GB8826263D0 - Capacitive accelerometer & fabrication method - Google Patents

Capacitive accelerometer & fabrication method

Info

Publication number
GB8826263D0
GB8826263D0 GB888826263A GB8826263A GB8826263D0 GB 8826263 D0 GB8826263 D0 GB 8826263D0 GB 888826263 A GB888826263 A GB 888826263A GB 8826263 A GB8826263 A GB 8826263A GB 8826263 D0 GB8826263 D0 GB 8826263D0
Authority
GB
United Kingdom
Prior art keywords
fabrication method
capacitive accelerometer
accelerometer
capacitive
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB888826263A
Other versions
GB2212274A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of GB8826263D0 publication Critical patent/GB8826263D0/en
Publication of GB2212274A publication Critical patent/GB2212274A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
GB8826263A 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method Withdrawn GB2212274A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (en) 1987-11-09 1987-11-09 KAPACITIV ACCELERATIONSGIVARE OCH FOERFARANDE FOER FRAMSTAELLNING DAERAV.

Publications (2)

Publication Number Publication Date
GB8826263D0 true GB8826263D0 (en) 1988-12-14
GB2212274A GB2212274A (en) 1989-07-19

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8826263A Withdrawn GB2212274A (en) 1987-11-09 1988-11-09 Capacitive accelerometer and its fabrication method

Country Status (10)

Country Link
JP (1) JPH01259265A (en)
KR (1) KR890008569A (en)
CN (1) CN1022136C (en)
DE (1) DE3837883A1 (en)
ES (1) ES2012420A6 (en)
FI (1) FI81915C (en)
FR (1) FR2622975B1 (en)
GB (1) GB2212274A (en)
IT (1) IT1224301B (en)
SE (1) SE468067B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106771361A (en) * 2016-12-15 2017-05-31 西安邮电大学 Double-capacitor micro-mechanical acceleration transducer and the temperature self-compensation system based on it

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (en) * 1988-11-15 1994-03-30 株式会社日立製作所 Capacitance type acceleration sensor and semiconductor pressure sensor
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (en) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd Semiconductor acceleration sensor
DE4000903C1 (en) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (en) * 1990-09-07 1998-08-13 株式会社日立製作所 Semiconductor capacitive acceleration sensor and method of manufacturing the same
DE4222472C2 (en) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Acceleration sensor
JP2533272B2 (en) * 1992-11-17 1996-09-11 住友電気工業株式会社 Method for manufacturing semiconductor device
FR2698447B1 (en) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Micro-machined measuring cell.
DE10117630B4 (en) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
EP1243930A1 (en) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Micromechanical capacitive accelerometer
DE10111149B4 (en) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
DE10117257A1 (en) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Micromechanical capacitive acceleration sensor
JP2005077349A (en) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp Acceleration sensor
WO2007104289A1 (en) 2006-03-10 2007-09-20 Conti Temic Microelectronic Gmbh Micromechanical rotational speed sensor
EP2259018B1 (en) 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
DE112012005609T5 (en) * 2012-04-30 2014-09-25 Hewlett-Packard Development Company, L.P. Control signal based on a user-tapped command
CN106841683B (en) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 Quartz pendulum accelerometer and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (en) * 1981-07-02 1984-04-13 Centre Electron Horloger ACCELEROMETER.
JPS6197572A (en) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd Manufacture of semiconductor acceleration sensor
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (en) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm CAPACITIVE ACCELERATION SENSOR
DE3703793A1 (en) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detector element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106771361A (en) * 2016-12-15 2017-05-31 西安邮电大学 Double-capacitor micro-mechanical acceleration transducer and the temperature self-compensation system based on it
CN106771361B (en) * 2016-12-15 2023-04-25 西安邮电大学 Double-capacitance type micro-mechanical acceleration sensor and temperature self-compensation system based on same

Also Published As

Publication number Publication date
FR2622975B1 (en) 1991-07-12
SE468067B (en) 1992-10-26
JPH01259265A (en) 1989-10-16
SE8804039D0 (en) 1988-11-08
IT8848532A0 (en) 1988-11-08
ES2012420A6 (en) 1990-03-16
KR890008569A (en) 1989-07-12
FI874942A0 (en) 1987-11-09
CN1022136C (en) 1993-09-15
CN1033110A (en) 1989-05-24
GB2212274A (en) 1989-07-19
IT1224301B (en) 1990-10-04
FI81915C (en) 1990-12-10
FI81915B (en) 1990-08-31
DE3837883A1 (en) 1989-05-18
FR2622975A1 (en) 1989-05-12
FI874942A (en) 1989-05-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)