FR2323774A1 - Dispositif pour l'application de revetements par vaporisation ionique - Google Patents
Dispositif pour l'application de revetements par vaporisation ioniqueInfo
- Publication number
- FR2323774A1 FR2323774A1 FR7528258A FR7528258A FR2323774A1 FR 2323774 A1 FR2323774 A1 FR 2323774A1 FR 7528258 A FR7528258 A FR 7528258A FR 7528258 A FR7528258 A FR 7528258A FR 2323774 A1 FR2323774 A1 FR 2323774A1
- Authority
- FR
- France
- Prior art keywords
- cathodes
- anode
- pairs
- ion sputtering
- vacuum deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7528258A FR2323774A1 (fr) | 1975-09-15 | 1975-09-15 | Dispositif pour l'application de revetements par vaporisation ionique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7528258A FR2323774A1 (fr) | 1975-09-15 | 1975-09-15 | Dispositif pour l'application de revetements par vaporisation ionique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2323774A1 true FR2323774A1 (fr) | 1977-04-08 |
FR2323774B1 FR2323774B1 (fr) | 1978-12-08 |
Family
ID=9159998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7528258A Granted FR2323774A1 (fr) | 1975-09-15 | 1975-09-15 | Dispositif pour l'application de revetements par vaporisation ionique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2323774A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2490399A1 (fr) * | 1980-09-15 | 1982-03-19 | Vac Tec Syst | Procede et appareil pour la pulverisation ou vaporisation utilisant une source d'ions amelioree |
-
1975
- 1975-09-15 FR FR7528258A patent/FR2323774A1/fr active Granted
Non-Patent Citations (1)
Title |
---|
NEANT * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2490399A1 (fr) * | 1980-09-15 | 1982-03-19 | Vac Tec Syst | Procede et appareil pour la pulverisation ou vaporisation utilisant une source d'ions amelioree |
Also Published As
Publication number | Publication date |
---|---|
FR2323774B1 (fr) | 1978-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |