EP3759261A1 - Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément - Google Patents

Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément

Info

Publication number
EP3759261A1
EP3759261A1 EP19701769.2A EP19701769A EP3759261A1 EP 3759261 A1 EP3759261 A1 EP 3759261A1 EP 19701769 A EP19701769 A EP 19701769A EP 3759261 A1 EP3759261 A1 EP 3759261A1
Authority
EP
European Patent Office
Prior art keywords
layer
wear
carbide
gradient
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19701769.2A
Other languages
German (de)
English (en)
Inventor
Michael Fraune
Marcus Guenther
Richard Braak
Gerald Schuetze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3759261A1 publication Critical patent/EP3759261A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1886—Details of valve seats not covered by groups F02M61/1866 - F02M61/188
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
    • F02M63/0012—Valves
    • F02M63/007—Details not provided for in, or of interest apart from, the apparatus of the groups F02M63/0014 - F02M63/0059
    • F02M63/0077—Valve seat details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/04—Arrangements for preventing erosion, not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
    • F02M2200/90—Selection of particular materials
    • F02M2200/9038—Coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
    • F02M2200/90—Selection of particular materials
    • F02M2200/9046—Multi-layered materials

Definitions

  • Wear protection coated metallic component in particular for a ball valve and method for applying a multi-layer wear protection layer for producing such a component
  • the invention relates to a wear-resistant coated metallic component in particular for a ball valve whose tribologically stressed surface is at least partially provided with a multi-layer wear protection layer. Furthermore, the invention relates to a method for applying a wear protective layer on a metallic substrate for producing such a construction part. Moreover, the invention relates to a ball valve with such a component.
  • DE 10 2008 040 766 A1 discloses a wear protection layer arrangement, in particular for components exposed to high pressures and temperatures of a fuel injection system.
  • the wear protection layer arrangement has a tetragonal bound amorphous carbon formed or egg nen share of tetragonal bonded amorphous carbon having protective layer.
  • the wear protection layer arrangement has a first adhesion promoter layer formed from chromium or having a chromium content.
  • the wear protection layer arrangement has at least one second adhesion promoter layer adjacent to the first adhesion promoter layer and having a carbon content.
  • the vorlie lowing invention has the object, a wear-resistant coated me- metallic component and a method for applying a multilayer Ver wear protection layer for the production of such a component to further develop, and in particular to improve an adhesion between the individual layers of the wear protection layer Ver, further a thermal and mechanical cal load capacity of the component to be increased.
  • the object is solved by the subject matter of patent claims 1, 5 and 8.
  • Preferred Ausrete insurance forms are given in the dependent claims.
  • a wear-resistant coated metallic component according to the invention for an injection valve has its tribologically stressed surface a more layered wear protection layer, wherein the wear protection layer at least one metallic adhesive layer, a primer layer and at least one first cover layer, wherein the primer layer is a carbide-forming hydrogen-free metal or a boride-forming Metal comprises, and wherein the at least first cover layer comprises a hydrogen-free tetrahedral carbon.
  • the wear protection layer is constructed such that a thermally stable adhesion of the individual layers is achieved with each other and is thus produced with a high resistance to tribological stresses.
  • the metallic adhesive layer has a layer thickness between 10 nm and 1 pm, and consists of a metal selected from the group comprising titanium, chromium, molybdenum, tungsten, vanadium, hafnium, tantalum, zirconium or combinations thereof. Other metals and other combinations of these are also conceivable.
  • the adhesion promoter layer preferably has a layer thickness of between 10 nm and 10 ⁇ m, preferably a layer thickness of less than 1 ⁇ m, and consists of a metal selected from the group comprising silicon carbide SiC, tungsten carbide WC, vanadium carbide VC, tantalum carbide TaC, hafnium carbide HfC, zirconium carbide ZrC, molybdenum carbide MoC, titanium carbide TiC, titanium boride TiB, titanium boride TiB 2 or combinations thereof.
  • the adhesion promoter layer comprises a hydrogen-free carbide-forming metal
  • the adhesion promoter layer with the hydrogen-free carbide-forming metal then has a stoichiometric layer.
  • the ratio between metal and carbon can also be in a ratio range between 10: 1 and 1: 3.
  • the primer layer comprises a boride-forming metal
  • the primer layer preferably comprises titanium to form a chemically inert boron-containing titanium layer or a titanium boride layer.
  • the adhesion promoter layer with the boride-forming metal preferably has a stoichiometric ratio between metal and boron of 1: 2, in which case a titanium diboride is present.
  • the ratio between metal and boron can also be in a ratio range between 10: 1 and 1:10.
