ES2173325T3 - Procedimiento e instalacion para el recubrimiento de piezas. - Google Patents
Procedimiento e instalacion para el recubrimiento de piezas.Info
- Publication number
- ES2173325T3 ES2173325T3 ES96937963T ES96937963T ES2173325T3 ES 2173325 T3 ES2173325 T3 ES 2173325T3 ES 96937963 T ES96937963 T ES 96937963T ES 96937963 T ES96937963 T ES 96937963T ES 2173325 T3 ES2173325 T3 ES 2173325T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- installation
- coating parts
- work parts
- attacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating By Spraying Or Casting (AREA)
- Paints Or Removers (AREA)
Abstract
PARA DEPOSITAR CAPAS DE MATERIAL ENDURECIDO ESPECIALMENTE SOBRE PIEZAS DE TRABAJO SOMETIDAS A FUERTES SOLICITACIONES, QUE TIENEN QUE SER ATACADAS AL ACIDO MEDIANTE PULVERIZACION, SE PROPONE QUE JUNTAMENTE CON LA DESCARGA DE ARCO DE BAJO VOLTAJE SE SOMETAN A ATAQUE ACIDO MEDIANTE PULVERIZACION Y, A CONTINUACION, SE RECUBRAN LAS PIEZAS DE TRABAJO ACTUANDO EN LA MISMA DIRECCION.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH62796 | 1996-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2173325T3 true ES2173325T3 (es) | 2002-10-16 |
Family
ID=4191421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES96937963T Expired - Lifetime ES2173325T3 (es) | 1996-03-11 | 1996-11-22 | Procedimiento e instalacion para el recubrimiento de piezas. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5709784A (es) |
EP (1) | EP0886880B1 (es) |
JP (1) | JP4208258B2 (es) |
KR (1) | KR100432102B1 (es) |
DE (2) | DE29615190U1 (es) |
ES (1) | ES2173325T3 (es) |
WO (1) | WO1997034315A1 (es) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19725930C2 (de) * | 1997-06-16 | 2002-07-18 | Eberhard Moll Gmbh Dr | Verfahren und Anlage zum Behandeln von Substraten mittels Ionen aus einer Niedervoltbogenentladung |
AU4028297A (en) * | 1997-09-12 | 1999-04-05 | Balzers Aktiengesellschaft | Tool having a protective layer system |
DE59903546D1 (de) * | 1998-04-29 | 2003-01-09 | Unaxis Trading Ag Truebbach | Werkzeug oder maschinenbauteil und verfahren zu dessen herstellung sowie vakuumbehandlungsanlage |
JP4806146B2 (ja) * | 1999-07-13 | 2011-11-02 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | 真空処理ないしは粉末製造のための装置および方法 |
DE10010126C2 (de) * | 2000-03-03 | 2002-10-10 | Cobes Gmbh Nachrichten Und Dat | Verfahren und Vorrichtung zum Plasmabehandeln der Oberfläche von Substraten durch Ionenbeschuß |
GB0008286D0 (en) * | 2000-04-04 | 2000-05-24 | Applied Materials Inc | A vaporiser for generating feed gas for an arc chamber |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
EP1186681B1 (de) | 2000-09-05 | 2010-03-31 | Oerlikon Trading AG, Trübbach | Vakuumanlage mit koppelbarem Werkstückträger |
WO2003079397A1 (de) * | 2002-03-15 | 2003-09-25 | Unaxis Balzers Ag | Vakuumplasmagenerator |
JP2005025275A (ja) * | 2003-06-30 | 2005-01-27 | Ntt Power & Building Facilities Inc | 土地建物資産評価システム |
KR100770938B1 (ko) * | 2003-06-30 | 2007-10-26 | 가부시키가이샤 후지코시 | 다원계 피막의 제조 장치와 방법 및 다원계 피막의 피복공구 |
DE10347981A1 (de) * | 2003-10-15 | 2005-07-07 | Gühring, Jörg, Dr. | Verschleißschutzschicht für spanabhebende Werkzeuge, insbesondere für rotierende Zerspanungswerkzeuge |
SE529375C2 (sv) * | 2005-07-22 | 2007-07-24 | Sandvik Intellectual Property | Anordning för förbättrad plasmaaktivitet i PVD-reaktorer |
US7939181B2 (en) * | 2006-10-11 | 2011-05-10 | Oerlikon Trading Ag, Trubbach | Layer system with at least one mixed crystal layer of a multi-oxide |
KR101046520B1 (ko) | 2007-09-07 | 2011-07-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 내부 챔버 상의 부산물 막 증착을 제어하기 위한 pecvd 시스템에서의 소스 가스 흐름 경로 제어 |
