FR2323774A1 - Dispositif pour l'application de revetements par vaporisation ionique - Google Patents

Dispositif pour l'application de revetements par vaporisation ionique

Info

Publication number
FR2323774A1
FR2323774A1 FR7528258A FR7528258A FR2323774A1 FR 2323774 A1 FR2323774 A1 FR 2323774A1 FR 7528258 A FR7528258 A FR 7528258A FR 7528258 A FR7528258 A FR 7528258A FR 2323774 A1 FR2323774 A1 FR 2323774A1
Authority
FR
France
Prior art keywords
cathodes
anode
pairs
ion sputtering
vacuum deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7528258A
Other languages
English (en)
Other versions
FR2323774B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GOLYANOV VYACHESLAV
Original Assignee
GOLYANOV VYACHESLAV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GOLYANOV VYACHESLAV filed Critical GOLYANOV VYACHESLAV
Priority to FR7528258A priority Critical patent/FR2323774A1/fr
Publication of FR2323774A1 publication Critical patent/FR2323774A1/fr
Application granted granted Critical
Publication of FR2323774B1 publication Critical patent/FR2323774B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7528258A 1975-09-15 1975-09-15 Dispositif pour l'application de revetements par vaporisation ionique Granted FR2323774A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7528258A FR2323774A1 (fr) 1975-09-15 1975-09-15 Dispositif pour l'application de revetements par vaporisation ionique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7528258A FR2323774A1 (fr) 1975-09-15 1975-09-15 Dispositif pour l'application de revetements par vaporisation ionique

Publications (2)

Publication Number Publication Date
FR2323774A1 true FR2323774A1 (fr) 1977-04-08
FR2323774B1 FR2323774B1 (fr) 1978-12-08

Family

ID=9159998

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7528258A Granted FR2323774A1 (fr) 1975-09-15 1975-09-15 Dispositif pour l'application de revetements par vaporisation ionique

Country Status (1)

Country Link
FR (1) FR2323774A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490399A1 (fr) * 1980-09-15 1982-03-19 Vac Tec Syst Procede et appareil pour la pulverisation ou vaporisation utilisant une source d'ions amelioree

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490399A1 (fr) * 1980-09-15 1982-03-19 Vac Tec Syst Procede et appareil pour la pulverisation ou vaporisation utilisant une source d'ions amelioree

Also Published As

Publication number Publication date
FR2323774B1 (fr) 1978-12-08

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Legal Events

Date Code Title Description
ST Notification of lapse