  • the boride-containing primer layer acts as a diffusion barrier, whereby oxidation or contamination by thermal diffusion of the substrate and the individual components of the coating is prevented. Furthermore, by the chemical and structural similarity of titanium boride and titanium carbide, a comparatively stable and adherent bonding of the adhesive mediator layer to the first cover layer.
  • the first cover layer has a layer thickness between 0.1 mhh and 10 mhh.
  • the first cover layer of the wear protection layer is preferably a hydrogen-free tetrahedral carbon layer (ta-C), which has a high thermal stability even at temperatures above 600 ° C compared to the metallic adhesive layer and the adhesive layer.
  • the metallic adhesive layer and the primer layer are essentially hen vorgese, a better gradient in modulus and / or hardness between a sub strate, so to realize the base material of the component to be coated, and the first cover layer. Consequently, the eggshell effect of the wear-resistant layer is counteracted by the layers adhering well.
  • the wear protection layer at least consisting of the adhesive layer, the primer layer and the first cover layer thus has a relatively high adhesion ability even at high operating temperatures and aggressive oxidizing gas atmospheres. This has a particularly positive effect on the resistance of the wear protection layer, and thus on the lifetime of the wear-coated metal component ver.
  • the anti-wear layer has a first gradient layer formed between the metallic adhesive layer and the primer layer to produce a concentration gradient between the metallic adhesive layer and the primer layer, the first gradient layer comprising a metal and a layer thickness between 1 nm and 10 pm.
  • the first Graisten für on a boride-forming metal wherein the boride-forming metal is in particular a titanium boride or a titanium diboride.
  • the boron content within the first gradient layer preferably increases with increasing layer thickness.
  • the first gradient layer comprises a carbide-forming metal, wherein the carbide-forming metal is selected from the group consisting of silicon carbide, tungsten carbide, vanadium carbide, tantalum carbide, hafnium carbide, zirconium carbide, molybdenum carbide, titanium carbide, or combinations thereof.
  • the Kolhenstoffanteil within the first Gradi enten slaughter increases with increasing layer thickness preferably.
  • the wear protection layer has a second gradient layer formed between the adhesion promoter middle layer and the first cover layer to produce a concentration gradient between the adhesion promoter layer and the first cover layer, wherein the second gradient layer is a hydrogen-free tetrahedral carbon includes.
  • the carbon content within the second gradient layer preferably increases. It is conceivable entwe the form the first gradient layer between the metallic adhesive layer and the adhesive layer or the second gradient layer between the Haftvermitt ler harsh and the first cover layer.
  • the wear protection layer then has four individually applied layers. But it is also possible both a first and a second gradient layer between tween the metallic adhesive layer, the adhesive layer and the first cover layer preference.
  • the wear protection layer has five layers applied separately.
  • the gradient in the modulus of elasticity and / or hardness is realized more uniformly by the first and / or second gradient layer, and the adhesiveness of the wear-resistant layer is thus improved.
  • the wear protection layer further comprises a second cover layer comprising an amorphous hydrogen-containing carbon, wherein the two te cover layer is at least partially disposed on the first cover layer.
  • the second cover layer is an inlet layer of amorphous hydrogen-containing carbon (aC: H)., which serves the smoothing of the technical surface at the beginning of tribological contact.
  • the substrate is initially provided, a metallic adhesive layer by means of a plasma coating process, in particular with a layer thickness between 10 nm and 1 pm, at least partially applied to the substrate, wherein a primer layer comprising a hydrogen free carbide-forming metal or a boride-forming metal, by means of a Plas mabe Anlagenungsvons, in particular with a layer thickness between 10 nm and 10 pm, preferably having a layer thickness less than 1 pm, at least partially applied to the metallic adhesive layer, and wherein a first cover layer comprising a hydrogen-free tetrahedral carbon, by means of a plasma coating method, in particular with a layer thickness between 0.1 pm and 10 pm, at least partially applied to the primer layer.
  • the individual layers of the wear protective layer are applied by means of a physical vapor deposition method on the substrate of the component.
  • a physical vapor deposition process in English: Physical Vapor Deposition
  • a starting material is transferred by means of physical processes in the gas phase and then led to the substrate to be coated, where it condenses and forms the respective layer.
  • the application of the metallic adhesive layer to the substrate preferably takes place by means of magnetron sputtering, the respective layer material being sputtered directly from a target material in a noble gas atmosphere, for example in an argon, neon, krypton or xenonate mops. Furthermore, it preferably follows the sputtering of the layer material to produce the metallic adhesion Layer preferably by means of high-energy pulse magnetron sputtering (HiPIMS) in combination with a bias voltage, whereby a comparatively dense metal adhesive layer is formed from the sputtered ions.
  • HiPIMS high-energy pulse magnetron sputtering
