ES2143981T3 - Fabricacion de guias de onda opticas en forma de canal de linbo3. - Google Patents

Fabricacion de guias de onda opticas en forma de canal de linbo3.

Info

Publication number
ES2143981T3
ES2143981T3 ES92107895T ES92107895T ES2143981T3 ES 2143981 T3 ES2143981 T3 ES 2143981T3 ES 92107895 T ES92107895 T ES 92107895T ES 92107895 T ES92107895 T ES 92107895T ES 2143981 T3 ES2143981 T3 ES 2143981T3
Authority
ES
Spain
Prior art keywords
optical
communications
protons
definition
exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92107895T
Other languages
English (en)
Inventor
Antonello Vannucci
Mauro Varasi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MBDA Italia SpA
Original Assignee
Alenia Marconi Systems SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alenia Marconi Systems SpA filed Critical Alenia Marconi Systems SpA
Application granted granted Critical
Publication of ES2143981T3 publication Critical patent/ES2143981T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

LA INVENCION SE REFIERE A UN PROCESO DE MANUFACTURACION PARA GUIAS OPTICAS DE CANAL DE TIPO SIMPLE DE ALTO RENDIMIENTO, OBTENIDAS SOBRE LA SUPERFICIE X DEL LINBO3, EL PROCESO SE BASA EN CINCO PASOS SUCESIVOS: LA DEFINICION DEL CAMINO OPTICO MEDIANTE FOTOGRABACION, LA DEPOSITACION DE LA CAPA DIELECTRICA, LA DEFINICION DE LA ELEVACION DE LOS CANALES, EL INTERCAMBIO DE PROTONES Y LA CICLIZACION TERMICA. LA INVENCION PERTENECE AL CAMPO DE LAS NUEVAS TECNOLOGIAS OPTICAS INTEGRADAS Y PUEDE APLICARSE ADECUADAMENTE A LA MANUFACTURACION DE DISPOSITIVOS MULTIFUNCION QUE SERAN INTERCONEXIONADOS CON FIBRAS OPTICAS PARA OBTENER SENSORES, DISPOSITIVOS DE COMUNICACIONES Y DISPOSITIVOS PARA PROCESAR SEÑALES DE MICROONDAS DE BANDA ANCHA. EL PROCESO SUMINISTRA UNAS GUIAS OPTICAS AUTOALINEADAS Y LAS CAPAS DIELECTRICAS REQUERIDAS PARA AISLAR LAS GUIAS DE LOS ELECTRODOS DE METAL EXPLOTANDO LAS CARACTERISTICAS DE CONSTRUCCION DEL PROCESO DE MANUFACTURACION QUE SE BASAN EN EL INTERCAMBIO DE PROTONES EN UN ACIDO BENZOICO DILUIDO CON BENZOATO DE LITIO, Y AL MISMO TIEMPO SE ELIMINA LA INESTABILIDAD DE LAS ESTRUCTURAS ELECTROOPTICAS DEBIDO A LA PRESENCIA DE LA CAPA AISLANTE POR ENCIMA DE LA GUIA OPTICA.
ES92107895T 1991-05-10 1992-05-09 Fabricacion de guias de onda opticas en forma de canal de linbo3. Expired - Lifetime ES2143981T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITRM910316A IT1245961B (it) 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3.

Publications (1)

Publication Number Publication Date
ES2143981T3 true ES2143981T3 (es) 2000-06-01

Family

ID=11400136

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92107895T Expired - Lifetime ES2143981T3 (es) 1991-05-10 1992-05-09 Fabricacion de guias de onda opticas en forma de canal de linbo3.

Country Status (5)

Country Link
US (1) US5356523A (es)
EP (1) EP0518059B1 (es)
DE (1) DE69230680T2 (es)
ES (1) ES2143981T3 (es)
IT (1) IT1245961B (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2555942B2 (ja) * 1993-08-27 1996-11-20 日本電気株式会社 光制御デバイス
DE4339401C1 (de) * 1993-11-18 1994-12-22 Forschungszentrum Juelich Gmbh Verfahren zur Herstellung einer Schichtstruktur und seine Verwendung
ES2188360B1 (es) * 2001-03-07 2005-02-16 Universitat Politecnica De Catalunya Modulador de fase electrooptico autooscilante.
EP1645361A1 (de) 2004-10-11 2006-04-12 Knoll Maschinenbau Gmbh Schneidvorrichtung zum Zerkleinern von Spänen
CN100510814C (zh) * 2007-12-29 2009-07-08 上海亨通光电科技有限公司 高温质子交换的LiNbO3光波导制造方法
CN112130253B (zh) * 2020-09-08 2021-07-23 派尼尔科技（天津）有限公司 一种在z切铌酸锂薄膜上制作y传脊型光波导的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561718A (en) * 1983-08-22 1985-12-31 Sperry Corporation Photoelastic effect optical waveguides
DE3417732A1 (de) * 1984-05-12 1986-07-10 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum aufbringen von siliziumhaltigen schichten auf substraten durch katodenzerstaeubung und zerstaeubungskatode zur durchfuehrung des verfahrens
US4775208A (en) * 1986-06-06 1988-10-04 Polaroid Corporation Planar waveguide mode converter device
JPS6370203A (ja) * 1986-09-11 1988-03-30 Brother Ind Ltd 屈折率分布型光導波路レンズの製造方法
FR2613085B1 (fr) * 1987-03-25 1989-06-09 Carenco Alain Procede pour augmenter localement les indices de refraction d'un materiau electro-optique utilisable en optique guidee et materiau obtenu par ce procede
JPS6465841A (en) * 1987-09-07 1989-03-13 Fujitsu Ltd Formation of pattern
CA1324261C (en) * 1988-05-03 1993-11-16 Jeffrey Bruce Bindell Proton-exchange method of forming optical waveguides
KR920005445B1 (ko) * 1989-08-10 1992-07-04 한국과학기술원 광도파로 제작방법 및 구조
EP0425076A3 (en) * 1989-10-27 1991-10-30 Litton Systems Inc. Process for making intergrated optics chips having high electro-optic coefficients
US5018811A (en) * 1990-07-18 1991-05-28 Northrop Corporation Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same
US5062688A (en) * 1990-09-14 1991-11-05 Nippon Sheet Glass Co., Ltd. Flat plate optical element and method for preparing the same

Also Published As

Publication number Publication date
DE69230680D1 (de) 2000-03-23
EP0518059B1 (en) 2000-02-16
US5356523A (en) 1994-10-18
ITRM910316A0 (it) 1991-05-10
IT1245961B (it) 1994-11-07
DE69230680T2 (de) 2000-08-17
EP0518059A1 (en) 1992-12-16
ITRM910316A1 (it) 1992-11-10

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