US8968830B2 (en) * | 2007-12-06 | 2015-03-03 | Oerlikon Trading Ag, Trubbach | PVD—vacuum coating unit |
KR100977613B1 (ko) * | 2008-03-26 | 2010-08-23 | 한전케이피에스 주식회사 | 고온용 부품의 윤활코팅장치 |
RU2504860C2 (ru) * | 2008-04-22 | 2014-01-20 | Эрликон Трейдинг Аг, Трюббах | Способ производства заготовок с травленной ионами поверхностью |
DE102008062332A1 (de) * | 2008-12-15 | 2010-06-17 | Gühring Ohg | Vorrichtung zur Oberflächenbehandlung und/oder -beschichtung von Substratkomponenten |
TWI379916B (en) * | 2009-02-24 | 2012-12-21 | Ind Tech Res Inst | Vacuum coating device and coating method |
KR101048057B1 (ko) * | 2009-11-24 | 2011-07-11 | 한국전기연구원 | 플라즈마 잠입 이온을 이용한 가공 장치 및 방법 |
JP5649333B2 (ja) | 2010-06-01 | 2015-01-07 | 株式会社神戸製鋼所 | イオンボンバードメント装置及びこの装置を用いた基材表面のクリーニング方法 |
TWI480403B (zh) * | 2010-10-26 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | 鍍膜裝置 |
JP5689051B2 (ja) | 2011-11-25 | 2015-03-25 | 株式会社神戸製鋼所 | イオンボンバードメント装置 |
JP6076112B2 (ja) | 2013-02-07 | 2017-02-08 | 株式会社神戸製鋼所 | イオンボンバードメント装置及びこの装置を用いた基材の表面のクリーニング方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3015296A1 (de) * | 1979-05-29 | 1980-12-11 | Balzers Hochvakuum | Verfahren zum aetzen von werkstueckoberflaechen mittels eines durch eine elektrische gasentladung aktivierten gases |
CH645137A5 (de) * | 1981-03-13 | 1984-09-14 | Balzers Hochvakuum | Verfahren und vorrichtung zum verdampfen von material unter vakuum. |
JPH0622212B2 (ja) * | 1983-05-31 | 1994-03-23 | 株式会社東芝 | ドライエッチング方法 |
JPS6020440A (ja) * | 1983-07-14 | 1985-02-01 | Tokyo Daigaku | イオンビ−ム加工装置 |
EP0306612B2 (de) * | 1987-08-26 | 1996-02-28 | Balzers Aktiengesellschaft | Verfahren zur Aufbringung von Schichten auf Substraten |
DE58909180D1 (de) * | 1988-03-23 | 1995-05-24 | Balzers Hochvakuum | Verfahren und Anlage zur Beschichtung von Werkstücken. |
US5234561A (en) * | 1988-08-25 | 1993-08-10 | Hauzer Industries Bv | Physical vapor deposition dual coating process |
DE3880135T2 (de) * | 1988-09-08 | 1993-09-16 | Asahi Glass Co Ltd | Zerstaeubungsverfahren mittels eines bandfoermigen plasmaflusses und geraet zur handhabung dieses verfahrens. |
EP0413853B1 (de) * | 1989-08-21 | 1996-01-31 | Balzers Aktiengesellschaft | Beschichtetes Werkstück mit einer Mischkristallbeschichtung, Verfahren zu dessen Herstellung, sowie Vorrichtung zur Durchführung des Verfahrens |
JPH05275345A (ja) * | 1992-03-30 | 1993-10-22 | Nippon Sheet Glass Co Ltd | プラズマcvd方法およびその装置 |
-
1996
- 1996-08-31 DE DE29615190U patent/DE29615190U1/de not_active Expired - Lifetime
- 1996-09-11 US US08/710,095 patent/US5709784A/en not_active Expired - Lifetime
- 1996-11-22 KR KR10-1998-0707122A patent/KR100432102B1/ko not_active IP Right Cessation
- 1996-11-22 DE DE59608888T patent/DE59608888D1/de not_active Expired - Lifetime
- 1996-11-22 EP EP96937963A patent/EP0886880B1/de not_active Expired - Lifetime
- 1996-11-22 WO PCT/CH1996/000412 patent/WO1997034315A1/de active IP Right Grant
- 1996-11-22 JP JP53214497A patent/JP4208258B2/ja not_active Expired - Fee Related
- 1996-11-22 ES ES96937963T patent/ES2173325T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0886880A1 (de) | 1998-12-30 |
JP2000506225A (ja) | 2000-05-23 |
KR19990087659A (ko) | 1999-12-27 |
KR100432102B1 (ko) | 2004-09-10 |
JP4208258B2 (ja) | 2009-01-14 |
US5709784A (en) | 1998-01-20 |
EP0886880B1 (de) | 2002-03-13 |
DE29615190U1 (de) | 1996-11-28 |
DE59608888D1 (de) | 2002-04-18 |
WO1997034315A1 (de) | 1997-09-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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