ES2056543T3 - Bomba de doble membrana. - Google Patents
Bomba de doble membrana.Info
- Publication number
- ES2056543T3 ES2056543T3 ES91115450T ES91115450T ES2056543T3 ES 2056543 T3 ES2056543 T3 ES 2056543T3 ES 91115450 T ES91115450 T ES 91115450T ES 91115450 T ES91115450 T ES 91115450T ES 2056543 T3 ES2056543 T3 ES 2056543T3
- Authority
- ES
- Spain
- Prior art keywords
- slide valve
- control slide
- diaphragm
- membrane pump
- double membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
- F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
- F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L25/00—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means
- F01L25/08—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means by electric or magnetic means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/86622—Motor-operated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
BOMBA DE DOBLE MEMBRANA CON MEMBRANAS CONECTADAS ENTRE SI POR MEDIO DE UNA BARRA DE ACOPLAMIENTO, QUE DIVIDEN DOS CAMARAS DE MEMBRANA, CON UNA CORREDERA DE CONTROL (12) DESPLAZABLE EN FUNCION DE LA POSICION DE LAS MEMBRANAS (24) CON ORGANOS DE CIERRE (13) PARA LA LIBERACION Y COBERTURA ALTERNATIVAS DE CANALES DE CONTROL (2, 3, 4, 5, 6) DISPUESTOS EN UNA CARCASA DE CORREDERA DE CONTROL (1) PARA LA IMPULSION Y DESCARGA ALTERNATIVAS DE UNA CAMARA DE MEDIO DE IMPULSION ASI COMO CON UN ELEMENTO DE ACTIVACION (16, 17; 22, 28) ACOPLADO CON EL MOVIMIENTO DE LA MEMBRANA ASI COMO MAGNETICAMENTE CON LA CORREDERA DE CONTROL.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4031872 | 1990-10-08 | ||
DE19914106180 DE4106180A1 (de) | 1990-10-08 | 1991-02-27 | Doppel-membranpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2056543T3 true ES2056543T3 (es) | 1994-10-01 |
Family
ID=25897542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES91115450T Expired - Lifetime ES2056543T3 (es) | 1990-10-08 | 1991-09-12 | Bomba de doble membrana. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5222876A (es) |
EP (1) | EP0480192B1 (es) |
JP (1) | JPH086693B2 (es) |
AT (1) | ATE108518T1 (es) |
DE (1) | DE4106180A1 (es) |
DK (1) | DK0480192T3 (es) |
ES (1) | ES2056543T3 (es) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5325762A (en) * | 1992-10-29 | 1994-07-05 | Nordson Corporation | Fluid pressure operated piston engine assembly |
DE4427981C1 (de) * | 1994-08-08 | 1995-12-07 | Huewel Ralf | Hydraulisch oder pneumatisch betriebene Kolben- und/oder Membran-Pumpe |
US5611678A (en) * | 1995-04-20 | 1997-03-18 | Wilden Pump & Engineering Co. | Shaft seal arrangement for air driven diaphragm pumping systems |
NL1001954C2 (nl) | 1995-12-21 | 1997-06-24 | Verder Holding B V | Stuurklep en pomp voorzien van stuurklep. |
TW539918B (en) * | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
DE19738779C2 (de) * | 1997-09-04 | 2003-06-12 | Almatec Maschb Gmbh | Umsteuersystem für eine druckgetriebene Membranpumpe |
KR100744888B1 (ko) * | 1999-11-02 | 2007-08-01 | 동경 엘렉트론 주식회사 | 소재를 초임계 처리하기 위한 장치 및 방법 |
US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
TW499548B (en) | 2000-06-02 | 2002-08-21 | Tokyo Electron Ltd | Dual diaphragm pump |
EP1303870A2 (en) * | 2000-07-26 | 2003-04-23 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
US7001468B1 (en) | 2002-02-15 | 2006-02-21 | Tokyo Electron Limited | Pressure energized pressure vessel opening and closing device and method of providing therefor |
