EP3702622A1 - Système à vide - Google Patents

Système à vide Download PDF

Info

Publication number
EP3702622A1
EP3702622A1 EP19159473.8A EP19159473A EP3702622A1 EP 3702622 A1 EP3702622 A1 EP 3702622A1 EP 19159473 A EP19159473 A EP 19159473A EP 3702622 A1 EP3702622 A1 EP 3702622A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
recipient
functional
support
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19159473.8A
Other languages
German (de)
English (en)
Inventor
Jan Hofmann
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19159473.8A priority Critical patent/EP3702622A1/fr
Priority to JP2020022274A priority patent/JP6921253B2/ja
Publication of EP3702622A1 publication Critical patent/EP3702622A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/33—Retaining components in desired mutual position with a bayonet coupling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/36—Retaining components in desired mutual position by a form fit connection, e.g. by interlocking

Definitions

  • the invention relates to a vacuum system with a vacuum pump, in particular a split-flow pump, and a recipient, each having a functional side, and with a mounting device for mounting the vacuum pump on the recipient with functional sides facing one another.
  • the invention also relates to a vacuum pump, in particular for a vacuum system according to the invention, with a functional side in which at least one functional area, in particular a suction opening or a connection, is arranged or formed.
  • the object of the invention is to create a possibility for simple and inexpensive assembly of vacuum pumps.
  • the assembly device is designed to first support, namely by hanging or by pushing in, the vacuum pump on the recipient and then fastening the vacuum pump on the recipient
  • the assembly device comprises at least one support member protruding from the recipient's functional side and at least one counterpart on the vacuum pump which can be brought into engagement with the support member by hanging from above or by pushing it in from the side in order to attach the vacuum pump in a pre-fixing position to support the recipient, and wherein the assembly device in addition to the support member and the counterpart comprises fastening means formed on the recipient and on the vacuum pump, with which the vacuum pump can be fastened to the recipient either directly in the pre-fixing position or after being transferred from the pre-fixing position to a final fixing position.
  • the two-stage concept according to the invention - first supporting and then fastening - is extremely efficient, suitable for practically all installation situations and, moreover, extremely cost-effective, since it can be implemented with simple mechanical means.
  • the pump is already held by the recipient, i.e. the user no longer has to support the entire weight of the pump.
  • the hanging or pushing in can be implemented in a simple manner in such a way that the pump is secured against moving away from the recipient, that is to say the pump cannot accidentally come out of the supported pre-fixing position by itself. With the pump supported in the prefixing position, the user can consequently concentrate on the final attachment of the pump to the recipient.
  • the engagement between the support member of the recipient and the counterpart of the vacuum pump, which is produced by hanging or pushing in, is preferably locking such that the pump is secured against moving away from the recipient is. This does not rule out that the pump can still be moved to a certain extent relative to the recipient in the supported pre-fixing position.
  • such a mobility can serve to transfer the pump from the pre-fixing position into a final fixing position, but such a transfer is not a mandatory feature of the invention.
  • the term “functional side” is to be understood as meaning that side of the vacuum pump that faces the recipient in the final assembled state.
  • the term “functional side” is to be understood as meaning that side of the recipient that faces the vacuum pump in the respectively finally assembled state.
  • the term “functional side” therefore does not represent any restriction with regard to the specific configuration of the relevant side of the vacuum pump or of the recipient, ie it does not mean any restriction to specific functional parts or functional areas.
  • one side can have one or more vacuum or suction openings, and the opposite side of the vacuum pump can also be provided with functional openings, for example so-called taps.
  • the invention can also be designed for the assembly of the vacuum pump on a recipient, in which these opposite, e.g.
  • the side provided with the taps forms the functional side in the sense of the present disclosure.
  • both a vacuum pump and a recipient can have more than one functional side within the meaning of the present disclosure.
  • the term "recipient” should therefore also be understood broadly. It does not have to be an evacuation facility. In principle, any device to which a vacuum pump is to be mounted for whatever purpose can be a recipient within the meaning of the present disclosure.
  • the vacuum pump is moved from the pre-fixing position achieved by hanging or pushing in by a pivoting movement into a final fixing position different from the pre-fixing position transferable.
