DD151387A1 (en) | 1981-10-14 |
| FR2483377A1 (en) | 1981-12-04 |
| DE3120696A1 (en) | 1982-03-18 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |