FR2349955A1 - Procede pour la fabrication d'un dispositif semi-conducteur, et dispositif semi-conducteur fabrique de la sorte - Google Patents
Procede pour la fabrication d'un dispositif semi-conducteur, et dispositif semi-conducteur fabrique de la sorteInfo
- Publication number
- FR2349955A1 FR2349955A1 FR7712719A FR7712719A FR2349955A1 FR 2349955 A1 FR2349955 A1 FR 2349955A1 FR 7712719 A FR7712719 A FR 7712719A FR 7712719 A FR7712719 A FR 7712719A FR 2349955 A1 FR2349955 A1 FR 2349955A1
- Authority
- FR
- France
- Prior art keywords
- semiconductor device
- manufacture
- device manufactured
- manufactured
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0804—Emitter regions of bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
- H01L21/2256—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides through the applied layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2257—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer being silicon or silicide or SIPOS, e.g. polysilicon, porous silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/02—Contacts, special
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7604445A NL7604445A (nl) | 1976-04-27 | 1976-04-27 | Werkwijze ter vervaardiging van een halfgelei- derinrichting, en inrichting vervaardigd door toepassing van de werkwijze. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2349955A1 true FR2349955A1 (fr) | 1977-11-25 |
FR2349955B1 FR2349955B1 (fr) | 1983-06-17 |
Family
ID=19826076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7712719A Granted FR2349955A1 (fr) | 1976-04-27 | 1977-04-27 | Procede pour la fabrication d'un dispositif semi-conducteur, et dispositif semi-conducteur fabrique de la sorte |
Country Status (8)
Country | Link |
---|---|
US (1) | US4151006A (fr) |
JP (1) | JPS52139386A (fr) |
CA (1) | CA1085061A (fr) |
DE (1) | DE2718449A1 (fr) |
FR (1) | FR2349955A1 (fr) |
GB (1) | GB1522291A (fr) |
IT (1) | IT1078440B (fr) |
NL (1) | NL7604445A (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7810549A (nl) * | 1978-10-23 | 1980-04-25 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleider- inrichting. |
US4228452A (en) * | 1979-05-02 | 1980-10-14 | Eastman Kodak Company | Silicon device with uniformly thick polysilicon |
US4452645A (en) * | 1979-11-13 | 1984-06-05 | International Business Machines Corporation | Method of making emitter regions by implantation through a non-monocrystalline layer |
DE3064143D1 (en) * | 1979-12-03 | 1983-08-18 | Ibm | Process for producing a vertical pnp transistor and transistor so produced |
US4534806A (en) * | 1979-12-03 | 1985-08-13 | International Business Machines Corporation | Method for manufacturing vertical PNP transistor with shallow emitter |
US4301588A (en) * | 1980-02-01 | 1981-11-24 | International Business Machines Corporation | Consumable amorphous or polysilicon emitter process |
US4380774A (en) * | 1980-12-19 | 1983-04-19 | The United States Of America As Represented By The Secretary Of The Navy | High-performance bipolar microwave transistor |
US4633287A (en) * | 1982-08-09 | 1986-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor photoelectric conversion device |
US4713355A (en) * | 1984-04-16 | 1987-12-15 | Trw Inc. | Bipolar transistor construction |
US4604150A (en) * | 1985-01-25 | 1986-08-05 | At&T Bell Laboratories | Controlled boron doping of silicon |
USRE35642E (en) * | 1987-12-22 | 1997-10-28 | Sgs-Thomson Microelectronics, S.R.L. | Integrated high-voltage bipolar power transistor and low voltage MOS power transistor structure in the emitter switching configuration and relative manufacturing process |
IT1217323B (it) * | 1987-12-22 | 1990-03-22 | Sgs Microelettronica Spa | Struttura integrata di transistor bipolare di potenza di alta tensione e di transistor mos di potenza di bassa tensione nella configurazione"emitter switching"e relativo processo di fabbricazione |