  • Biashoven be used, wherein the primer layer vorzugswei se deposited directly in stoichiometric composition of the respective target material.
  • the bias voltage is in the range up to 10 kV, preferably between 0.1 and 2 kV.
  • a reactive deposition can alternatively be carried out by adding kohlenstoff ambiencen gases.
  • the first covering layer consisting of the amorphous tedraedischen carbon (ta-C) is preferably produced by means of vacuum arc evaporation of a carbon target.
  • the resulting carbon ions are accelerated by means of egg ner preferably pulsed bias voltage to the component and form there the first cover layer with the respective layer thickness.
  • the bias voltage is selected such that the mean internal energy of the carbon ions is between 40 and 100 eV.
  • the invention includes the teaching that a first and / or second gradient layer is formed between the metallic adhesion layer and the adhesion promoter layer and / or between the adhesion promoter layer and the first cover layer in order to achieve a concentration gradient between the metallic adhesion layer and the adhesion promoter layer and / or between the
  • Bonding agent layer and the first cover layer to produce wherein the first and / or second gradient layer is also formed by means of a plasma coating process and a layer thickness between 1 nm and 10 pm.
  • the first and / or second gradient layer is preferably applied by PVD method, particularly preferably by vacuum arc evaporation on the me-metallic adhesive layer and / or the adhesion promoter layer.
  • a second cover layer is at least partially applied to the first cover layer by means of a PECVD method and a layer thickness between 0.1 pm and 10 pm, wherein the second cover layer is an amorphous hydrogen-containing carbon.
  • PECVD plasma-enhanced chemical vapor deposition
  • the gases produced by means of the hydrocarbon-containing gas for example by means of isobutane, isobutene or methane, are then accelerated by means of a pulsed bias voltage to the surface of the component to be coated, where they form an aC: H layer.
  • the layer thicknesses indicated above are preferably produced by plasma coating in such a way that the application of the material takes place until the respective desired layer thickness is reached. During or after the plasma coating, the applied layer thickness is monitored by a layer thickness test.
  • the wear-resistant coated metallic component is preferably used in injection technology to injectors, especially for Hochtikan applications of hydraulic valves or pneumatic valves.
  • the wear-resistant coated metallic component is used in a Ku gelventil, wherein the ball valve a spherical counter-body to summarizes, which is intended to come to the wear-resistant coated metallic component sealingly to the plant.
  • the wear-resistant coated metallic component has in particular an inner cone-shaped seat for at least partially receiving the counter body, wherein at least the innenke gel-shaped seat has a wear protection layer.
  • the inner cone-shaped seat advantageously has an opening angle of less than 90 °, preferably before 60 °.
  • FIG. 1 is a detail sectional view of a metallic component according to the invention to illustrate a layer structure of a wear protection layer according to a first embodiment
  • FIG. 2 is a detail sectional view of the metallic component for Veran illustration of the layer structure of the wear protection layer according to a two-th embodiment
  • Fig. 3 is a detail sectional view of the metallic component for Veran illustration of the layer structure of the wear protection layer according to a th third embodiment
  • FIG. 4 is a simplified schematic sectional view of a ball valve with the wear-resistant coated metallic component according to the invention according to FIG. 3.
  • FIG. 1 to 3 three embodiments of a wear-coated metallic component 1 are shown.
  • the Ver provided with a wear protective layer 2 metallic component 1 is presently used in a ball valve 6 shown in more detail in Figure 4, wherein by wear protective layer 2 in particular the wear of the tribologically stressed component 1 is lowered.
  • the wear protection layer 2 form a metallic adhesive layer 3a, a primer layer 3b and a first cover layer 3c, wherein the primer layer 3b comprises a carbide-forming hydrogen-free metal, and wherein the first cover layer 3c comprises a hydrogen-free tetrahedral carbon.
  • the metallic adhesion layer 3a, the adhesion promoter layer 3b and the first cover layer 3c are each provided with Made a PVD process, for example, by magnetron sputtering or vacuum umbogenverdampfung.
  • the metallic adhesion layer 3 a is applied over the entire surface of a substrate 9 of the component 1.
  • the Haftver is mitler layer 3b applied over the entire surface of the metallic adhesive layer 3a and finally coated over the entire surface with the first cover layer 3c, wherein the ers te cover layer has a layer thickness of 1 pm.
  • the adhesive metal layer 3 a comprises titanium as a layer material and has a layer thickness of 100 nm.
  • the adhesion promoter layer 3 b, or else carbide hard layer, has a layer thickness of 200 nm and in the first embodiment comprises a titanium carbide, the stoichiometric ratio of the titanium carbide between Carbon and metal is 1: 1, so that a stable and comparatively well adhering Haftvermitler für 3b is formed.
  • a stoichiometric ratio of titanium carbide between carbon and metal in a range between 3: 1 and 1:10 can be chosen.
