ES2163973A1 - Gas sensor - Google Patents

Gas sensor

Info

Publication number
ES2163973A1
ES2163973A1 ES009901004A ES9901004A ES2163973A1 ES 2163973 A1 ES2163973 A1 ES 2163973A1 ES 009901004 A ES009901004 A ES 009901004A ES 9901004 A ES9901004 A ES 9901004A ES 2163973 A1 ES2163973 A1 ES 2163973A1
Authority
ES
Spain
Prior art keywords
gas sensor
catalysing
deposited
elements
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES009901004A
Other languages
Spanish (es)
Other versions
ES2163973B1 (en
Inventor
Gaudo Fco Javier Gracia
Carmona Enrique Castano
Olaizola Santiago Miguel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gas De Euskadi S A Soc D
Original Assignee
Gas De Euskadi S A Soc D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gas De Euskadi S A Soc D filed Critical Gas De Euskadi S A Soc D
Priority to ES9901004A priority Critical patent/ES2163973B1/en
Publication of ES2163973A1 publication Critical patent/ES2163973A1/en
Application granted granted Critical
Publication of ES2163973B1 publication Critical patent/ES2163973B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

Gas sensor, consisting of a silicon substrate (1) which includes a micro-machined area (2) on which is deposited a heating resistance (4) insulated by a dielectric substance (3) on which is deposited a layer of metal oxide semiconductor (6), which incorporates catalysing elements (7). These catalysing elements are arranged in layers and embedded in the volume of metal oxide semiconductor non-homogeneously.
ES9901004A 1999-05-13 1999-05-13 GAS SENSOR Expired - Lifetime ES2163973B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9901004A ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9901004A ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Publications (2)

Publication Number Publication Date
ES2163973A1 true ES2163973A1 (en) 2002-02-01
ES2163973B1 ES2163973B1 (en) 2003-05-01

Family

ID=8308363

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9901004A Expired - Lifetime ES2163973B1 (en) 1999-05-13 1999-05-13 GAS SENSOR

Country Status (1)

Country Link
ES (1) ES2163973B1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0334614A2 (en) * 1988-03-21 1989-09-27 Sieger Limited Catalytic gas detector
GB2238617A (en) * 1989-11-28 1991-06-05 Eev Ltd Detector for flammable gases
US5629474A (en) * 1993-03-30 1997-05-13 Keele University Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent
US5685969A (en) * 1993-09-28 1997-11-11 Siemens Aktiengesellschaft Sensor arrangement
US5834627A (en) * 1996-12-17 1998-11-10 Sandia Corporation Calorimetric gas sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0334614A2 (en) * 1988-03-21 1989-09-27 Sieger Limited Catalytic gas detector
GB2238617A (en) * 1989-11-28 1991-06-05 Eev Ltd Detector for flammable gases
US5629474A (en) * 1993-03-30 1997-05-13 Keele University Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent
US5685969A (en) * 1993-09-28 1997-11-11 Siemens Aktiengesellschaft Sensor arrangement
US5834627A (en) * 1996-12-17 1998-11-10 Sandia Corporation Calorimetric gas sensor

Also Published As

Publication number Publication date
ES2163973B1 (en) 2003-05-01

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