FI20175411A - A method and a control system for controlling a vacuum pump - Google Patents
A method and a control system for controlling a vacuum pumpInfo
- Publication number
- FI20175411A FI20175411A FI20175411A FI20175411A FI20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A FI 20175411 A FI20175411 A FI 20175411A
- Authority
- FI
- Finland
- Prior art keywords
- vacuum pump
- controlling
- estimate
- speed
- rotational speed
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0261—Surge control by varying driving speed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/50—Correcting or compensating means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B17/00—Systems involving the use of models or simulators of said systems
- G05B17/02—Systems involving the use of models or simulators of said systems electric
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P11/00—Arrangements for controlling dynamo-electric converters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Computer Hardware Design (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A method for controlling a vacuum pump comprises: measuring (101) inlet pressure of the vacuum pump, determining (102) an estimate for theoretical suction speed based on data indicative of rotational speed of the vacuum pump and data indicative of the theoretical suction speed at a predetermined rotational speed, determining (103) an estimate for leak flow from the outlet of the vacuum pump back to the inlet of the vacuum pump based on the measured inlet pressure, determining (104) a difference between the estimates of the theoretical suction speed and the leak flow so as to obtain an estimate for suction speed of the vacuum pump, and controlling (105) the rotational speed of the vacuum pump based at least partly on the estimate of the suction speed. The rotational speed can be controlled for example so that the efficiency of a vacuum pump is maximized.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20175411A FI20175411A (en) | 2017-05-08 | 2017-05-08 | A method and a control system for controlling a vacuum pump |
PCT/FI2018/050321 WO2018206843A1 (en) | 2017-05-08 | 2018-05-03 | A method and a control system for controlling a vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20175411A FI20175411A (en) | 2017-05-08 | 2017-05-08 | A method and a control system for controlling a vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
FI20175411A true FI20175411A (en) | 2018-11-09 |
Family
ID=62186495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20175411A FI20175411A (en) | 2017-05-08 | 2017-05-08 | A method and a control system for controlling a vacuum pump |
Country Status (2)
Country | Link |
---|---|
FI (1) | FI20175411A (en) |
WO (1) | WO2018206843A1 (en) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0282000A (en) * | 1988-09-20 | 1990-03-22 | Nippon Ferrofluidics Kk | Operational condition detecting method for turbo molecular pump |
JP2009074512A (en) * | 2007-09-25 | 2009-04-09 | Shimadzu Corp | Turbo-molecular pump |
JP6050081B2 (en) * | 2012-10-05 | 2016-12-21 | 株式会社荏原製作所 | Dry vacuum pump device |
-
2017
- 2017-05-08 FI FI20175411A patent/FI20175411A/en not_active IP Right Cessation
-
2018
- 2018-05-03 WO PCT/FI2018/050321 patent/WO2018206843A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2018206843A1 (en) | 2018-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM | Patent lapsed |