FI116543B - Värähtelevä mikromekaaninen kulmanopeusanturi - Google Patents

Värähtelevä mikromekaaninen kulmanopeusanturi Download PDF

Info

Publication number
FI116543B
FI116543B FI20041708A FI20041708A FI116543B FI 116543 B FI116543 B FI 116543B FI 20041708 A FI20041708 A FI 20041708A FI 20041708 A FI20041708 A FI 20041708A FI 116543 B FI116543 B FI 116543B
Authority
FI
Finland
Prior art keywords
angular velocity
velocity sensor
masses
sensor according
springs
Prior art date
Application number
FI20041708A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20041708A0 (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20041708A priority Critical patent/FI116543B/fi
Publication of FI20041708A0 publication Critical patent/FI20041708A0/fi
Application granted granted Critical
Publication of FI116543B publication Critical patent/FI116543B/fi
Priority to US11/318,897 priority patent/US7454971B2/en
Priority to JP2007548849A priority patent/JP5006208B2/ja
Priority to KR1020077016091A priority patent/KR100936638B1/ko
Priority to CA2586707A priority patent/CA2586707C/en
Priority to CN2005800448799A priority patent/CN101120232B/zh
Priority to EP05823273A priority patent/EP1831643B1/en
Priority to EP12171952.0A priority patent/EP2527789B1/en
Priority to PCT/FI2005/000557 priority patent/WO2006070059A1/en
Priority to ES12171952.0T priority patent/ES2477570T3/es
Priority to IL183573A priority patent/IL183573A/en
Priority to NO20073688A priority patent/NO339420B1/no
Priority to JP2011015627A priority patent/JP2011145298A/ja
Priority to JP2011015625A priority patent/JP5514384B2/ja
Priority to JP2011015626A priority patent/JP2011137826A/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
FI20041708A 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi FI116543B (fi)

Priority Applications (15)

Application Number Priority Date Filing Date Title
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
US11/318,897 US7454971B2 (en) 2004-12-31 2005-12-28 Oscillating micro-mechanical sensor of angular velocity
ES12171952.0T ES2477570T3 (es) 2004-12-31 2005-12-30 Sensor micromecánico oscilante de velocidad angular
PCT/FI2005/000557 WO2006070059A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
CA2586707A CA2586707C (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
KR1020077016091A KR100936638B1 (ko) 2004-12-31 2005-12-30 발진 마이크로-기계 각속도 센서
JP2007548849A JP5006208B2 (ja) 2004-12-31 2005-12-30 角速度についての振動マイクロ−メカニカルセンサー
CN2005800448799A CN101120232B (zh) 2004-12-31 2005-12-30 振荡微机械角速度传感器
EP05823273A EP1831643B1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
EP12171952.0A EP2527789B1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
IL183573A IL183573A (en) 2004-12-31 2007-05-31 Oscillating micro-mechanical sensor of angular velocity
NO20073688A NO339420B1 (no) 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor
JP2011015627A JP2011145298A (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー
JP2011015625A JP5514384B2 (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー
JP2011015626A JP2011137826A (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20041708 2004-12-31

Publications (2)

Publication Number Publication Date
FI20041708A0 FI20041708A0 (fi) 2004-12-31
FI116543B true FI116543B (fi) 2005-12-15

Family

ID=33548065

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (11)

Country Link
US (1) US7454971B2 (ja)
EP (2) EP1831643B1 (ja)
JP (4) JP5006208B2 (ja)
KR (1) KR100936638B1 (ja)
CN (1) CN101120232B (ja)
CA (1) CA2586707C (ja)
ES (1) ES2477570T3 (ja)
FI (1) FI116543B (ja)
IL (1) IL183573A (ja)
NO (1) NO339420B1 (ja)
WO (1) WO2006070059A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009043967A1 (en) 2007-10-05 2009-04-09 Vti Technologies Oy Vibrating micromechanical sensor of angular velocity