  • the ers te cover layer 3c protects the component 1 from wear and reduces in particular the coefficient of friction between the component 1 and a tribologically bean spruchenden the component counter body.
  • the wear protection layer 2 of the second embodiment shown in Figure 2 has a metallic adhesive layer 3a, a Haftvermitler Anlagen 3b, and a first cover layer 3c, wherein between the metallic adhesive layer 3a and the Haftvermitler Anlagen 3b, a first gradient layer 4 is arranged to a concentration gradient between the metallic adhesion layer 3a and the adhesion promoter layer 3b.
  • the adhesion promoter layer 3b comprises a boride-forming metal
  • the first covering layer 3c comprises a hydrogen-free tetrahedral carbon.
  • the metallic adhesion layer 3a, the first gradient layer 4, the adhesion promoter layer 3b and the first cover layer 3c are each prepared by a PVD process, for example by magnetron sputtering or vacuum arc evaporation.
  • the metallic adhesion layer 3 a is applied over the entire surface of a substrate 9 of the component 1.
  • the first gradient layer 4 is applied to the metallic adhesion layer 3a.
  • the adhesion promoter layer 3 b is applied over the entire surface to the first gradient layer 4 and, finally, over the full area with the first gradient layer 4 Cover layer 3c coated, wherein the first cover layer has a layer thickness of 1 mhh.
  • the metallic adhesion layer 3a here comprises titanium as a layer material and has a layer thickness of 100 nm.
  • the adhesion promoter layer 3b has a layer thickness of 200 nm and in the second embodiment comprises a titanium boride, wherein the stoichiometric ratio of the titanium boron between Me tall and boron at 1: 2, so that a stable and comparatively well adhering primer layer 3b is formed.
  • a stoichiometric ratio of the titanium boride between titanium and boron may also be in one range
  • the first gradient layer 4 also comprises titanium boride as the layer material, the concentration of the boron fraction increasing linearly with increasing layer thickness of the first gradient layer 4 from the metallic adhesion layer 3 a to the adhesion promoter layer 3 b.
  • the first gradient layer 4 has a layer thickness of 50 nm.
  • the first cover layer 3c protects the component 1 from wear and, in particular, reduces the coefficient of friction between the component 1 and a component tribologically
  • the wear protection layer 2 has a metallic adhesive layer 3a, a bonding agent layer 3b, and a first cover layer 3c. Between the adhesive layer 3b and the first cover layer 3c, a second gradient layer 5 is arranged to produce a concentration gradient between the adhesive layer 3b and the first cover layer.
  • the adhesion promoter layer 3b comprises a carbide-forming metal and the first covering layer 3c comprises a hydrogen-free tetrahedral carbon.
  • the adhesion promoter layer 3b may also comprise a boride-forming metal.
  • the metallic adhesion layer 3a, the adhesion promoter layer 3b, the second gradient layer 5, and the first cover layer 3c are each produced by means of a PVD process, for example by means of magnetron sputtering or vacuum evaporation.
  • the metallic adhesive layer 3a is all over on one Substrate 9 of the component 1 applied.
  • the bonding mediator layer 3b is applied over the entire surface of the metallic adhesive layer 3a.
  • the second gradient layer 5 is applied to the adhesion promoter layer 3b and finally beschich Tet with the first cover layer 3c beschich tet, wherein the first cover layer has a layer thickness of 1 mhh.
  • the wear protection layer 2 further comprises a second cover layer 3d, which is applied to the first cover layer 3c and in the present case has a layer thickness of also 1 mhh.
  • the second cover layer is produced in the present case by means of a PECVD method.
  • the metallic adhesion layer 3a here comprises titanium as the layer material and has a layer thickness of 100 nm.
  • the adhesion promoter layer 3b has a
  • Adhesive layer 3b from.
  • a titanium boride as
  • Adhesive layer 3b be provided.
  • the second gradient layer 5 to summarizes a hydrogen-free tetrahedral carbon as a layer material, wherein the concentration of the carbon content with increasing layer thickness of the second gradient layer 5 of the primer layer 3b to the first cover layer 3c increases linearly.
  • the second gradient layer 5 has a layer thickness of 50 nm.
  • the second cover layer 3d comprises an amorphous hydrogen-containing carbon as the layer material.
  • the first and second cover layer 3c, 3d protect the component 1 from wear and in particular reduces the coefficient of friction between the component 1 and a component 1 tribologically
  • the chemical and structural similarity of the layers ensures that the first and second cover layers 3 c, 3 d are firmly seated and firmly adhering to the substrate 9.
  • a ball valve 6 comprises a wear-resistant metallic component 1 according to FIG. 3 as well as a spherical counter body 7.
  • the counter body 7 is intended to seal against the wear-resistant metallic component 1, a surface 10 of the component 1 in particular on an inner cone-shaped Seat 8 is tribologically stressed by the counter body 7.
  • the inner cone-shaped seat 8 is used for partially receiving the counter body 7 and in this case has a Publ opening angle 11 of 60 °.
  • the wear-resistant coated metallic component 1 has on the surface 10 a on a substrate 9 of the component 1 applied wear protection layer 2 according to Figure 3, to the wear in the sealing area between the mating body 7 and the inner cone-shaped seat

