FI20045482A0 - Matalamman dislokaatiotiheyden omaava puolijohdesubstraatti, ja menetelmä sen valmistamiseksi - Google Patents
Matalamman dislokaatiotiheyden omaava puolijohdesubstraatti, ja menetelmä sen valmistamiseksiInfo
- Publication number
- FI20045482A0 FI20045482A0 FI20045482A FI20045482A FI20045482A0 FI 20045482 A0 FI20045482 A0 FI 20045482A0 FI 20045482 A FI20045482 A FI 20045482A FI 20045482 A FI20045482 A FI 20045482A FI 20045482 A0 FI20045482 A0 FI 20045482A0
- Authority
- FI
- Finland
- Prior art keywords
- preparation
- semiconductor substrate
- dislocation density
- lower dislocation
- density
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20045482A FI20045482A0 (fi) | 2004-12-14 | 2004-12-14 | Matalamman dislokaatiotiheyden omaava puolijohdesubstraatti, ja menetelmä sen valmistamiseksi |
RU2007126749/28A RU2368030C2 (ru) | 2004-12-14 | 2005-05-19 | Полупроводниковая подложка, полупроводниковое устройство и способ получения полупроводниковой подложки |
PCT/FI2005/000233 WO2006064081A1 (en) | 2004-12-14 | 2005-05-19 | Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate |
US11/792,687 US20080308841A1 (en) | 2004-12-14 | 2005-05-19 | Semiconductor Substrate, Semiconductor Device and Method of Manufacturing a Semiconductor Substrate |
KR1020077015679A KR101159156B1 (ko) | 2004-12-14 | 2005-05-19 | 반도체 기판, 반도체 장치 및 반도체 기판의 제조 방법 |
EP05742487A EP1834349A1 (en) | 2004-12-14 | 2005-05-19 | Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate |
CNB2005800429707A CN100487865C (zh) | 2004-12-14 | 2005-05-19 | 半导体衬底、半导体器件和制造半导体衬底的方法 |
JP2007546092A JP2008523635A (ja) | 2004-12-14 | 2005-05-19 | 半導体基板、半導体装置、および半導体基板の製造方法 |
TW094143517A TW200639926A (en) | 2004-12-14 | 2005-12-09 | Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate |
HK08105914.4A HK1111264A1 (en) | 2004-12-14 | 2008-05-28 | Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate |
US13/211,627 US20120064700A1 (en) | 2004-12-14 | 2011-08-17 | Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20045482A FI20045482A0 (fi) | 2004-12-14 | 2004-12-14 | Matalamman dislokaatiotiheyden omaava puolijohdesubstraatti, ja menetelmä sen valmistamiseksi |
Publications (1)
Publication Number | Publication Date |
---|---|
FI20045482A0 true FI20045482A0 (fi) | 2004-12-14 |
Family
ID=33548081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20045482A FI20045482A0 (fi) | 2004-12-14 | 2004-12-14 | Matalamman dislokaatiotiheyden omaava puolijohdesubstraatti, ja menetelmä sen valmistamiseksi |
Country Status (10)
Country | Link |
---|---|
US (2) | US20080308841A1 (fi) |
EP (1) | EP1834349A1 (fi) |
JP (1) | JP2008523635A (fi) |
KR (1) | KR101159156B1 (fi) |
CN (1) | CN100487865C (fi) |
FI (1) | FI20045482A0 (fi) |
HK (1) | HK1111264A1 (fi) |
RU (1) | RU2368030C2 (fi) |
TW (1) | TW200639926A (fi) |
WO (1) | WO2006064081A1 (fi) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101743618B (zh) * | 2007-07-26 | 2012-11-21 | 硅绝缘体技术有限公司 | 外延方法和通过该方法生长的模板 |
US7732306B2 (en) * | 2007-07-26 | 2010-06-08 | S.O.I.Tec Silicon On Insulator Technologies | Methods for producing improved epitaxial materials |
JP5749888B2 (ja) * | 2010-01-18 | 2015-07-15 | 住友電気工業株式会社 | 半導体素子及び半導体素子を作製する方法 |
JP6090998B2 (ja) * | 2013-01-31 | 2017-03-08 | 一般財団法人電力中央研究所 | 六方晶単結晶の製造方法、六方晶単結晶ウエハの製造方法 |
US9564494B1 (en) * | 2015-11-18 | 2017-02-07 | International Business Machines Corporation | Enhanced defect reduction for heteroepitaxy by seed shape engineering |
JP2017178769A (ja) * | 2016-03-22 | 2017-10-05 | インディアン インスティテゥート オブ サイエンスIndian Institute Of Science | 横方向に配向した低欠陥密度で大面積の金属窒化物アイランドのプラットフォームおよびその製造方法 |
