ES2143981T3 - Fabricacion de guias de onda opticas en forma de canal de linbo3. - Google Patents
Fabricacion de guias de onda opticas en forma de canal de linbo3.Info
- Publication number
- ES2143981T3 ES2143981T3 ES92107895T ES92107895T ES2143981T3 ES 2143981 T3 ES2143981 T3 ES 2143981T3 ES 92107895 T ES92107895 T ES 92107895T ES 92107895 T ES92107895 T ES 92107895T ES 2143981 T3 ES2143981 T3 ES 2143981T3
- Authority
- ES
- Spain
- Prior art keywords
- optical
- communications
- protons
- definition
- exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/1204—Lithium niobate (LiNbO3)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12169—Annealing
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
LA INVENCION SE REFIERE A UN PROCESO DE MANUFACTURACION PARA GUIAS OPTICAS DE CANAL DE TIPO SIMPLE DE ALTO RENDIMIENTO, OBTENIDAS SOBRE LA SUPERFICIE X DEL LINBO3, EL PROCESO SE BASA EN CINCO PASOS SUCESIVOS: LA DEFINICION DEL CAMINO OPTICO MEDIANTE FOTOGRABACION, LA DEPOSITACION DE LA CAPA DIELECTRICA, LA DEFINICION DE LA ELEVACION DE LOS CANALES, EL INTERCAMBIO DE PROTONES Y LA CICLIZACION TERMICA. LA INVENCION PERTENECE AL CAMPO DE LAS NUEVAS TECNOLOGIAS OPTICAS INTEGRADAS Y PUEDE APLICARSE ADECUADAMENTE A LA MANUFACTURACION DE DISPOSITIVOS MULTIFUNCION QUE SERAN INTERCONEXIONADOS CON FIBRAS OPTICAS PARA OBTENER SENSORES, DISPOSITIVOS DE COMUNICACIONES Y DISPOSITIVOS PARA PROCESAR SEÑALES DE MICROONDAS DE BANDA ANCHA. EL PROCESO SUMINISTRA UNAS GUIAS OPTICAS AUTOALINEADAS Y LAS CAPAS DIELECTRICAS REQUERIDAS PARA AISLAR LAS GUIAS DE LOS ELECTRODOS DE METAL EXPLOTANDO LAS CARACTERISTICAS DE CONSTRUCCION DEL PROCESO DE MANUFACTURACION QUE SE BASAN EN EL INTERCAMBIO DE PROTONES EN UN ACIDO BENZOICO DILUIDO CON BENZOATO DE LITIO, Y AL MISMO TIEMPO SE ELIMINA LA INESTABILIDAD DE LAS ESTRUCTURAS ELECTROOPTICAS DEBIDO A LA PRESENCIA DE LA CAPA AISLANTE POR ENCIMA DE LA GUIA OPTICA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITRM910316A IT1245961B (it) | 1991-05-10 | 1991-05-10 | Processo di fabbricazione di guide ottiche a canale in linbo3. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2143981T3 true ES2143981T3 (es) | 2000-06-01 |
Family
ID=11400136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES92107895T Expired - Lifetime ES2143981T3 (es) | 1991-05-10 | 1992-05-09 | Fabricacion de guias de onda opticas en forma de canal de linbo3. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5356523A (es) |
EP (1) | EP0518059B1 (es) |
DE (1) | DE69230680T2 (es) |
ES (1) | ES2143981T3 (es) |
IT (1) | IT1245961B (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2555942B2 (ja) * | 1993-08-27 | 1996-11-20 | 日本電気株式会社 | 光制御デバイス |
DE4339401C1 (de) * | 1993-11-18 | 1994-12-22 | Forschungszentrum Juelich Gmbh | Verfahren zur Herstellung einer Schichtstruktur und seine Verwendung |
ES2188360B1 (es) * | 2001-03-07 | 2005-02-16 | Universitat Politecnica De Catalunya | Modulador de fase electrooptico autooscilante. |
EP1645361A1 (de) | 2004-10-11 | 2006-04-12 | Knoll Maschinenbau Gmbh | Schneidvorrichtung zum Zerkleinern von Spänen |
CN100510814C (zh) * | 2007-12-29 | 2009-07-08 | 上海亨通光电科技有限公司 | 高温质子交换的LiNbO3光波导制造方法 |
CN112130253B (zh) * | 2020-09-08 | 2021-07-23 | 派尼尔科技(天津)有限公司 | 一种在z切铌酸锂薄膜上制作y传脊型光波导的方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4561718A (en) * | 1983-08-22 | 1985-12-31 | Sperry Corporation | Photoelastic effect optical waveguides |
DE3417732A1 (de) * | 1984-05-12 | 1986-07-10 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum aufbringen von siliziumhaltigen schichten auf substraten durch katodenzerstaeubung und zerstaeubungskatode zur durchfuehrung des verfahrens |
US4775208A (en) * | 1986-06-06 | 1988-10-04 | Polaroid Corporation | Planar waveguide mode converter device |
JPS6370203A (ja) * | 1986-09-11 | 1988-03-30 | Brother Ind Ltd | 屈折率分布型光導波路レンズの製造方法 |
FR2613085B1 (fr) * | 1987-03-25 | 1989-06-09 | Carenco Alain | Procede pour augmenter localement les indices de refraction d'un materiau electro-optique utilisable en optique guidee et materiau obtenu par ce procede |
JPS6465841A (en) * | 1987-09-07 | 1989-03-13 | Fujitsu Ltd | Formation of pattern |
CA1324261C (en) * | 1988-05-03 | 1993-11-16 | Jeffrey Bruce Bindell | Proton-exchange method of forming optical waveguides |
KR920005445B1 (ko) * | 1989-08-10 | 1992-07-04 | 한국과학기술원 | 광도파로 제작방법 및 구조 |
EP0425076A3 (en) * | 1989-10-27 | 1991-10-30 | Litton Systems Inc. | Process for making intergrated optics chips having high electro-optic coefficients |
US5018811A (en) * | 1990-07-18 | 1991-05-28 | Northrop Corporation | Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same |
US5062688A (en) * | 1990-09-14 | 1991-11-05 | Nippon Sheet Glass Co., Ltd. | Flat plate optical element and method for preparing the same |
-
1991
- 1991-05-10 IT ITRM910316A patent/IT1245961B/it active IP Right Grant
-
1992
- 1992-05-09 EP EP92107895A patent/EP0518059B1/en not_active Expired - Lifetime
- 1992-05-09 DE DE69230680T patent/DE69230680T2/de not_active Expired - Fee Related
- 1992-05-09 ES ES92107895T patent/ES2143981T3/es not_active Expired - Lifetime
- 1992-05-11 US US07/882,146 patent/US5356523A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69230680D1 (de) | 2000-03-23 |
EP0518059B1 (en) | 2000-02-16 |
US5356523A (en) | 1994-10-18 |
ITRM910316A0 (it) | 1991-05-10 |
IT1245961B (it) | 1994-11-07 |
DE69230680T2 (de) | 2000-08-17 |
EP0518059A1 (en) | 1992-12-16 |
ITRM910316A1 (it) | 1992-11-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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