IT1237944B - Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura - Google Patents

Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura

Info

Publication number
IT1237944B
IT1237944B IT01901290A IT1901290A IT1237944B IT 1237944 B IT1237944 B IT 1237944B IT 01901290 A IT01901290 A IT 01901290A IT 1901290 A IT1901290 A IT 1901290A IT 1237944 B IT1237944 B IT 1237944B
Authority
IT
Italy
Prior art keywords
determining
inert gas
useful life
related equipment
gas purifier
Prior art date
Application number
IT01901290A
Other languages
English (en)
Other versions
IT9019012A1 (it
IT9019012A0 (it
Inventor
Marco Succi
Fabrizio Doni
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT01901290A priority Critical patent/IT1237944B/it
Publication of IT9019012A0 publication Critical patent/IT9019012A0/it
Priority to US07/611,652 priority patent/US5150604A/en
Priority to JP41398290A priority patent/JP3176942B2/ja
Priority to EP90830623A priority patent/EP0438036B1/en
Priority to DE69009168T priority patent/DE69009168T2/de
Publication of IT9019012A1 publication Critical patent/IT9019012A1/it
Application granted granted Critical
Publication of IT1237944B publication Critical patent/IT1237944B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454—Controlling adsorption
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S116/00—Signals and indicators
    • Y10S116/25—Air filter condition indicator

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
IT01901290A 1990-01-05 1990-01-05 Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura IT1237944B (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT01901290A IT1237944B (it) 1990-01-05 1990-01-05 Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
US07/611,652 US5150604A (en) 1990-01-05 1990-11-13 Method for determining the end of useful life of an inert gas purifier and apparatus therefore
JP41398290A JP3176942B2 (ja) 1990-01-05 1990-12-26 不活性気体精製装置の有用寿命を決定する方法及びそのための装置
EP90830623A EP0438036B1 (en) 1990-01-05 1990-12-31 Method for determining the end of useful life of an inert gas purifier and apparatus therefor
DE69009168T DE69009168T2 (de) 1990-01-05 1990-12-31 Verfahren, um das Ende der Lebensdauer einer Reinigungs- vorrichtung für Inertgases zu bestimmen, und Vorrichtung dafür.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT01901290A IT1237944B (it) 1990-01-05 1990-01-05 Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura

Publications (3)

Publication Number Publication Date
IT9019012A0 IT9019012A0 (it) 1990-01-05
IT9019012A1 IT9019012A1 (it) 1991-07-06
IT1237944B true IT1237944B (it) 1993-06-19

Family

ID=11153842

Family Applications (1)

Application Number Title Priority Date Filing Date
IT01901290A IT1237944B (it) 1990-01-05 1990-01-05 Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura

Country Status (5)

Country Link
US (1) US5150604A (it)
EP (1) EP0438036B1 (it)
JP (1) JP3176942B2 (it)
DE (1) DE69009168T2 (it)
IT (1) IT1237944B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105498373A (zh) * 2015-11-25 2016-04-20 北京有色金属研究总院 气体纯化器使用寿命的监测方法及其装置

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5496393A (en) * 1991-05-31 1996-03-05 Kabushiki Kaisha Toshiba Gas purification capability measuring method for gas purification apparatus and gas purification apparatus
JP2807370B2 (ja) * 1992-03-23 1998-10-08 日本碍子株式会社 排ガス浄化用ハニカム構造体の再生時の圧力損失の検査方法及び装置
US5260585A (en) * 1992-06-12 1993-11-09 Novapure Corporation Endpoint and/or back diffusion gas impurity detector, and method of using the same
US5334237A (en) * 1993-02-26 1994-08-02 Saes Pure Gas, Inc. Method and apparatus for predicting end-of-life of a consumable in a fluid purification system
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
JP3664239B2 (ja) 1997-10-15 2005-06-22 サエス・ピュア・ガス・インコーポレイテッド 安全装置を備えたガス清浄化システムとガスを清浄化する方法
US6313953B1 (en) * 1999-01-15 2001-11-06 Donaldson Company, Inc. Gas chemical filtering for optimal light transmittance; and methods
US6920802B2 (en) * 2002-04-24 2005-07-26 Saudi Arabian Oil Company Adsorption trap for the detection of surface-active agents in gas streams
US7097689B2 (en) * 2002-06-20 2006-08-29 Praxair Technology, Inc. Process and system for purifying gases
US6889144B2 (en) * 2003-06-16 2005-05-03 Praxair Technology, Inc. Life prediction for gas purifiers
US20050069475A1 (en) * 2003-09-30 2005-03-31 Hage Daniel B. System and process for reducing impurities
US6993414B2 (en) * 2003-12-18 2006-01-31 Carrier Corporation Detection of clogged filter in an HVAC system
US7201036B2 (en) * 2004-02-27 2007-04-10 Hunter Manufacturing Co. Residual life indicating system
ITMI20042271A1 (it) * 2004-11-23 2005-02-23 Getters Spa Leghe getter non evaporabili per assorbimento di idrogeno
US20070272083A1 (en) * 2006-03-30 2007-11-29 Ross Hoge Filter saturation control system
US20110244775A1 (en) * 2010-04-02 2011-10-06 Kewaunee Scientific Corporation Apparatus and method for controlling and directing flow of contaminated air to filters and for monitoring filter loading in a biological safety cabinet

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3135108A (en) * 1960-12-29 1964-06-02 Gen Electric Method and apparatus for gas analysis
US3413855A (en) * 1965-09-29 1968-12-03 Worthington Corp Apparatus for measuring and indicating fluid pressure across a fluid restriction
US4133426A (en) * 1978-02-24 1979-01-09 The International Nickel Company, Inc. Hydride container
DE3001675A1 (de) * 1980-01-18 1981-07-23 Fichtel & Sachs Ag, 8720 Schweinfurt Geraet zur anzeige des erschoepfungsgrades eines adsorptionsfilters
US4751501A (en) * 1981-10-06 1988-06-14 Honeywell Inc. Variable air volume clogged filter detector
JPS623006A (ja) * 1985-06-28 1987-01-09 大陽酸素株式会社 窒素の超精製装置、並びに精製方法
JPS623008A (ja) * 1985-06-28 1987-01-09 大陽酸素株式会社 アルゴンの超精製装置、並びに精製方法
JPS6483134A (en) * 1987-09-26 1989-03-28 Toshiba Corp Detecting device of clogging of filter of filtering apparatus
JPH01215343A (ja) * 1988-02-22 1989-08-29 Toshiba Corp ガス精製装置の精製能力評価方法及びその装置
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105498373A (zh) * 2015-11-25 2016-04-20 北京有色金属研究总院 气体纯化器使用寿命的监测方法及其装置

Also Published As

Publication number Publication date
IT9019012A1 (it) 1991-07-06
JP3176942B2 (ja) 2001-06-18
DE69009168T2 (de) 1994-09-08
EP0438036B1 (en) 1994-05-25
EP0438036A2 (en) 1991-07-24
JPH04135612A (ja) 1992-05-11
DE69009168D1 (de) 1994-06-30
US5150604A (en) 1992-09-29
IT9019012A0 (it) 1990-01-05
EP0438036A3 (en) 1991-09-25

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