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention concerne un élément métallique (1) revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique (6), dont la surface sollicitée de manière tribologique est pourvue au moins en partie d'une couche de protection contre l'usure (2) multicouche. La couche de protection contre l'usure (2) présente au moins une couche adhésive (3a) métallique, une couche de promoteur d'adhésion (3b) ainsi qu'au moins une première couche de recouvrement (3c), la couche de promoteur d'adhésion (3b) comportant un métal formant du carbure ou un métal formant du borure, et la ou les premières couches de recouvrement (3c) comportant un carbone tétraédrique exempt d'hydrogène. L'invention concerne en outre un procédé pour appliquer une couche de protection contre l'usure (2) sur un substrat (9) métallique afin de produire un tel élément métallique (1) revêtu d'une couche de protection contre l'usure. L'invention concerne en outre une soupape sphérique pourvue dudit élément métallique (1) revêtu d'une protection contre l'usure et d'une couche de protection contre l'usure (2).
EP19701769.2A 2018-02-26 2019-01-07 Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément Pending EP3759261A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018202842.7A DE102018202842A1 (de) 2018-02-26 2018-02-26 Verschleißschutzbeschichtetes metallisches Bauteil insbesondere für ein Kugelventil und Verfahren zum Aufbringen einer mehrschichtigen Verschleißschutzschicht zur Erzeugung eines solchen Bauteils
PCT/EP2019/050236 WO2019161981A1 (fr) 2018-02-26 2019-01-07 Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément

