IT1245961B - Processo di fabbricazione di guide ottiche a canale in linbo3. - Google Patents

Processo di fabbricazione di guide ottiche a canale in linbo3.

Info

Publication number
IT1245961B
IT1245961B ITRM910316A ITRM910316A IT1245961B IT 1245961 B IT1245961 B IT 1245961B IT RM910316 A ITRM910316 A IT RM910316A IT RM910316 A ITRM910316 A IT RM910316A IT 1245961 B IT1245961 B IT 1245961B
Authority
IT
Italy
Prior art keywords
optical
manufacturing process
optical guide
dielectric layer
proton exchange
Prior art date
Application number
ITRM910316A
Other languages
English (en)
Inventor
Antonello Vannucci
Mauro Varasi
Original Assignee
Alenia Aeritalia & Selenia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alenia Aeritalia & Selenia filed Critical Alenia Aeritalia & Selenia
Priority to ITRM910316A priority Critical patent/IT1245961B/it
Publication of ITRM910316A0 publication Critical patent/ITRM910316A0/it
Priority to DE69230680T priority patent/DE69230680T2/de
Priority to ES92107895T priority patent/ES2143981T3/es
Priority to EP92107895A priority patent/EP0518059B1/en
Priority to US07/882,146 priority patent/US5356523A/en
Publication of ITRM910316A1 publication Critical patent/ITRM910316A1/it
Application granted granted Critical
Publication of IT1245961B publication Critical patent/IT1245961B/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/1204—Lithium niobate (LiNbO3)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

Processo di fabbricazione di guide ottiche monomodali a canale ad elevate prestazioni elettro-ottiche ricavate sulla superficie "x" del LiNbO3, che consta essenzialmente di cinque fasi successive: definizione fotolitografica del percorso circuitale ottico, deposizione dello strato dielettrico, definizione dei canali per "lift off", scambio protonico e trattamento termico. Esso si colloca nel campo delle tecnologie per ottica integrata, e può essere applicato vantaggiosamente nella fabbricazione di dispositivi multifunzionali da interfacciare a fibre ottiche per la realizzazione di sensori, dispositivi per telecomunicazioni e per la elaborazione di segnali e microonde a larga banda.Con detto processo si realizza in modo autoallineante la guida ottica e lo strato dielettrico necessario all'isolamento tra essa e gli elettrodi metallici, sfruttando le caratteristiche intrinseche del processo di fabbricazione di scambio protonico in Acido Benzoico diluito con Litio Benzoato, e nello stesso tempo viene eliminato il problema della instabilità temporale della struttura elettro-ottica causata dalla presenza dello strato di isolamento anche al di sopra della guida ottica.
ITRM910316A 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3. IT1245961B (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITRM910316A IT1245961B (it) 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3.
DE69230680T DE69230680T2 (de) 1991-05-10 1992-05-09 Herstellung von optischen LiNbO3-Kanalwellenleitern
ES92107895T ES2143981T3 (es) 1991-05-10 1992-05-09 Fabricacion de guias de onda opticas en forma de canal de linbo3.
EP92107895A EP0518059B1 (en) 1991-05-10 1992-05-09 Manufacturing of LiNbO3 channel optical guides
US07/882,146 US5356523A (en) 1991-05-10 1992-05-11 Method of making LiNbO3 channel optical guides

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITRM910316A IT1245961B (it) 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3.

Publications (3)

Publication Number Publication Date
ITRM910316A0 ITRM910316A0 (it) 1991-05-10
ITRM910316A1 ITRM910316A1 (it) 1992-11-10
IT1245961B true IT1245961B (it) 1994-11-07

Family

ID=11400136

Family Applications (1)

Application Number Title Priority Date Filing Date
ITRM910316A IT1245961B (it) 1991-05-10 1991-05-10 Processo di fabbricazione di guide ottiche a canale in linbo3.

Country Status (5)

Country Link
US (1) US5356523A (it)
EP (1) EP0518059B1 (it)
DE (1) DE69230680T2 (it)
ES (1) ES2143981T3 (it)
IT (1) IT1245961B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2555942B2 (ja) * 1993-08-27 1996-11-20 日本電気株式会社 光制御デバイス
DE4339401C1 (de) * 1993-11-18 1994-12-22 Forschungszentrum Juelich Gmbh Verfahren zur Herstellung einer Schichtstruktur und seine Verwendung
ES2188360B1 (es) * 2001-03-07 2005-02-16 Universitat Politecnica De Catalunya Modulador de fase electrooptico autooscilante.
EP1645361A1 (de) 2004-10-11 2006-04-12 Knoll Maschinenbau Gmbh Schneidvorrichtung zum Zerkleinern von Spänen
CN100510814C (zh) * 2007-12-29 2009-07-08 上海亨通光电科技有限公司 高温质子交换的LiNbO3光波导制造方法
CN112130253B (zh) * 2020-09-08 2021-07-23 派尼尔科技（天津）有限公司 一种在z切铌酸锂薄膜上制作y传脊型光波导的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561718A (en) * 1983-08-22 1985-12-31 Sperry Corporation Photoelastic effect optical waveguides
DE3417732A1 (de) * 1984-05-12 1986-07-10 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum aufbringen von siliziumhaltigen schichten auf substraten durch katodenzerstaeubung und zerstaeubungskatode zur durchfuehrung des verfahrens
US4775208A (en) * 1986-06-06 1988-10-04 Polaroid Corporation Planar waveguide mode converter device
JPS6370203A (ja) * 1986-09-11 1988-03-30 Brother Ind Ltd 屈折率分布型光導波路レンズの製造方法
FR2613085B1 (fr) * 1987-03-25 1989-06-09 Carenco Alain Procede pour augmenter localement les indices de refraction d'un materiau electro-optique utilisable en optique guidee et materiau obtenu par ce procede
JPS6465841A (en) * 1987-09-07 1989-03-13 Fujitsu Ltd Formation of pattern
CA1324261C (en) * 1988-05-03 1993-11-16 Jeffrey Bruce Bindell Proton-exchange method of forming optical waveguides
KR920005445B1 (ko) * 1989-08-10 1992-07-04 한국과학기술원 광도파로 제작방법 및 구조
EP0425076A3 (en) * 1989-10-27 1991-10-30 Litton Systems Inc. Process for making intergrated optics chips having high electro-optic coefficients
US5018811A (en) * 1990-07-18 1991-05-28 Northrop Corporation Asymmetric optical waveguides for minimizing bending losses and techniques for fabricating same
US5062688A (en) * 1990-09-14 1991-11-05 Nippon Sheet Glass Co., Ltd. Flat plate optical element and method for preparing the same

Also Published As

Publication number Publication date
US5356523A (en) 1994-10-18
ITRM910316A0 (it) 1991-05-10
DE69230680T2 (de) 2000-08-17
ITRM910316A1 (it) 1992-11-10
DE69230680D1 (de) 2000-03-23
EP0518059B1 (en) 2000-02-16
ES2143981T3 (es) 2000-06-01
EP0518059A1 (en) 1992-12-16

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Legal Events

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0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970128