WO2003071173A1 (en) * | 2002-02-15 | 2003-08-28 | Supercritical Systems Inc. | Pressure enchanced diaphragm valve |
US7387868B2 (en) | 2002-03-04 | 2008-06-17 | Tokyo Electron Limited | Treatment of a dielectric layer using supercritical CO2 |
US6722642B1 (en) | 2002-11-06 | 2004-04-20 | Tokyo Electron Limited | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
US7021635B2 (en) * | 2003-02-06 | 2006-04-04 | Tokyo Electron Limited | Vacuum chuck utilizing sintered material and method of providing thereof |
US7077917B2 (en) * | 2003-02-10 | 2006-07-18 | Tokyo Electric Limited | High-pressure processing chamber for a semiconductor wafer |
US7225820B2 (en) * | 2003-02-10 | 2007-06-05 | Tokyo Electron Limited | High-pressure processing chamber for a semiconductor wafer |
US7163380B2 (en) | 2003-07-29 | 2007-01-16 | Tokyo Electron Limited | Control of fluid flow in the processing of an object with a fluid |
US20050034660A1 (en) * | 2003-08-11 | 2005-02-17 | Supercritical Systems, Inc. | Alignment means for chamber closure to reduce wear on surfaces |
US20050035514A1 (en) * | 2003-08-11 | 2005-02-17 | Supercritical Systems, Inc. | Vacuum chuck apparatus and method for holding a wafer during high pressure processing |
US20050067002A1 (en) * | 2003-09-25 | 2005-03-31 | Supercritical Systems, Inc. | Processing chamber including a circulation loop integrally formed in a chamber housing |
US7186093B2 (en) * | 2004-10-05 | 2007-03-06 | Tokyo Electron Limited | Method and apparatus for cooling motor bearings of a high pressure pump |
US7250374B2 (en) | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
US7307019B2 (en) | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
US7491036B2 (en) | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
US20060135047A1 (en) * | 2004-12-22 | 2006-06-22 | Alexei Sheydayi | Method and apparatus for clamping a substrate in a high pressure processing system |
US7434590B2 (en) | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
US7140393B2 (en) | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
US20060134332A1 (en) * | 2004-12-22 | 2006-06-22 | Darko Babic | Precompressed coating of internal members in a supercritical fluid processing system |
US7291565B2 (en) | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
US7435447B2 (en) | 2005-02-15 | 2008-10-14 | Tokyo Electron Limited | Method and system for determining flow conditions in a high pressure processing system |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US7380984B2 (en) * | 2005-03-28 | 2008-06-03 | Tokyo Electron Limited | Process flow thermocouple |
US7494107B2 (en) | 2005-03-30 | 2009-02-24 | Supercritical Systems, Inc. | Gate valve for plus-atmospheric pressure semiconductor process vessels |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
US7524383B2 (en) | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
DE202010004957U1 (de) * | 2010-04-12 | 2011-08-26 | Timmer-Pneumatik Gmbh | Fluid-Steuerventilsystem für eine Pumpensteuerung |
US8622720B2 (en) * | 2010-09-09 | 2014-01-07 | Tom M. Simmons | Reciprocating fluid pumps including magnets and related methods |
IT201800004121A1 (it) * | 2018-03-30 | 2019-09-30 | Miro Capitanio | Sistema valvolare antistallo bistabile |
