FR2335951A1 - Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation - Google Patents
Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivationInfo
- Publication number
- FR2335951A1 FR2335951A1 FR7539046A FR7539046A FR2335951A1 FR 2335951 A1 FR2335951 A1 FR 2335951A1 FR 7539046 A FR7539046 A FR 7539046A FR 7539046 A FR7539046 A FR 7539046A FR 2335951 A1 FR2335951 A1 FR 2335951A1
- Authority
- FR
- France
- Prior art keywords
- obtaining
- semiconductor device
- passivation structure
- passive surface
- passivation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title 1
- 238000002161 passivation Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/298—Semiconductor material, e.g. amorphous silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3178—Coating or filling in grooves made in the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/122—Polycrystalline
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/125—Polycrystalline passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/905—Plural dram cells share common contact or common trench
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/958—Passivation layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7539046A FR2335951A1 (fr) | 1975-12-19 | 1975-12-19 | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
DE2655341A DE2655341C2 (de) | 1975-12-19 | 1976-12-07 | Halbleiteranordnung mit einer Passivierungsschicht aus Halbleitermaterial und Verfahren zu ihrer Herstellung |
US05/748,697 US4086613A (en) | 1975-12-19 | 1976-12-08 | Semiconductor device having a passivated surface and method of manufacturing the device |
NL7613893A NL7613893A (nl) | 1975-12-19 | 1976-12-15 | Halfgeleiderinrichting met gepassiveerd opper- vlak, en werkwijze voor het vervaardigen van de inrichting. |
JP51150399A JPS5948539B2 (ja) | 1975-12-19 | 1976-12-16 | 半導体装置 |
GB52548/76A GB1565990A (en) | 1975-12-19 | 1976-12-16 | Semiconductor device having a passivated surface |
IT30508/76A IT1068031B (it) | 1975-12-19 | 1976-12-16 | Dispositivo semiconduttore presente una superficie passivata,e metodo di fabbricazione dello stesso |
CA268,288A CA1069620A (fr) | 1975-12-19 | 1976-12-20 | Dispositif a semiconducteur a surface passive |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7539046A FR2335951A1 (fr) | 1975-12-19 | 1975-12-19 | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2335951A1 true FR2335951A1 (fr) | 1977-07-15 |
FR2335951B1 FR2335951B1 (fr) | 1978-07-13 |
Family
ID=9163957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7539046A Granted FR2335951A1 (fr) | 1975-12-19 | 1975-12-19 | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
Country Status (8)
Country | Link |
---|---|
US (1) | US4086613A (fr) |
JP (1) | JPS5948539B2 (fr) |
CA (1) | CA1069620A (fr) |
DE (1) | DE2655341C2 (fr) |
FR (1) | FR2335951A1 (fr) |
GB (1) | GB1565990A (fr) |
IT (1) | IT1068031B (fr) |
NL (1) | NL7613893A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2459551A1 (fr) * | 1979-06-19 | 1981-01-09 | Thomson Csf | Procede et structure de passivation a autoalignement sur l'emplacement d'un masque |
FR2477771A1 (fr) * | 1980-03-07 | 1981-09-11 | Philips Nv | Procede pour la realisation d'un dispositif semiconducteur a haute tension de blocage et dispositif semiconducteur ainsi realise |
FR2487576A1 (fr) * | 1980-07-24 | 1982-01-29 | Thomson Csf | Procede de fabrication de diodes mesa glassivees |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4194934A (en) * | 1977-05-23 | 1980-03-25 | Varo Semiconductor, Inc. | Method of passivating a semiconductor device utilizing dual polycrystalline layers |
DE2730367A1 (de) * | 1977-07-05 | 1979-01-18 | Siemens Ag | Verfahren zum passivieren von halbleiterelementen |
DE2739762C2 (de) * | 1977-09-03 | 1982-12-02 | SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg | Verfahren zur Passivierung von Halbleiterkörpern |
US4140558A (en) * | 1978-03-02 | 1979-02-20 | Bell Telephone Laboratories, Incorporated | Isolation of integrated circuits utilizing selective etching and diffusion |
US4191788A (en) * | 1978-11-13 | 1980-03-04 | Trw Inc. | Method to reduce breakage of V-grooved <100> silicon substrate |
US4262299A (en) * | 1979-01-29 | 1981-04-14 | Rca Corporation | Semiconductor-on-insulator device and method for its manufacture |
US4199384A (en) * | 1979-01-29 | 1980-04-22 | Rca Corporation | Method of making a planar semiconductor on insulating substrate device utilizing the deposition of a dual dielectric layer between device islands |
