ES2163973B1 - Sensor de gases. - Google Patents
Sensor de gases.Info
- Publication number
- ES2163973B1 ES2163973B1 ES9901004A ES9901004A ES2163973B1 ES 2163973 B1 ES2163973 B1 ES 2163973B1 ES 9901004 A ES9901004 A ES 9901004A ES 9901004 A ES9901004 A ES 9901004A ES 2163973 B1 ES2163973 B1 ES 2163973B1
- Authority
- ES
- Spain
- Prior art keywords
- gas sensor
- catalyst elements
- semiconductor metal
- occluded
- embeds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Sensor de gases, constituido por un sustrato de silicio (1) que incluye una zona (2) micromecanizada sobre la que va dispuesta una resistencia calefactora (4), ocluida en una sustancia dieléctrica (3) sobre la que va dispuesta una capa de óxido metálico semiconductor (6), que embebe elementos catalizadores (7). Estos elementos catalizadores presentan una disposición en capas y están embebidos dentro del volumen del óxido metálico semiconductor de forma no homogénea.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9901004A ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2163973A1 ES2163973A1 (es) | 2002-02-01 |
ES2163973B1 true ES2163973B1 (es) | 2003-05-01 |
Family
ID=8308363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9901004A Expired - Lifetime ES2163973B1 (es) | 1999-05-13 | 1999-05-13 | Sensor de gases. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2163973B1 (es) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8806695D0 (en) * | 1988-03-21 | 1988-04-20 | Sieger Ltd | Catalytic gas detector |
GB2238617A (en) * | 1989-11-28 | 1991-06-05 | Eev Ltd | Detector for flammable gases |
GB9306594D0 (en) * | 1993-03-30 | 1993-05-26 | Univ Keele | Sensor |
EP0645621A3 (de) * | 1993-09-28 | 1995-11-08 | Siemens Ag | Sensoranordnung. |
US5834627A (en) * | 1996-12-17 | 1998-11-10 | Sandia Corporation | Calorimetric gas sensor |
-
1999
- 1999-05-13 ES ES9901004A patent/ES2163973B1/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ES2163973A1 (es) | 2002-02-01 |
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Legal Events
Date | Code | Title | Description |
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EC2A | Search report published |
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