FI874942A0 - Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. - Google Patents

Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Info

Publication number
FI874942A0
FI874942A0 FI874942A FI874942A FI874942A0 FI 874942 A0 FI874942 A0 FI 874942A0 FI 874942 A FI874942 A FI 874942A FI 874942 A FI874942 A FI 874942A FI 874942 A0 FI874942 A0 FI 874942A0
Authority
FI
Finland
Prior art keywords
kapacitiv
accelerationsgivare
foerfarande foer
foer framstaellning
och foerfarande
Prior art date
Application number
FI874942A
Other languages
English (en)
Other versions
FI81915C (fi
FI81915B (fi
FI874942A (fi
Inventor
Ari Lehto
Kalervo Jaeppinen
Anna-Maija Kaerkkaeinen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI874942A0 publication Critical patent/FI874942A0/fi
Priority to FI874942A priority Critical patent/FI81915C/fi
Priority to FR888814564A priority patent/FR2622975B1/fr
Priority to SE8804039A priority patent/SE468067B/sv
Priority to IT48532/88A priority patent/IT1224301B/it
Priority to DE3837883A priority patent/DE3837883A1/de
Priority to ES8803392A priority patent/ES2012420A6/es
Priority to KR1019880014655A priority patent/KR890008569A/ko
Priority to CN88107822A priority patent/CN1022136C/zh
Priority to JP63283533A priority patent/JPH01259265A/ja
Priority to GB8826263A priority patent/GB2212274A/en
Publication of FI874942A publication Critical patent/FI874942A/fi
Application granted granted Critical
Publication of FI81915B publication Critical patent/FI81915B/fi
Publication of FI81915C publication Critical patent/FI81915C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FI874942A 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. FI81915C (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
SE8804039A SE468067B (sv) 1987-11-09 1988-11-08 Kapacitiv accelerometer och saett foer tillverkning av denna
FR888814564A FR2622975B1 (fr) 1987-11-09 1988-11-08 Accelerometre capacitif et son procede de fabrication
IT48532/88A IT1224301B (it) 1987-11-09 1988-11-08 Accelerometro capacitivo e metodo per produrlo
DE3837883A DE3837883A1 (de) 1987-11-09 1988-11-08 Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung
ES8803392A ES2012420A6 (es) 1987-11-09 1988-11-08 Acelerometro capacitivo y metodo de fabricacion del mismo.
KR1019880014655A KR890008569A (ko) 1987-11-09 1988-11-08 용량성 가속도계 및 그 제조방법
CN88107822A CN1022136C (zh) 1987-11-09 1988-11-09 容性加速度计及其制造方法
JP63283533A JPH01259265A (ja) 1987-11-09 1988-11-09 キャパシチブ加速度計およびその製造方法
GB8826263A GB2212274A (en) 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI874942 1987-11-09
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Publications (4)

Publication Number Publication Date
FI874942A0 true FI874942A0 (fi) 1987-11-09
FI874942A FI874942A (fi) 1989-05-10
FI81915B FI81915B (fi) 1990-08-31
FI81915C FI81915C (fi) 1990-12-10

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
FI874942A FI81915C (fi) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.

Country Status (10)

Country Link
JP (1) JPH01259265A (fi)
KR (1) KR890008569A (fi)
CN (1) CN1022136C (fi)
DE (1) DE3837883A1 (fi)
ES (1) ES2012420A6 (fi)
FI (1) FI81915C (fi)
FR (1) FR2622975B1 (fi)
GB (1) GB2212274A (fi)
IT (1) IT1224301B (fi)
SE (1) SE468067B (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106841683A (zh) * 2017-04-06 2017-06-13 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (fi) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
EP1994363A1 (de) 2006-03-10 2008-11-26 Contitemic Microelectronic GmbH Mikromechanischer drehratensensor
EP2259018B1 (en) * 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
WO2013165348A1 (en) * 2012-04-30 2013-11-07 Hewlett-Packard Development Company Control signal based on a command tapped by a user
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿***

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106841683A (zh) * 2017-04-06 2017-06-13 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法
CN106841683B (zh) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法

Also Published As

Publication number Publication date
SE8804039D0 (sv) 1988-11-08
FR2622975B1 (fr) 1991-07-12
ES2012420A6 (es) 1990-03-16
CN1033110A (zh) 1989-05-24
FI81915C (fi) 1990-12-10
SE468067B (sv) 1992-10-26
JPH01259265A (ja) 1989-10-16
CN1022136C (zh) 1993-09-15
GB2212274A (en) 1989-07-19
FI81915B (fi) 1990-08-31
KR890008569A (ko) 1989-07-12
IT1224301B (it) 1990-10-04
FR2622975A1 (fr) 1989-05-12
IT8848532A0 (it) 1988-11-08
FI874942A (fi) 1989-05-10
GB8826263D0 (en) 1988-12-14
DE3837883A1 (de) 1989-05-18

Similar Documents

Publication Publication Date Title
FI874942A0 (fi) Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
FI86238B (fi) Televisionsapparat och televisionsapparats effektkaella.
FI870983A0 (fi) Flaensad aendfog och en daeri tillaemplig flaens.
FI881308A (fi) Dietpreparat och foerfarande foer framstaellning daerav.
FI874793A0 (fi) Glasdoerr och gaongjaernskonstruktion.
FI880605A0 (fi) Polyesterfiberfyllmedel och foerfarande foer framstaellning daerav.
FI881410A (fi) 4-fenylpiperidinfoereningar och deras framstaellning och anvaendning.
FI874150A0 (fi) Flerfunktionspress och foerfarande foer exploatering daerav.
FI880402A0 (fi) Foerfarande och extrusionshuvud.
FI880895A (fi) Piperazinderivat och foerfarande foer framstaellning daerav.
FI880581A (fi) Arylamider av -hexametylen-imino -karboxylsyror och deras hydroklorider.
FI871073A0 (fi) Rullpall och foerpackningslinje.
FI871552A0 (fi) Dryckesburk foer engaongsbruk och aemnen foer framstaellning daerav.
FI875647A0 (fi) Gatukantsten och foerfarande foer framstaellning daerav.
FI870605A0 (fi) Tryckgivarfiber och foerfarande foer framstaellning daerav.
FI870594A0 (fi) Foensterramkonstruktion foer fasadglaselement och liknande.
FI870463A0 (fi) Uppvaermnings och ventilationssystem foer grissektioner.
FI870405A0 (fi) Foerfarande och anordning foer svetsning.
FI875784A0 (fi) Hinderidentifierare foer fordon och liknande.
FI875006A0 (fi) Spaennfoerfarande och konstruktions- tekniska tillaempningar daerav.
FI875493A0 (fi) Odlings- och faongstanordning foer kraeftor och fiskar.
FI871330A0 (fi) Elektro-optiskt inducerad ljusvaogledare och en dylik vaogledare omfattande aktiveringsanordning.
FI871972A0 (fi) Foerfarande och utrustning foer upphaengning.
FI871374A0 (fi) Anordning och foerfarande foer vaetskepumpning.
FI871460A0 (fi) Foerfarande och anordning foer vaermevaexling.

Legal Events

Date Code Title Description
FG Patent granted

Owner name: VAISALA OY

MA Patent expired