ES2076564T3 - Dispositivo superconductor con micropuente, con tc alta, que utiliza union sns borde a borde escalonada. - Google Patents
Dispositivo superconductor con micropuente, con tc alta, que utiliza union sns borde a borde escalonada.Info
- Publication number
- ES2076564T3 ES2076564T3 ES92100564T ES92100564T ES2076564T3 ES 2076564 T3 ES2076564 T3 ES 2076564T3 ES 92100564 T ES92100564 T ES 92100564T ES 92100564 T ES92100564 T ES 92100564T ES 2076564 T3 ES2076564 T3 ES 2076564T3
- Authority
- ES
- Spain
- Prior art keywords
- planar substrate
- substrate surface
- axis
- exposed
- lower planar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
- H10N60/124—Josephson-effect devices comprising high-Tc ceramic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
- H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
- Y10S505/702—Josephson junction present
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/731—Sputter coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/742—Annealing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Measuring Magnetic Variables (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
SE PRESENTA UN DISPOSITIVO SUPER CONDUCTOR MICROPUENTE QUE INCLUYE UN SUBSTRATO (26), HECHO DE UN MATERIAL TAL COMO LAAIO SUB 3 QUE TIENE UNA SUPERFICIE DE SUBSTRATO INFERIOR PLANA (40), UNA SUPERFICIE INCLINADA (42) QUE TIENE UNA INCLINACION HACIA ARRIBA DE ENTRE 20 Y 80 IE DEL SUBSTRATO INFERIOR PLANO (40), Y UNA SUPERFICIE DE SUBSTRATO PLANO SUPERIOR (44) PARALELA A LA SUPERFICIE DE SUBSTRATO PLANO INFERIOR Y SEPARADA DE LA SUPERFICIE DEL SUBSTRATO PLANO INFERIOR POR LA SUPERFICIE INCLINADA. UNA CAPA DE UN MATERIAL SEMICONDUCTOR (50) ORIENTADA EN EL SENTIDO DEL EJE C, HECHO DE UN MATERIAL TAL COMO YBA SUB 2 CU SUB 3 O SUB 7-X, SE DEPOSITA DE FORMA EPITOAXIAL SOBRE LA SUPERFICIE DEL SUBSTRATO INFERIOR PLANO, Y TIENE UN BORDE EN DIRECCION AL EJE A ADYACENTE A LA INTERSECCION CON LA SUPERFICIE DEL SUBSTRATO PLANO INFERIOR CON LA SUPERFICIE INCLINADA. EL BORDE EXPUESTO AL EJE A ESTA INCLINADO DESDE LA INTERSECCION. UNA CAPA DE UN MATERIAL SUPERCONDUCTOR (52) ORIENTADO HACIA EL EJE C SE DEPOSITA DE FORMA EPITOAXIAL SOBRE LA SUPERFICIE DEL SUBSTRATO PLANO SUPERIOR, Y PRESENTA UN BORDE EXPUESTO AL EJE A ADYACENTE A LA SUPERFICIE INCLINADA. UN HUECO (62) DESCANSA ENTRE LOS DOS BORDES EXPUESTOS AL EJE A. UNA CAPA DE UN MATERIAL NO SUPERCONDUCTOR (60) TAL COMO LA PLATA, DESCANSA EN EL HUECO ENTRE LOS DOS BORDES EXPUESTOS AL EJE A MEDIANTE LO CUAL SE DEFINE UN MICROPUENTE SUPERCONDUCTOR SNS. LAS CAPAS DEL MATERIAL SEMICONDUCTOR TIENEN UN DISEÑO PREFERIBLEMENTE ESCOGIDO PARA FORMAR UNA JUNTA JOSEPHSON TAL COMO UN DISPOSITIVO DE INTERFERENCIA DE QUANTUM SUPERCONDUCTOR.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/644,905 US5134117A (en) | 1991-01-22 | 1991-01-22 | High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2076564T3 true ES2076564T3 (es) | 1995-11-01 |
Family
ID=24586835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES92100564T Expired - Lifetime ES2076564T3 (es) | 1991-01-22 | 1992-01-15 | Dispositivo superconductor con micropuente, con tc alta, que utiliza union sns borde a borde escalonada. |
Country Status (8)
Country | Link |
---|---|
US (3) | US5134117A (es) |
EP (1) | EP0496259B1 (es) |
JP (2) | JP3330969B2 (es) |
AT (1) | ATE126628T1 (es) |
DE (1) | DE69204080T2 (es) |
DK (1) | DK0496259T3 (es) |
ES (1) | ES2076564T3 (es) |