EP3921639A4 (en) * | 2019-02-06 | 2022-03-16 | Siemens Healthcare Diagnostics, Inc. | LIQUID SENSOR ASSEMBLY, APPARATUS, AND METHODS |
EP3730786B1 (en) * | 2019-04-19 | 2022-12-28 | White Knight Fluid Handling Inc. | Reciprocating fluid pumps including magnets, and related assemblies, systems, and methods |
DE102021104548A1 (de) | 2021-02-25 | 2022-08-25 | Lutz Pumpen Gmbh | Mehrfachmembranpumpe |
US11746771B2 (en) * | 2021-04-16 | 2023-09-05 | Teryair Equipment Pvt. Ltd. | Actuator valve of an air operated double diaphragm pump |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2811979A (en) * | 1955-02-24 | 1957-11-05 | Frank G Presnell | Shuttle valve |
US3001360A (en) * | 1959-06-08 | 1961-09-26 | New York Air Brake Co | Engine starting system |
US3203439A (en) * | 1962-10-09 | 1965-08-31 | Beckett Harcum Co | Spool valve with magnetic hold |
US3192865A (en) * | 1963-09-10 | 1965-07-06 | Francis J Klempay | Hydraulically actuated pump |
US3304126A (en) * | 1965-02-15 | 1967-02-14 | Gorman Rupp Co | Material handling apparatus and methods |
SE412939B (sv) * | 1977-09-09 | 1980-03-24 | Kaelle Eur Control | Hydrauldriven deplacementpump serskilt for pumpning av tjocka och slitande medier |
DE2925144A1 (de) * | 1979-06-22 | 1981-01-22 | Bruss Foerdertechnik Kg | Doppelt wirkende membranpumpe |
DE3112434A1 (de) * | 1981-03-28 | 1982-10-07 | Depa GmbH, 4000 Düsseldorf | Druckluftgetriebene doppelmembran-pumpe |
DE3150976A1 (de) * | 1981-12-23 | 1983-06-30 | DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf | Druckluftgetriebene doppelmembranpumpe |
DE3310131A1 (de) * | 1983-03-21 | 1984-09-27 | DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf | Umsteuerventileinsatz fuer eine druckluftgetriebene doppelmembranpumpe |
US4509402A (en) * | 1983-06-08 | 1985-04-09 | Economics Laboratory, Inc. | Magnetic reversing mechanism |
FR2553149B1 (fr) * | 1983-10-07 | 1985-12-27 | Lagrandiere Marc De | Moteur a piston actionne hydrauliquement ou pneumatiquement et applications |
US4889035A (en) * | 1985-07-16 | 1989-12-26 | Thermo Electron Web Systems, Inc. | Magnetically actuated valve for cyclically operating piston-cylinder actuator |
SE8801423D0 (sv) * | 1988-04-18 | 1988-04-18 | Dominator Ab | Pneumatisk ventil for styrning av i synnerhet tryckluftdrivna membranpumpar |
DE3900718A1 (de) * | 1989-01-12 | 1990-07-26 | Depa Ges Fuer Verfahrenstechni | Verfahren und vorrichtung zur steuerung einer druckluftbetriebenen doppelmembranpumpe |
-
1991
- 1991-02-27 DE DE19914106180 patent/DE4106180A1/de active Granted
- 1991-09-12 ES ES91115450T patent/ES2056543T3/es not_active Expired - Lifetime
- 1991-09-12 AT AT91115450T patent/ATE108518T1/de not_active IP Right Cessation
- 1991-09-12 DK DK91115450T patent/DK0480192T3/da active
- 1991-09-12 EP EP19910115450 patent/EP0480192B1/de not_active Expired - Lifetime
- 1991-09-30 US US07/768,814 patent/US5222876A/en not_active Expired - Lifetime
- 1991-10-08 JP JP26022891A patent/JPH086693B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE108518T1 (de) | 1994-07-15 |
US5222876A (en) | 1993-06-29 |
EP0480192B1 (de) | 1994-07-13 |
DE4106180C2 (es) | 1992-09-10 |
JPH04234582A (ja) | 1992-08-24 |
EP0480192A1 (de) | 1992-04-15 |
JPH086693B2 (ja) | 1996-01-29 |
DK0480192T3 (da) | 1994-08-15 |
DE4106180A1 (de) | 1992-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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