US4242697A (en) * | 1979-03-14 | 1980-12-30 | Bell Telephone Laboratories, Incorporated | Dielectrically isolated high voltage semiconductor devices |
US4229474A (en) * | 1979-05-25 | 1980-10-21 | Trw Inc. | Breakage resistant V-grooved <100> silicon substrates |
US4803528A (en) * | 1980-07-28 | 1989-02-07 | General Electric Company | Insulating film having electrically conducting portions |
US4339285A (en) * | 1980-07-28 | 1982-07-13 | Rca Corporation | Method for fabricating adjacent conducting and insulating regions in a film by laser irradiation |
US4349408A (en) * | 1981-03-26 | 1982-09-14 | Rca Corporation | Method of depositing a refractory metal on a semiconductor substrate |
GB2133928B (en) * | 1982-12-04 | 1986-07-30 | Plessey Co Plc | Coatings for semiconductor devices |
JPS59161864A (ja) * | 1983-03-04 | 1984-09-12 | Fujitsu Ltd | 半導体装置 |
JPS61222172A (ja) * | 1985-03-15 | 1986-10-02 | Sharp Corp | Mosfetのゲ−ト絶縁膜形成方法 |
NL8800220A (nl) * | 1988-01-29 | 1989-08-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij een metalen geleiderspoor op een oppervlak van een halfgeleiderlichaam wordt gebracht. |
US5166769A (en) * | 1988-07-18 | 1992-11-24 | General Instrument Corporation | Passitvated mesa semiconductor and method for making same |
US5605862A (en) * | 1995-04-05 | 1997-02-25 | International Business Machines Corporation | Process for making low-leakage contacts |
US5677562A (en) * | 1996-05-14 | 1997-10-14 | General Instrument Corporation Of Delaware | Planar P-N junction semiconductor structure with multilayer passivation |
US5763905A (en) * | 1996-07-09 | 1998-06-09 | Abb Research Ltd. | Semiconductor device having a passivation layer |
US6891202B2 (en) * | 2001-12-14 | 2005-05-10 | Infinera Corporation | Oxygen-doped Al-containing current blocking layers in active semiconductor devices |
DE102020001835A1 (de) * | 2020-03-20 | 2021-09-23 | Azur Space Solar Power Gmbh | Stapelförmige hochsperrende lll-V-Halbleiterleistungsdiode |
DE102020001838A1 (de) * | 2020-03-20 | 2021-09-23 | Azur Space Solar Power Gmbh | Stapelförmige hochsperrende lll-V-Halbleiterleistungsdiode |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2266301A1 (fr) * | 1974-03-30 | 1975-10-24 | Sony Corp |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2789258A (en) * | 1955-06-29 | 1957-04-16 | Raytheon Mfg Co | Intrinsic coatings for semiconductor junctions |
DE1184178B (de) * | 1960-02-20 | 1964-12-23 | Standard Elektrik Lorenz Ag | Verfahren zum Stabilisieren der Oberflaeche von Halbleiterkoerpern mit pn-UEbergaengen durch Vakuumbedampfen |
JPS501513B1 (fr) * | 1968-12-11 | 1975-01-18 | ||
JPS5541025B2 (fr) * | 1972-12-20 | 1980-10-21 | ||
JPS523277B2 (fr) * | 1973-05-19 | 1977-01-27 | ||
JPS5024592A (fr) * | 1973-07-05 | 1975-03-15 | ||
JPS5513426B2 (fr) * | 1974-06-18 | 1980-04-09 |
-
1975
- 1975-12-19 FR FR7539046A patent/FR2335951A1/fr active Granted
-
1976
- 1976-12-07 DE DE2655341A patent/DE2655341C2/de not_active Expired
- 1976-12-08 US US05/748,697 patent/US4086613A/en not_active Expired - Lifetime
- 1976-12-15 NL NL7613893A patent/NL7613893A/xx not_active Application Discontinuation
- 1976-12-16 IT IT30508/76A patent/IT1068031B/it active
- 1976-12-16 GB GB52548/76A patent/GB1565990A/en not_active Expired
- 1976-12-16 JP JP51150399A patent/JPS5948539B2/ja not_active Expired
- 1976-12-20 CA CA268,288A patent/CA1069620A/fr not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2266301A1 (fr) * | 1974-03-30 | 1975-10-24 | Sony Corp |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2459551A1 (fr) * | 1979-06-19 | 1981-01-09 | Thomson Csf | Procede et structure de passivation a autoalignement sur l'emplacement d'un masque |
FR2477771A1 (fr) * | 1980-03-07 | 1981-09-11 | Philips Nv | Procede pour la realisation d'un dispositif semiconducteur a haute tension de blocage et dispositif semiconducteur ainsi realise |
FR2487576A1 (fr) * | 1980-07-24 | 1982-01-29 | Thomson Csf | Procede de fabrication de diodes mesa glassivees |
Also Published As
Publication number | Publication date |
---|---|
IT1068031B (it) | 1985-03-21 |
DE2655341A1 (de) | 1977-06-30 |
FR2335951B1 (fr) | 1978-07-13 |
GB1565990A (en) | 1980-04-30 |
JPS5948539B2 (ja) | 1984-11-27 |
US4086613A (en) | 1978-04-25 |
JPS5279661A (en) | 1977-07-04 |
NL7613893A (nl) | 1977-06-21 |
CA1069620A (fr) | 1980-01-08 |
DE2655341C2 (de) | 1984-01-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CA | Change of address | ||
CD | Change of name or company name | ||
ST | Notification of lapse |