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US7998380B2 (en) * 2007-07-13 2011-08-16 Wisconsin Alumni Research Foundation Method of fabricating a tissue engineering scaffold
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
JP5148688B2 (ja) * 2008-04-11 2013-02-20 三菱電機株式会社 加速度センサ
FI122397B (fi) * 2008-04-16 2011-12-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102008040682A1 (de) * 2008-07-24 2010-01-28 Robert Bosch Gmbh Sensoranordnung und Verfahren zum Betrieb einer Sensoranordnung
US20100095768A1 (en) * 2008-10-20 2010-04-22 Custom Sensors & Technologies, Inc. Micromachined torsional gyroscope with anti-phase linear sense transduction
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
DE102009001244A1 (de) * 2009-02-27 2010-09-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
DE102009001248B4 (de) * 2009-02-27 2020-12-17 Hanking Electronics, Ltd. MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US8256290B2 (en) * 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
DE102009002702B4 (de) 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE102009002701B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
WO2011029879A1 (de) 2009-09-09 2011-03-17 Continental Teves Ag & Co. Ohg Doppelaxialer, schockrobuster, drehratensensor mit ineinanderliegenden, linear schwingenden seismischen elementen
US9097524B2 (en) * 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
EP2378246A1 (en) * 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS Structure for an Angular Rate Sensor
DE102011056971A1 (de) 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
US9759563B2 (en) 2012-01-31 2017-09-12 Nxp Usa, Inc. Vibration robust x-axis ring gyro transducer
JP6070920B2 (ja) * 2012-04-04 2017-02-01 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
DE102013208828A1 (de) * 2013-05-14 2014-11-20 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
FI125695B (en) 2013-09-11 2016-01-15 Murata Manufacturing Co Improved gyroscope construction and gyroscope
DE102014215038A1 (de) * 2014-07-31 2016-02-04 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
CN105371834B (zh) * 2014-08-21 2018-08-31 上海矽睿科技有限公司 检测质量块及采用该检测质量块的陀螺仪
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
FI127042B (en) * 2015-09-09 2017-10-13 Murata Manufacturing Co Electrode of a microelectromechanical device
DE102016213877A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Betriebsverfahren desselben
DE102016208503A1 (de) * 2016-05-18 2017-11-23 Robert Bosch Gmbh Mikromechanisches Bauelement
TWI632345B (zh) * 2016-05-27 2018-08-11 日商村田製作所股份有限公司 振動的微機電陀螺儀之驅動振輻的持續性監控與相關方法
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6627911B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体
CN112378575B (zh) * 2020-06-23 2022-02-08 襄阳达安汽车检测中心有限公司 一种汽车碰撞试验用假人多轴力传感器轴间串扰校准方法
US11634320B2 (en) * 2021-02-22 2023-04-25 Taiwan Semiconductor Manufacturing Company Limited Micro-electromechanical system device including a precision proof mass element and methods for forming the same
GB2624843A (en) 2022-07-08 2024-06-05 Autorient Tech As Micromechanical devices and methods of manufacturing thereof