Publications (1)

Publication Number Publication Date
EP3759261A1 true EP3759261A1 (fr) 2021-01-06

Family

ID=65234516

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19701769.2A Pending EP3759261A1 (fr) 2018-02-26 2019-01-07 Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément

Country Status (5)

Country Link
US (1) US11753728B2 (fr)
EP (1) EP3759261A1 (fr)
CN (1) CN111757949A (fr)
DE (1) DE102018202842A1 (fr)
WO (1) WO2019161981A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230002911A1 (en) * 2019-11-21 2023-01-05 Callidus Process Solutions Pty Ltd Bi-layer protective coatings for metal components
DE102020003847A1 (de) * 2020-06-26 2021-12-30 KSB SE & Co. KGaA Kreiselpumpe zur Förderung feststoffhaltiger Medien
DE102021206765A1 (de) 2021-06-29 2022-12-29 Robert Bosch Gesellschaft mit beschränkter Haftung Verschleißschutzbeschichtetes Metallbauteil
CN113957402A (zh) * 2021-09-28 2022-01-21 西安交通大学 提高压缩机滑片、缝纫机针筒等运动部件使用寿命的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10038954A1 (de) 2000-08-09 2002-02-28 Siemens Ag Ventil, insbesondere Einspritzventil
DE10355030A1 (de) * 2003-11-25 2005-06-23 Robert Bosch Gmbh Ventil, insbesondere für eine Hochdruckpumpe einer Kraftstoffeinspritzeinrichtung für eine Brennkraftmaschine
EP1769100A1 (fr) 2004-04-29 2007-04-04 OC Oerlikon Balzers AG Revetement en un materiau dur dlc sur des materiaux a teneur en cuivre pour paliers
DE102004041235A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
WO2006084404A1 (fr) * 2005-02-10 2006-08-17 Oerlikon Trading Ag, Trübbach Revetement triplex hautement resistant a l’usure pour outils de coupe
EP1915472B1 (fr) * 2005-08-18 2018-09-05 Oerlikon Surface Solutions AG, Pfäffikon Substrat revêtu d une structure stratifiée comprenant une couche de carbone tétraédrique et une couche extérieure plus molle
DE102008040766A1 (de) 2008-07-28 2010-02-11 Robert Bosch Gmbh Verschleißschutzschichtanordnung sowie Bauelement mit Verschleißschutzschichtanordnung
DE102008040768A1 (de) * 2008-07-28 2010-02-11 Robert Bosch Gmbh Verschleißschutzschichtanordnung sowie Bauelement mit einer Verschleißschutzschichtanordnung
US9620150B2 (en) * 2014-11-11 2017-04-11 Seagate Technology Llc Devices including an amorphous gas barrier layer
US10844493B2 (en) 2016-03-01 2020-11-24 Oerlikon Surface Solutions Ag, Pfäffikon Hydrogen-free carbon coating having zirconium adhesive layer
DE102016107874A1 (de) 2016-04-28 2017-11-16 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring
US10626834B2 (en) 2016-05-03 2020-04-21 GM Global Technology Operations LLC Fuel injector for an internal combustion engine

