ES2171044T3 - Sistema de purificacion de gas dotado de un dispositivo de seguridad y procedimiento de purificacion de gas. - Google Patents

Sistema de purificacion de gas dotado de un dispositivo de seguridad y procedimiento de purificacion de gas.

Info

Publication number
ES2171044T3
ES2171044T3 ES98953367T ES98953367T ES2171044T3 ES 2171044 T3 ES2171044 T3 ES 2171044T3 ES 98953367 T ES98953367 T ES 98953367T ES 98953367 T ES98953367 T ES 98953367T ES 2171044 T3 ES2171044 T3 ES 2171044T3
Authority
ES
Spain
Prior art keywords
gas
gas purification
safety device
enclosure
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98953367T
Other languages
English (en)
Inventor
Marco Succi
Giorgio Vergani
D Arcy H Lorimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris GP Inc
Original Assignee
SAES Pure Gas Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Pure Gas Inc filed Critical SAES Pure Gas Inc
Application granted granted Critical
Publication of ES2171044T3 publication Critical patent/ES2171044T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454—Controlling adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30—Controlling by gas-analysis apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/346—Controlling the process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4402—Reduction of impurities in the source gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)
  • Treating Waste Gases (AREA)

Abstract

Un sistema de purificación de gas con dispositivo de seguridad que comprende: una unidad de purificación de gas que incluye un recinto y un material de purificación dispuesto dentro del recinto que muestra una reacción exotérmica cuando se expone a ciertos contaminantes de gas que pueden estar presentes dentro de dicho recinto, teniendo dicha unidad de purificación de gas una entrada acoplada a un conducto de entrada de gas no purificado y una salida acoplada a un conducto de salida de gas purificado; y un dispositivo de seguridad acoplado a uno de dicho conducto de entrada de gas no purificado y dicho conducto de salida purificado, donde dicho dispositivo de seguridad desarrolla una señal de alarma cuando los contaminantes de gas dentro de dicho dispositivo de seguridad que son similares a ciertos contaminantes de gas dentro de dicha unidad de purificación de gas están por encima de un nivel de concentración dado sobre un periodo de tiempo.
ES98953367T 1997-10-15 1998-10-06 Sistema de purificacion de gas dotado de un dispositivo de seguridad y procedimiento de purificacion de gas. Expired - Lifetime ES2171044T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6204397P 1997-10-15 1997-10-15

Publications (1)

Publication Number Publication Date
ES2171044T3 true ES2171044T3 (es) 2002-08-16

Family

ID=22039853

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98953367T Expired - Lifetime ES2171044T3 (es) 1997-10-15 1998-10-06 Sistema de purificacion de gas dotado de un dispositivo de seguridad y procedimiento de purificacion de gas.

Country Status (10)

Country Link
US (1) US6168645B1 (es)
EP (1) EP1028798B1 (es)
JP (1) JP3664239B2 (es)
KR (1) KR100492943B1 (es)
CN (1) CN1112954C (es)
DE (1) DE69803408T2 (es)
ES (1) ES2171044T3 (es)
MY (1) MY121728A (es)
TW (1) TW422727B (es)
WO (1) WO1999019050A1 (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2253690A1 (en) * 1998-11-09 2000-05-09 Fantom Technologies Inc. Method and apparatus for measuring the degree of treatment of a medium by a gas
US6733571B1 (en) * 1999-07-12 2004-05-11 Saes Pure Gas, Inc. Gas purification system with an integrated hydrogen sorption and filter assembly
KR100397889B1 (ko) * 2001-01-18 2003-09-19 삼성전자주식회사 개스공급장치의 잔류개스 제거장치
JP3763455B2 (ja) * 2001-01-26 2006-04-05 オムロン株式会社 ケミカルフィルタの交換時期判定方法
US6428612B1 (en) * 2001-04-19 2002-08-06 Hughes Electronics Corporation Hydrogen getter package assembly
US6514313B1 (en) * 2001-06-22 2003-02-04 Aeronex, Inc. Gas purification system and method
US7364912B2 (en) * 2001-10-05 2008-04-29 Schmidt Jeffrey A Controlling the flow of hydrogen and ammonia from a hydrogen generator during a breakthrough with hydrated copper (II) chloride trap
US6824752B1 (en) * 2002-06-20 2004-11-30 Praxair Technology, Inc. Process and system for purifying gases
US7097689B2 (en) * 2002-06-20 2006-08-29 Praxair Technology, Inc. Process and system for purifying gases
US7021821B2 (en) * 2004-05-28 2006-04-04 Honeywell International Inc. Differential thermal sensors
US7717294B2 (en) * 2005-06-20 2010-05-18 South-Tek Systems Beverage dispensing gas consumption detection with alarm and backup operation
JP4501799B2 (ja) * 2005-07-08 2010-07-14 住友電気工業株式会社 排ガス処理装置
US7618600B1 (en) * 2006-07-13 2009-11-17 Sandia Corporation Reactor for removing ammonia
US7981195B2 (en) * 2007-11-09 2011-07-19 Praxair Technology, Inc. System for preventing contaminants from reaching a gas purifier
FR2928966B1 (fr) * 2008-03-20 2018-12-07 Faurecia Systemes D'echappement Procede de fabrication d'un organe de purification des gaz d'echappement d'un vehicule automobile
GB201421102D0 (en) 2014-11-27 2015-01-14 Cambridge Entpr Ltd Thermal conductivity sensing device, methods for operation and uses of the same
US20180045375A1 (en) * 2016-08-10 2018-02-15 Honeywell International Inc. Smart solenoid control system