CN110301033B (zh) * | 2017-02-16 | 2023-06-09 | 信越化学工业株式会社 | 化合物半导体层叠基板及其制造方法以及半导体元件 |
CN112930605B (zh) * | 2018-09-07 | 2022-07-08 | 苏州晶湛半导体有限公司 | 半导体结构及其制备方法 |
JP7343607B2 (ja) * | 2019-10-29 | 2023-09-12 | 京セラ株式会社 | 半導体素子および半導体素子の製造方法 |
CN113921664B (zh) * | 2021-10-11 | 2023-01-06 | 松山湖材料实验室 | 一种高质量氮化物紫外发光结构的生长方法 |
Family Cites Families (41)
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US4174422A (en) | 1977-12-30 | 1979-11-13 | International Business Machines Corporation | Growing epitaxial films when the misfit between film and substrate is large |
US4522661A (en) | 1983-06-24 | 1985-06-11 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Low defect, high purity crystalline layers grown by selective deposition |
JPS62119196A (ja) | 1985-11-18 | 1987-05-30 | Univ Nagoya | 化合物半導体の成長方法 |
US5300793A (en) * | 1987-12-11 | 1994-04-05 | Hitachi, Ltd. | Hetero crystalline structure and semiconductor device using it |
JP3026087B2 (ja) | 1989-03-01 | 2000-03-27 | 豊田合成株式会社 | 窒化ガリウム系化合物半導体の気相成長方法 |
US5122843A (en) * | 1990-02-15 | 1992-06-16 | Minolta Camera Kabushiki Kaisha | Image forming apparatus having developing devices which use different size toner particles |
US5290393A (en) | 1991-01-31 | 1994-03-01 | Nichia Kagaku Kogyo K.K. | Crystal growth method for gallium nitride-based compound semiconductor |
US5091767A (en) | 1991-03-18 | 1992-02-25 | At&T Bell Laboratories | Article comprising a lattice-mismatched semiconductor heterostructure |
US5656832A (en) | 1994-03-09 | 1997-08-12 | Kabushiki Kaisha Toshiba | Semiconductor heterojunction device with ALN buffer layer of 3nm-10nm average film thickness |
JP3116731B2 (ja) | 1994-07-25 | 2000-12-11 | 株式会社日立製作所 | 格子不整合系積層結晶構造およびそれを用いた半導体装置 |
JP3771952B2 (ja) | 1995-06-28 | 2006-05-10 | ソニー株式会社 | 単結晶iii−v族化合物半導体層の成長方法、発光素子の製造方法およびトランジスタの製造方法 |
KR19980079320A (ko) | 1997-03-24 | 1998-11-25 | 기다오까다까시 | 고품질 쥐에이엔계층의 선택성장방법, 고품질 쥐에이엔계층 성장기판 및 고품질 쥐에이엔계층 성장기판상에 제작하는 반도체디바이스 |
JPH11130597A (ja) * | 1997-10-24 | 1999-05-18 | Mitsubishi Cable Ind Ltd | 転位線の伝搬方向の制御方法およびその用途 |
EP0874405A3 (en) * | 1997-03-25 | 2004-09-15 | Mitsubishi Cable Industries, Ltd. | GaN group crystal base member having low dislocation density, use thereof and manufacturing methods thereof |
JPH10335750A (ja) * | 1997-06-03 | 1998-12-18 | Sony Corp | 半導体基板および半導体装置 |
FR2769924B1 (fr) * | 1997-10-20 | 2000-03-10 | Centre Nat Rech Scient | Procede de realisation d'une couche epitaxiale de nitrure de gallium, couche epitaxiale de nitrure de gallium et composant optoelectronique muni d'une telle couche |
US6051849A (en) | 1998-02-27 | 2000-04-18 | North Carolina State University | Gallium nitride semiconductor structures including a lateral gallium nitride layer that extends from an underlying gallium nitride layer |
WO1999066565A1 (en) * | 1998-06-18 | 1999-12-23 | University Of Florida | Method and apparatus for producing group-iii nitrides |
US6252261B1 (en) * | 1998-09-30 | 2001-06-26 | Nec Corporation | GaN crystal film, a group III element nitride semiconductor wafer and a manufacturing process therefor |
US6177688B1 (en) | 1998-11-24 | 2001-01-23 | North Carolina State University | Pendeoepitaxial gallium nitride semiconductor layers on silcon carbide substrates |
JP4032538B2 (ja) * | 1998-11-26 | 2008-01-16 | ソニー株式会社 | 半導体薄膜および半導体素子の製造方法 |
JP3591710B2 (ja) * | 1999-12-08 | 2004-11-24 | ソニー株式会社 | 窒化物系iii−v族化合物層の成長方法およびそれを用いた基板の製造方法 |
JP4145437B2 (ja) * | 1999-09-28 | 2008-09-03 | 住友電気工業株式会社 | 単結晶GaNの結晶成長方法及び単結晶GaN基板の製造方法と単結晶GaN基板 |