GR (1) | GR3017972T3 (es) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0725449B1 (en) * | 1990-05-31 | 1999-02-03 | Osaka Gas Company Limited | A method for fabricating a Josephson device |
USRE37587E1 (en) * | 1990-12-28 | 2002-03-19 | Sumitomo Electric Industries Ltd. | Superconducting quantum interference device formed of oxide superconductor thin film |
US5134117A (en) * | 1991-01-22 | 1992-07-28 | Biomagnetic Technologies, Inc. | High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction |
JP3568547B2 (ja) * | 1992-05-29 | 2004-09-22 | 住友電気工業株式会社 | ジョセフソン接合構造体 |
US5612290A (en) * | 1992-05-29 | 1997-03-18 | Sumitomo Electric Industries, Ltd. | Josephson junction device formed of oxide superconductor |
JPH05335638A (ja) * | 1992-05-29 | 1993-12-17 | Sumitomo Electric Ind Ltd | ジョセフソン接合構造体およびその作製方法 |
US6362617B1 (en) * | 1994-09-26 | 2002-03-26 | The Boeing Company | Wideband, high dynamic range antenna |
US5994891A (en) * | 1994-09-26 | 1999-11-30 | The Boeing Company | Electrically small, wideband, high dynamic range antenna having a serial array of optical modulators |
US5600242A (en) * | 1994-09-26 | 1997-02-04 | The Boeing Company | Electrically small broadband high linear dynamic range deceiver including a plurality of active antenna elements |
US5567673A (en) * | 1994-10-17 | 1996-10-22 | E. I. Du Pont De Nemours And Company | Process of forming multilayered Tl-containing superconducting composites |
US5667650A (en) * | 1995-02-14 | 1997-09-16 | E. I. Du Pont De Nemours And Company | High flow gas manifold for high rate, off-axis sputter deposition |
DE19516611C1 (de) * | 1995-05-10 | 1996-09-05 | Forschungszentrum Juelich Gmbh | Hochtemperatur Supraleiter-Normalleiter-Supraleiter-(HTSL-SNS-)Kontakt, Verfahren zu seiner Herstellung sowie dessen Verwendung |
JPH098368A (ja) * | 1995-06-23 | 1997-01-10 | Oki Electric Ind Co Ltd | 高温超電導ジョセフソン素子およびその製造方法 |
AU7458796A (en) | 1995-10-24 | 1997-05-15 | Regents Of The University Of California, The | High temperature superconducting josephson junctions and squids |
DE19608564C2 (de) * | 1996-03-07 | 1999-09-02 | Forschungszentrum Juelich Gmbh | Supraleiter/Halbleiter/ Supraleiter-Stufenkontakt |
US5776863A (en) * | 1996-07-08 | 1998-07-07 | Trw Inc. | In-situ fabrication of a superconductor hetero-epitaxial Josephson junction |
CN1111314C (zh) * | 1996-10-31 | 2003-06-11 | 南开大学 | 高温超导薄膜衬底台阶本征约瑟夫森结阵及其制备方法 |
US5892243A (en) * | 1996-12-06 | 1999-04-06 | Trw Inc. | High-temperature SSNS and SNS Josephson junction and method of making junction |
US20040134967A1 (en) * | 1997-05-22 | 2004-07-15 | Conductis, Inc. | Interface engineered high-Tc Josephson junctions |
US20040266627A1 (en) * | 1997-05-22 | 2004-12-30 | Moeckly Brian H. | High-temperature superconductor devices and methods of forming the same |
DE10158096B4 (de) * | 2001-11-27 | 2006-01-12 | Forschungszentrum Jülich GmbH | Bauteil für ein SQUID-Mikroskop für Raumtemperaturproben sowie zugehörige Verwendung |
US7615385B2 (en) | 2006-09-20 | 2009-11-10 | Hypres, Inc | Double-masking technique for increasing fabrication yield in superconducting electronics |
RU2538931C2 (ru) * | 2013-05-06 | 2015-01-10 | Общество с ограниченной ответственностью "Инженерные решения" | СПОСОБ ФОРМИРОВАНИЯ YBa2Cu3O7-x-Х ПЛЕНОК С ВЫСОКОЙ ТОКОНЕСУЩЕЙ СПОСОБНОСТЬЮ НА ЗОЛОТОМ БУФЕРНОМ ПОДСЛОЕ |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5588382A (en) * | 1978-12-27 | 1980-07-04 | Fujitsu Ltd | Preparation of tunnel junction type josephson element |