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
DE1186243B (de) * 1962-11-03 1965-01-28 Heraeus Gmbh W C Geraete zur Anzeige des Anteils gasfoermiger, hoehermolekularer Verunreinigungen eines niedermolekularen Gases
US3536522A (en) 1968-05-21 1970-10-27 Texas Instruments Inc Method for purification of reaction gases
DE2316095A1 (de) 1973-03-30 1974-10-10 Siemens Ag Verfahren zur herstellung integrierter schaltungen mit komplementaer-kanal-feldeffekttransistoren
DE7527377U (de) * 1975-08-27 1976-06-10 Delbag-Luftfilter Gmbh, 1000 Berlin Adsorptions-filter zum reinigen von insbesondere toxische oder radioaktive verunreinigungen enthaltenden gas- oder luftstroemen
DE7602442U1 (de) * 1976-01-27 1976-10-28 Delbag-Luftfilter Gmbh, 1000 Berlin Drosselbare, rohrfoermige bypass-messstrecke mit wartungsschutz und kontinuierlicher stroemungsgeschwindigkeitsabtastung an schuettgutanlagen der kerntechnik
DE3135732C2 (de) * 1981-09-09 1984-08-30 Bauer Kompressoren GmbH, 8000 München Verfahren und Vorrichtung zur Überwachung der Standzeit von Adsorptionspatronen zur Trocknung und/oder Reinigung feuchter Druckluft
US4983190A (en) * 1985-05-21 1991-01-08 Pall Corporation Pressure-swing adsorption system and method for NBC collective protection
US4816043A (en) * 1985-05-31 1989-03-28 Wilkerson Coporation Adsorption-desorption fluid fractionation with cycle phase switching controlled by purge and saturation front conditions
JPS623006A (ja) 1985-06-28 1987-01-09 大陽酸素株式会社 窒素の超精製装置、並びに精製方法
JPS623008A (ja) 1985-06-28 1987-01-09 大陽酸素株式会社 アルゴンの超精製装置、並びに精製方法
US5328872A (en) 1989-12-29 1994-07-12 At&T Bell Laboratories Method of integrated circuit manufacturing using deposited oxide
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
US5047073A (en) * 1990-02-27 1991-09-10 Transducer Research, Inc. Sorption separation apparatus and methods
IT1239900B (it) 1990-03-30 1993-11-23 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas e relativa apparecchiatura
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US5334237A (en) * 1993-02-26 1994-08-02 Saes Pure Gas, Inc. Method and apparatus for predicting end-of-life of a consumable in a fluid purification system
DE4321863C2 (de) * 1993-07-01 2000-01-05 Behr Gmbh & Co Verfahren und Vorrichtung zur Desorption eines Feuchtigkeit adsorbierenden Materials
US5393686A (en) 1994-08-29 1995-02-28 Taiwan Semiconductor Manufacturing Company Method of forming gate oxide by TLC gettering clean
US5524433A (en) * 1994-12-27 1996-06-11 Ford Motor Company Methods and apparatus for monitoring the performance of hydrocarbon engine emission trapping devices
CA2250453A1 (en) 1996-03-26 1997-10-02 D'arcy H. Lorimer Combination cryopump/getter pump and method for regenerating same
IT1283484B1 (it) * 1996-07-23 1998-04-21 Getters Spa Metodo per la produzione di strati sottili supportati di materiale getter non-evaporabile e dispositivi getter cosi' prodotti

Also Published As

Publication number Publication date
EP1028798B1 (en) 2002-01-02
TW422727B (en) 2001-02-21
CN1280516A (zh) 2001-01-17
DE69803408D1 (de) 2002-02-28
CN1112954C (zh) 2003-07-02
KR100492943B1 (ko) 2005-06-02
JP3664239B2 (ja) 2005-06-22
JP2001519230A (ja) 2001-10-23
WO1999019050A1 (en) 1999-04-22
MY121728A (en) 2006-02-28
DE69803408T2 (de) 2002-08-08
US6168645B1 (en) 2001-01-02
EP1028798A1 (en) 2000-08-23
KR20010031168A (ko) 2001-04-16

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