JP3557441B2 (ja) * | 2000-03-13 | 2004-08-25 | 日本電信電話株式会社 | 窒化物半導体基板およびその製造方法 |
JP3680751B2 (ja) * | 2000-03-31 | 2005-08-10 | 豊田合成株式会社 | Iii族窒化物系化合物半導体の製造方法及びiii族窒化物系化合物半導体素子 |
US6657232B2 (en) | 2000-04-17 | 2003-12-02 | Virginia Commonwealth University | Defect reduction in GaN and related materials |
JP4556300B2 (ja) * | 2000-07-18 | 2010-10-06 | ソニー株式会社 | 結晶成長方法 |
US6610144B2 (en) | 2000-07-21 | 2003-08-26 | The Regents Of The University Of California | Method to reduce the dislocation density in group III-nitride films |
US6599362B2 (en) * | 2001-01-03 | 2003-07-29 | Sandia Corporation | Cantilever epitaxial process |
JP3988018B2 (ja) | 2001-01-18 | 2007-10-10 | ソニー株式会社 | 結晶膜、結晶基板および半導体装置 |
JP3956637B2 (ja) * | 2001-04-12 | 2007-08-08 | ソニー株式会社 | 窒化物半導体の結晶成長方法及び半導体素子の形成方法 |
US6653166B2 (en) | 2001-05-09 | 2003-11-25 | Nsc-Nanosemiconductor Gmbh | Semiconductor device and method of making same |
WO2003025263A1 (fr) * | 2001-09-13 | 2003-03-27 | Japan Science And Technology Agency | Substrat semi-conducteur de nitrure, son procede d'obtention et dispositif optique a semi-conducteur utilisant ledit substrat |
JP3968566B2 (ja) | 2002-03-26 | 2007-08-29 | 日立電線株式会社 | 窒化物半導体結晶の製造方法及び窒化物半導体ウエハ並びに窒化物半導体デバイス |
WO2004008509A1 (en) | 2002-07-11 | 2004-01-22 | University College Cork - National University Of Ireland, Cork | Defect reduction in semiconductor materials |
JP4186603B2 (ja) * | 2002-12-05 | 2008-11-26 | 住友電気工業株式会社 | 単結晶窒化ガリウム基板、単結晶窒化ガリウム基板の製造方法および窒化ガリウム成長用下地基板 |
US7221037B2 (en) * | 2003-01-20 | 2007-05-22 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing group III nitride substrate and semiconductor device |
JP3760997B2 (ja) * | 2003-05-21 | 2006-03-29 | サンケン電気株式会社 | 半導体基体 |
US7323256B2 (en) * | 2003-11-13 | 2008-01-29 | Cree, Inc. | Large area, uniformly low dislocation density GaN substrate and process for making the same |
US7687827B2 (en) * | 2004-07-07 | 2010-03-30 | Nitronex Corporation | III-nitride materials including low dislocation densities and methods associated with the same |
JP4720125B2 (ja) * | 2004-08-10 | 2011-07-13 | 日立電線株式会社 | Iii−v族窒化物系半導体基板及びその製造方法並びにiii−v族窒化物系半導体 |
-
2004
- 2004-12-14 FI FI20045482A patent/FI20045482A0/fi not_active Application Discontinuation
-
2005
- 2005-05-19 US US11/792,687 patent/US20080308841A1/en not_active Abandoned
- 2005-05-19 CN CNB2005800429707A patent/CN100487865C/zh not_active Expired - Fee Related
- 2005-05-19 RU RU2007126749/28A patent/RU2368030C2/ru not_active IP Right Cessation
- 2005-05-19 WO PCT/FI2005/000233 patent/WO2006064081A1/en active Application Filing
- 2005-05-19 KR KR1020077015679A patent/KR101159156B1/ko not_active IP Right Cessation
- 2005-05-19 EP EP05742487A patent/EP1834349A1/en not_active Ceased
- 2005-05-19 JP JP2007546092A patent/JP2008523635A/ja active Pending
- 2005-12-09 TW TW094143517A patent/TW200639926A/zh unknown
-
2008
- 2008-05-28 HK HK08105914.4A patent/HK1111264A1/xx not_active IP Right Cessation
-
2011
- 2011-08-17 US US13/211,627 patent/US20120064700A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
RU2007126749A (ru) | 2009-01-27 |
KR101159156B1 (ko) | 2012-06-26 |
CN100487865C (zh) | 2009-05-13 |
HK1111264A1 (en) | 2008-08-01 |
EP1834349A1 (en) | 2007-09-19 |
TW200639926A (en) | 2006-11-16 |
KR20070108147A (ko) | 2007-11-08 |
US20080308841A1 (en) | 2008-12-18 |
CN101080808A (zh) | 2007-11-28 |
RU2368030C2 (ru) | 2009-09-20 |
JP2008523635A (ja) | 2008-07-03 |
US20120064700A1 (en) | 2012-03-15 |
WO2006064081A1 (en) | 2006-06-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD | Application lapsed |