GB949219A - Improvements in or relating to ion pumps - Google Patents

Improvements in or relating to ion pumps

Info

Publication number
GB949219A
GB949219A GB18430/60A GB1843060A GB949219A GB 949219 A GB949219 A GB 949219A GB 18430/60 A GB18430/60 A GB 18430/60A GB 1843060 A GB1843060 A GB 1843060A GB 949219 A GB949219 A GB 949219A
Authority
GB
United Kingdom
Prior art keywords
collector electrode
anode
replacement material
source
cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB18430/60A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consolidated Vacuum Corp
Original Assignee
Consolidated Vacuum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consolidated Vacuum Corp filed Critical Consolidated Vacuum Corp
Publication of GB949219A publication Critical patent/GB949219A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Inert Electrodes (AREA)

Abstract

949,219. Cold cathode tubes. CONSOLIDATED VACUUM CORPORATION. May 25, 1960 [May 25, 1959], No. 18430/60. Heading H1D. A cold-discharge ion pump comprises a collector electrode 51, a cellular anode 52 spaced from the collector electrode and composed of a plurality of anode cells having openings facing the collector electrode, a source 56 of replacement material positioned to deposit particles of replacement material on the collector electrode, and means for establishing an electric discharge in the space between the anode and the collector electrode. It is stated that the replacement material serves to bury gas atoms or ions trapped in the collector electrode by supplying a constantly renewed surface layer on the collector. The replacement material is deposited by either cathode sputtering, the source 56 preferably being cellular with nine cells to every one cell of the anode as shown or the material is evaporated from two filaments, in both cases the source 56 is disposed between the anode and the collector electrode. Alternatively, the collector electrode is disposed between the anode and a plate-like member forming the source, the collector electrode having apertures in alignment with the anode cells. The replacement material and the collector electrode may be of titanium or stainless steel. An axial magnetic is preferably provided. Specification 768,003 is referred to.
GB18430/60A 1959-05-25 1960-05-25 Improvements in or relating to ion pumps Expired GB949219A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81535259A 1959-05-25 1959-05-25
US32772563A 1963-12-03 1963-12-03

Publications (1)

Publication Number Publication Date
GB949219A true GB949219A (en) 1964-02-12

Family

ID=26986030

Family Applications (1)

Application Number Title Priority Date Filing Date
GB18430/60A Expired GB949219A (en) 1959-05-25 1960-05-25 Improvements in or relating to ion pumps

Country Status (4)

Country Link
US (2) US3535055A (en)
DE (2) DE1107368B (en)
GB (1) GB949219A (en)
NL (1) NL251847A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3228590A (en) * 1964-01-02 1966-01-11 Gen Electric Triode ionic pump

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3684401A (en) * 1970-11-17 1972-08-15 Westinghouse Electric Corp Cathode-getter materials for sputter-ion pumps
US3746474A (en) * 1971-04-02 1973-07-17 W Lloyd Ionic vacuum pump
JPS59123152A (en) * 1982-12-28 1984-07-16 Hajime Ishimaru Ion pump
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10049864B2 (en) * 2017-01-12 2018-08-14 Upendra D Desai Metallic glow discharge diode and triode devices with large cold cathode as efficient charger generator—a power cell
WO2019226142A1 (en) * 2018-05-21 2019-11-28 Desai Upendra D Metallic glow discharge diode and triode devices with large cold cathode as efficient charge generator - a power cell

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
DE1046249B (en) * 1956-04-05 1958-12-11 Dr Gerhard Fricke Method and device for generating a high vacuum
DE1052053B (en) * 1958-04-11 1959-03-05 Leybolds Nachfolger E Method and device for extending the uninterrupted service life of getter pumps for high vacuum generation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3228590A (en) * 1964-01-02 1966-01-11 Gen Electric Triode ionic pump

Also Published As

Publication number Publication date
US3535055A (en) 1970-10-20
DE1107368B (en) 1961-05-25
US3535054A (en) 1970-10-20
DE1104111B (en) 1961-04-06
NL251847A (en)

Similar Documents

Publication Publication Date Title
GB1420061A (en) Sputtering method and apparatus
DE3663689D1 (en) Improved electric arc vapor deposition method
GB1311042A (en) Rf sputtering apparatus
GB949219A (en) Improvements in or relating to ion pumps
GB1132867A (en) Improvements in or relating to apparatus for depositing thin films
JPH01168862A (en) Apparatus and method for especially producing glass sheet for adhesion of membrane to transparent support
ES378259A1 (en) Ion source having a uniform radial density
US3198422A (en) Vacuum sputtering pump
GB1134231A (en) Improvements in or relating to ion vacuum pumps
GB1105726A (en) Ionisation vacuum pump
US3228590A (en) Triode ionic pump
US3107844A (en) Single cell vacuum apparatus
GB1140798A (en) Improvements in and relating to high vacuum pumps
GB924918A (en) Electrical vacuum pump apparatus
JPS5538919A (en) Sputtering apparatus
US3332606A (en) Penning type vacuum pumps
US3601503A (en) Thin membrane ionization pump apparatus
GB1049125A (en) Ion pump
JPS57210551A (en) Triple-pole type ion pump
GB1134562A (en) Methods of preventing localised arcing within the evacuated chamber of electrical discharge apparatus
GB1061453A (en) Hollow gas arc discharge
US3398879A (en) Asymmetric ion pump and method
US3353054A (en) Penning type vacuum pumps
GB1181502A (en) Polymerising by Electrical Discharge.
US3713754A (en) Vacuum pumps