Also Published As

Publication number Publication date
US20200407856A1 (en) 2020-12-31
WO2019161981A1 (fr) 2019-08-29
CN111757949A (zh) 2020-10-09
DE102018202842A1 (de) 2019-08-29
US11753728B2 (en) 2023-09-12

Similar Documents

Publication Publication Date Title
EP3759261A1 (fr) Élément métallique revêtu d'une protection contre l'usure, en particulier pour une soupape sphérique, et procédé pour appliquer une couche de protection contre l'usure multicouche afin de produire un tel élément
DE69316575T2 (de) Antriebskomponente mit einem Haftfilm abgestufter Zusammensetzung
DE102007058484A1 (de) Verfahren zum Aufbringen einer mehrlagigen Beschichtung auf Werkstücke und/oder Werkstoffe
EP1765921A1 (fr) Structure multicouche destinee a des polymeres
CN111183269B (zh) 具有耐蚀滑动面的涂覆阀门部件
DE102010052971A1 (de) Werkstück mit Si-DLC Beschichtung und Verfahren zur Herstellung von Beschichtungen
WO2005068825A1 (fr) Tige de soupape et soupape
CN101323945A (zh) 含应力缓和层的硬质薄膜及其制备方法
DE4343354C2 (de) Verfahren zur Herstellung einer Hartstoffschicht
WO2010028778A1 (fr) Equipement sanitaire
DE102016122834A1 (de) Beschichtung eines Körpers mit Diamantschicht und Hartstoffschicht
DE102012007796A1 (de) Beschichtung enthaltend Si-DLC, DLC und Me-DLC und Verfahren zur Herstellung von Beschichtungen
AT15220U1 (de) Verfahren zur Herstellung einer Hartstoffschicht auf einem Substrat, Hartstoffschicht, Zerspanwerkzeug sowie Beschichtungsquelle
AT511605B1 (de) Kohlenstoffbasierende beschichtung
WO2020064041A1 (fr) Procédé de fabrication d'une couche de protection contre l'érosion et la corrosion présentant plusieurs épaisseurs et pièce comprenant une couche de protection correspondante
EP3867421A1 (fr) Élément structural, en particulier destiné à un système de commande de soupapes, et procédé de production d'un tel élément structural
EP1980645A1 (fr) Procédé d'application d'un revêtement multicouche sur des pièces à usiner et/ou matières actives
DE4127639C2 (de) Reibungsarme Verschleißschicht, ihre Verwendung und ihre Herstellung
WO2010012704A1 (fr) Système de couches anti-usure et élément structurel doté d'un tel système de couches
EP0912774A1 (fr) Materiau composite et son procede de production
EP0977907B1 (fr) Couche anti-usure composite
WO2010012701A1 (fr) Système de couche anti-usure et élément structurel doté d'un tel système de couches
WO1996016200A1 (fr) Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication
DE102004028112B4 (de) Werkzeugsubstrat mit borhaltigem Schichtsystem, bestehend aus einer Borcarbid-, einer B-C-N und einer kohlenstoffmodifizierten kubischen Bornitridschicht sowie Verfahren zur Herstellung eines solchen Schichtsystems und Verwendung
EP1038044B1 (fr) Couche reduisant l'usure et le frottement, substrat muni d'une telle couche et procede pour produire une couche de ce type

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20200928

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20221027