US5008208A (en) * | 1988-12-07 | 1991-04-16 | Honeywell Inc. | Method of making planarized, self-aligned bipolar integrated circuits |
US5028973A (en) * | 1989-06-19 | 1991-07-02 | Harris Corporation | Bipolar transistor with high efficient emitter |
US5296047A (en) * | 1992-01-28 | 1994-03-22 | Hewlett-Packard Co. | Epitaxial silicon starting material |
US5324684A (en) * | 1992-02-25 | 1994-06-28 | Ag Processing Technologies, Inc. | Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure |
US5989962A (en) * | 1997-09-26 | 1999-11-23 | Texas Instruments Incorporated | Semiconductor device having dual gate and method of formation |
US7482642B2 (en) * | 2005-03-11 | 2009-01-27 | Lsi Corporation | Bipolar transistors having controllable temperature coefficient of current gain |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3847687A (en) * | 1972-11-15 | 1974-11-12 | Motorola Inc | Methods of forming self aligned transistor structure having polycrystalline contacts |
FR2267641A1 (fr) * | 1974-04-10 | 1975-11-07 | Sony Corp | |
FR2275881A1 (fr) * | 1974-06-21 | 1976-01-16 | Siemens Ag | Procede pour former une zone dopee presentant un type donne de conductivite dans un corps semi-conducteur |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536547A (en) * | 1968-03-25 | 1970-10-27 | Bell Telephone Labor Inc | Plasma deposition of oxide coatings on silicon and electron bombardment of portions thereof to be etched selectively |
US3775191A (en) * | 1971-06-28 | 1973-11-27 | Bell Canada Northern Electric | Modification of channel regions in insulated gate field effect transistors |
US4032957A (en) * | 1972-12-29 | 1977-06-28 | Sony Corporation | Semiconductor device |
US4032956A (en) * | 1972-12-29 | 1977-06-28 | Sony Corporation | Transistor circuit |
US4027324A (en) * | 1972-12-29 | 1977-05-31 | Sony Corporation | Bidirectional transistor |
US4007474A (en) * | 1972-12-29 | 1977-02-08 | Sony Corporation | Transistor having an emitter with a low impurity concentration portion and a high impurity concentration portion |
US4028155A (en) * | 1974-02-28 | 1977-06-07 | Lfe Corporation | Process and material for manufacturing thin film integrated circuits |
JPS50137478A (fr) * | 1974-04-18 | 1975-10-31 | ||
DE2449688C3 (de) * | 1974-10-18 | 1980-07-10 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur Herstellung einer dotierten Zone eines Leitfähigkeitstyps in einem Halbleiterkörper |
-
1976
- 1976-04-27 NL NL7604445A patent/NL7604445A/xx not_active Application Discontinuation
-
1977
- 1977-04-19 US US05/788,732 patent/US4151006A/en not_active Expired - Lifetime
- 1977-04-22 IT IT22780/77A patent/IT1078440B/it active
- 1977-04-22 GB GB16818/77A patent/GB1522291A/en not_active Expired
- 1977-04-26 JP JP4749577A patent/JPS52139386A/ja active Granted
- 1977-04-26 DE DE19772718449 patent/DE2718449A1/de active Granted
- 1977-04-26 CA CA277,047A patent/CA1085061A/fr not_active Expired
- 1977-04-27 FR FR7712719A patent/FR2349955A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3847687A (en) * | 1972-11-15 | 1974-11-12 | Motorola Inc | Methods of forming self aligned transistor structure having polycrystalline contacts |
FR2267641A1 (fr) * | 1974-04-10 | 1975-11-07 | Sony Corp | |
FR2275881A1 (fr) * | 1974-06-21 | 1976-01-16 | Siemens Ag | Procede pour former une zone dopee presentant un type donne de conductivite dans un corps semi-conducteur |
Also Published As
Publication number | Publication date |
---|---|
FR2349955B1 (fr) | 1983-06-17 |
US4151006A (en) | 1979-04-24 |
IT1078440B (it) | 1985-05-08 |
GB1522291A (en) | 1978-08-23 |
JPS52139386A (en) | 1977-11-21 |
JPS6112388B2 (fr) | 1986-04-08 |
DE2718449C2 (fr) | 1987-11-26 |
NL7604445A (nl) | 1977-10-31 |
CA1085061A (fr) | 1980-09-02 |
DE2718449A1 (de) | 1977-11-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |