ES2163973A1 - Sensor de gases. - Google Patents
Sensor de gases.Info
- Publication number
- ES2163973A1 ES2163973A1 ES009901004A ES9901004A ES2163973A1 ES 2163973 A1 ES2163973 A1 ES 2163973A1 ES 009901004 A ES009901004 A ES 009901004A ES 9901004 A ES9901004 A ES 9901004A ES 2163973 A1 ES2163973 A1 ES 2163973A1
- Authority
- ES
- Spain
- Prior art keywords
- gas sensor
- catalysing
- deposited
- elements
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Sensor de gases, constituido por un sustrato de silicio (1) que incluye una zona (2) micromecanizada sobre la que va dispuesta una resistencia calefactora (4), ocluida en una sustancia dieléctrica (3) sobre la que va dispuesta una capa de óxido metálico semiconductor (6), que embebe elementos catalizadores (7). Estos elementos catalizadores presentan una disposición en capas y están embebidos dentro del volumen del óxido metálico semiconductor de forma no homogénea.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2163973A1 true ES2163973A1 (es) | 2002-02-01 |
ES2163973B1 ES2163973B1 (es) | 2003-05-01 |
Family
ID=8308363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9901004A Expired - Lifetime ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2163973B1 (es) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0334614A2 (en) * | 1988-03-21 | 1989-09-27 | Sieger Limited | Catalytic gas detector |
GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
US5629474A (en) * | 1993-03-30 | 1997-05-13 | Keele University | Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent |
US5685969A (en) * | 1993-09-28 | 1997-11-11 | Siemens Aktiengesellschaft | Sensor arrangement |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
-
1999
- 1999-05-13 ES ES9901004A patent/ES2163973B1/es not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0334614A2 (en) * | 1988-03-21 | 1989-09-27 | Sieger Limited | Catalytic gas detector |
GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
US5629474A (en) * | 1993-03-30 | 1997-05-13 | Keele University | Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent |
US5685969A (en) * | 1993-09-28 | 1997-11-11 | Siemens Aktiengesellschaft | Sensor arrangement |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
Also Published As
Publication number | Publication date |
---|---|
ES2163973B1 (es) | 2003-05-01 |
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Legal Events
Date | Code | Title | Description |
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GC2A | Exploitation certificate registered application with search report |
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