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
JPH05240874A (ja) * 1991-12-06 1993-09-21 Canon Inc 角速度センサ
JPH05264282A (ja) 1992-03-17 1993-10-12 Matsushita Electric Ind Co Ltd 角速度センサ
US5492596A (en) * 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
DE4414237A1 (de) 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE4431232C2 (de) 1994-09-02 1999-07-08 Hahn Schickard Ges Integrierbares Feder-Masse-System
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5886259A (en) 1996-04-01 1999-03-23 Alliedsignal Inc. Axis aligned rate and acceleration sensor
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
DE19641284C1 (de) 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
SE9800194D0 (sv) * 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
EP1083431A1 (en) * 1999-09-10 2001-03-14 STMicroelectronics S.r.l. Method for compensating the position offset of a capacitive inertial sensor, andcapacitive inertial sensor
JP2003509670A (ja) * 1999-09-17 2003-03-11 キオニックス インク 電気分離式マイクロ機械ジャイロスコープ
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
FR2809174B1 (fr) * 2000-05-16 2002-07-12 Commissariat Energie Atomique Structure vibrante a deux oscillateurs couples, notamment pour un gyrometre
JP2002296038A (ja) * 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
US6513380B2 (en) * 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
WO2003058167A1 (de) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
US6848304B2 (en) * 2003-04-28 2005-02-01 Analog Devices, Inc. Six degree-of-freedom micro-machined multi-sensor
US6767758B1 (en) * 2003-04-28 2004-07-27 Analog Devices, Inc. Micro-machined device structures having on and off-axis orientations
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
US7036372B2 (en) 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
US6939473B2 (en) * 2003-10-20 2005-09-06 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7458263B2 (en) * 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7406867B2 (en) * 2005-06-27 2008-08-05 Milli Sensor Systems + Actuators G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane
US7621183B2 (en) * 2005-11-18 2009-11-24 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7549334B2 (en) * 2006-04-24 2009-06-23 Milli Sensor Systems + Actuators Small angle bias measurement mechanism for MEMS instruments

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009043967A1 (en) 2007-10-05 2009-04-09 Vti Technologies Oy Vibrating micromechanical sensor of angular velocity

Also Published As

Publication number Publication date
JP2011137826A (ja) 2011-07-14
US7454971B2 (en) 2008-11-25
WO2006070059A1 (en) 2006-07-06
EP2527789A1 (en) 2012-11-28
US20060156814A1 (en) 2006-07-20
IL183573A (en) 2011-03-31
JP2011145298A (ja) 2011-07-28
KR20070094920A (ko) 2007-09-27
IL183573A0 (en) 2007-09-20
FI20041708A0 (fi) 2004-12-31
NO20073688L (no) 2007-10-01
JP2008527318A (ja) 2008-07-24
CA2586707A1 (en) 2006-07-06
JP2011149944A (ja) 2011-08-04
EP2527789B1 (en) 2014-04-09
JP5514384B2 (ja) 2014-06-04
EP1831643A4 (en) 2010-09-01
KR100936638B1 (ko) 2010-01-14
EP1831643B1 (en) 2012-08-01
NO339420B1 (no) 2016-12-12
EP1831643A1 (en) 2007-09-12
CN101120232A (zh) 2008-02-06
CA2586707C (en) 2011-02-08
CN101120232B (zh) 2011-07-06
ES2477570T3 (es) 2014-07-17
JP5006208B2 (ja) 2012-08-22

Similar Documents

Publication Publication Date Title
FI116543B (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
US11079229B2 (en) Microelectromechanical structure with enhanced rejection of acceleration noise
KR101178692B1 (ko) 코리올리 자이로스코프
US11815354B2 (en) Drive and sense balanced, semi-coupled 3-axis gyroscope
US8443668B2 (en) Yaw rate sensor
JP4719751B2 (ja) 角速度のための振動マイクロ−メカニカルセンサー
US20130174661A1 (en) Rotation rate sensor and method for operating a rotation rate sensor
KR20100023045A (ko) 회전 속도 센서
IL228048A (en) Spring structure, resonator, resonator array and sensor
US8997568B2 (en) Micromachined gyroscope with detection in the plane of the machined wafer
JP2020091280A (ja) 回転運動検出用微小電気機械デバイス
CN1318821C (zh) 使用调谐加速计的微机械硅陀螺仪
JP2005241500A (ja) 角速度センサ
US6561028B1 (en) Mechanical resonator for a rotation sensor
US20130333470A1 (en) Planar coriolis gyroscope

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 116543

Country of ref document: FI

PC Transfer of assignment of patent

Owner name: MURATA ELECTRONICS OY

PC Transfer of assignment of patent

Owner name: MURATA MANUFACTURING CO., LTD.