US4264916A (en) * | 1979-12-26 | 1981-04-28 | Bell Telephone Laboratories, Incorporated | Semiconductor barrier Josephson junction |
US4414738A (en) * | 1981-02-02 | 1983-11-15 | The United States Of America As Represented By The Secretary Of The Navy | Optical lithographic technique for fabricating submicron-sized Josephson microbridges |
US4454522A (en) * | 1981-11-05 | 1984-06-12 | The Board Of Trustees Of The Leland Stanford Junior University | Microbridge superconducting device having support with stepped parallel surfaces |
US4630081A (en) * | 1984-12-19 | 1986-12-16 | Eaton Corporation | MOMOM tunnel emission transistor |
US4831421A (en) * | 1985-10-11 | 1989-05-16 | International Business Machines Corporation | Superconducting device |
US4925829A (en) * | 1987-05-26 | 1990-05-15 | Sumitomo Electric Industries, Ltd. | Method for preparing thin film of compound oxide superconductor by ion beam techniques |
JPS63314850A (ja) * | 1987-06-18 | 1988-12-22 | Fujitsu Ltd | 半導体装置 |
JP2624690B2 (ja) * | 1987-07-03 | 1997-06-25 | 株式会社日立製作所 | 酸化物超電導装置およびその製造方法 |
JPS6411378A (en) * | 1987-07-06 | 1989-01-13 | Hitachi Ltd | Formation of josephson element |
JPH01161881A (ja) * | 1987-12-18 | 1989-06-26 | Nec Corp | ジョセフソン素子およびその製造方法 |
JPH01241874A (ja) * | 1988-03-23 | 1989-09-26 | Mitsubishi Electric Corp | ジョゼフソン接合素子 |
JPH02184087A (ja) * | 1989-01-11 | 1990-07-18 | Agency Of Ind Science & Technol | 超電導弱結合素子の製造方法 |
US5100694A (en) * | 1989-08-01 | 1992-03-31 | The United States Of America As Represented By The Administrator National Aeronautics And Space Administration | Method for producing edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure |
CA2052970C (en) * | 1990-10-08 | 1996-07-02 | Takao Nakamura | Superconducting device having an extremely thin superconducting channel formed of oxide superconductor material and method for manufacturing the same |
US5134117A (en) * | 1991-01-22 | 1992-07-28 | Biomagnetic Technologies, Inc. | High tc microbridge superconductor device utilizing stepped edge-to-edge sns junction |
-
1991
- 1991-01-22 US US07/644,905 patent/US5134117A/en not_active Expired - Lifetime
-
1992
- 1992-01-15 DK DK92100564.1T patent/DK0496259T3/da active
- 1992-01-15 ES ES92100564T patent/ES2076564T3/es not_active Expired - Lifetime
- 1992-01-15 EP EP92100564A patent/EP0496259B1/en not_active Expired - Lifetime
- 1992-01-15 DE DE69204080T patent/DE69204080T2/de not_active Expired - Fee Related
- 1992-01-15 AT AT92100564T patent/ATE126628T1/de not_active IP Right Cessation
- 1992-01-21 JP JP03017292A patent/JP3330969B2/ja not_active Expired - Fee Related
- 1992-06-05 US US07/894,079 patent/US5367178A/en not_active Expired - Lifetime
-
1994
- 1994-11-22 US US08/344,273 patent/US5595959A/en not_active Expired - Fee Related
-
1995
- 1995-11-06 GR GR950403081T patent/GR3017972T3/el unknown
-
2002
- 2002-04-15 JP JP2002112483A patent/JP3589656B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3330969B2 (ja) | 2002-10-07 |
GR3017972T3 (en) | 1996-02-29 |
US5134117A (en) | 1992-07-28 |
DE69204080D1 (de) | 1995-09-21 |
US5595959A (en) | 1997-01-21 |
JP3589656B2 (ja) | 2004-11-17 |
EP0496259A1 (en) | 1992-07-29 |
DE69204080T2 (de) | 1996-01-11 |
ATE126628T1 (de) | 1995-09-15 |
DK0496259T3 (da) | 1995-12-18 |
EP0496259B1 (en) | 1995-08-16 |
JPH0582845A (ja) | 1993-04-02 |
JP2003051626A (ja) | 2003-02-21 |
US5367178A (en) | 1994-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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