ES2163973A1 - Gas sensor - Google Patents
Gas sensorInfo
- Publication number
- ES2163973A1 ES2163973A1 ES009901004A ES9901004A ES2163973A1 ES 2163973 A1 ES2163973 A1 ES 2163973A1 ES 009901004 A ES009901004 A ES 009901004A ES 9901004 A ES9901004 A ES 9901004A ES 2163973 A1 ES2163973 A1 ES 2163973A1
- Authority
- ES
- Spain
- Prior art keywords
- gas sensor
- catalysing
- deposited
- elements
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Gas sensor, consisting of a silicon substrate (1) which includes a micro-machined area (2) on which is deposited a heating resistance (4) insulated by a dielectric substance (3) on which is deposited a layer of metal oxide semiconductor (6), which incorporates catalysing elements (7). These catalysing elements are arranged in layers and embedded in the volume of metal oxide semiconductor non-homogeneously.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (en) | 1999-05-13 | 1999-05-13 | GAS SENSOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (en) | 1999-05-13 | 1999-05-13 | GAS SENSOR |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2163973A1 true ES2163973A1 (en) | 2002-02-01 |
ES2163973B1 ES2163973B1 (en) | 2003-05-01 |
Family
ID=8308363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9901004A Expired - Lifetime ES2163973B1 (en) | 1999-05-13 | 1999-05-13 | GAS SENSOR |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2163973B1 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0334614A2 (en) * | 1988-03-21 | 1989-09-27 | Sieger Limited | Catalytic gas detector |
GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
US5629474A (en) * | 1993-03-30 | 1997-05-13 | Keele University | Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent |
US5685969A (en) * | 1993-09-28 | 1997-11-11 | Siemens Aktiengesellschaft | Sensor arrangement |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
-
1999
- 1999-05-13 ES ES9901004A patent/ES2163973B1/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0334614A2 (en) * | 1988-03-21 | 1989-09-27 | Sieger Limited | Catalytic gas detector |
GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
US5629474A (en) * | 1993-03-30 | 1997-05-13 | Keele University | Production of a sensor for carbon monoxide or water vapor including a semi conductor metallic oxide, catalyst, and rheological agent |
US5685969A (en) * | 1993-09-28 | 1997-11-11 | Siemens Aktiengesellschaft | Sensor arrangement |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
Also Published As
Publication number | Publication date |
---|---|
ES2163973B1 (en) | 2003-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EC2A | Search report published |
Date of ref document: 20020201 Kind code of ref document: A1 Effective date: 20020201 |
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FG2A | Definitive protection |
Ref document number: 2163973B1 Country of ref document: ES |
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GC2A | Exploitation certificate registered application with search report |
Effective date: 20160525 |