  • the pivoting movement takes place about a pivot axis which runs through the support area which is formed by the support element of the recipient and the counterpart of the vacuum pump supported on the support element.
  • the pump can therefore be pivotable around the support area in the suspended or pushed-in state in order to bring the two functional sides into contact with one another, whereupon the final fastening takes place by means of the fastening elements.
  • any type of transfer of the vacuum pump from the pre-fixing position to a final fixing position is possible, but not mandatory, depending on the specific design of the assembly device.
  • the intended relative position of the two functional sides, in which the final attachment of the vacuum pump to the recipient takes place, can also already be given in the pre-fixing position achieved by hanging or pushing in.
  • the functional sides of the vacuum pump and the recipient can each have at least one functional area, for example a suction opening or a connection, whereby the functional areas can be provided with sealing means for the vacuum-tight connection between the pump and the recipient, in particular specially designed sealing surfaces and / or separate sealing elements such as O- Rings made of elastomeric material.
  • sealing means for the vacuum-tight connection between the pump and the recipient in particular specially designed sealing surfaces and / or separate sealing elements such as O- Rings made of elastomeric material.
  • At least a part of the fastening means is arranged at a distance from the pivot axis around which the Pivoting movement to transfer the vacuum pump from the pre-fixing position to the final fixing position takes place.
  • the vacuum pump is attached and supported at different points. However, this does not rule out the fact that the fastening can also take place in part in the area of the support.
  • the recipient's support member comprises a bolt protruding from the recipient's functional side with a locking head spaced apart from the functional side, and the counterpart of the vacuum pump having a suspension portion that can be plugged between the functional side and the recipient's locking head and has a recess for the Includes bolt.
  • the recipient preferably has a plurality of support members which are arranged at a distance from one another and for which the vacuum pump each has a suspension section with a corresponding recess. Two supporting organs arranged at a sufficient distance from one another can be sufficient in many cases.
  • Such support members can be implemented in a very simple and inexpensive manner by means of a screw which is screwed into a threaded opening of the recipient so far that the screw head is at the desired distance from the functional side.
  • the screw shaft then forms the bolt into which the counterpart of the vacuum pump engages with the recess.
  • the support member can be a screw with a flange, which is available as a very cheap, simple standard part, for example according to DIN 6921.
  • the slide-in concept according to the invention can be implemented, for example, in that the support member of the recipient comprises at least one support rail with a support surface and a locking web spaced from the functional side, the counterpart of the vacuum pump having an between Functional side and locking web of the recipient on the support surface includes displaceable slide-in web.
  • the vacuum pump can simply be pushed with its slide-in web onto such a support rail until the pre-fixing position is reached. An end stop can be provided for this.
  • the vacuum pump can optionally also be hooked into the support rail with its slide-in web, the locking web of the support rail in turn preventing the pump from moving away from the recipient and thus securing the supported position.
  • This assembly device can consequently enable both insertion and suspension. If the pump is hooked in, the slide-in web functions as a hanging web. It can then again be provided that the pump is to be transferred by pivoting from the inserted or suspended pre-fixing position into a final fixing position.
  • a support rail with a locking web spaced from the functional side is used in particular in a so-called side assembly, in which the functional sides are used with the intended orientation of the recipient and vacuum pump run at least substantially vertically.
  • the functional sides run at least essentially horizontally when the recipient and vacuum pump are oriented as intended.
  • the slide-in concept according to the invention is preferably used, specifically preferably with two parallel support rails, in each of which the support surface is spaced from the functional side.
  • the support member of the recipient comprises at least one support rail with a support surface spaced from the functional side, the counterpart of the vacuum pump including an insertion web that can be displaced on the support surface.
  • the support surface can run either parallel or, in an alternative embodiment, at an angle to the functional side, with the distance between the support surface and the functional side decreasing starting from an entry area.
  • a "run-up ramp” can make the insertion of the pump considerably easier, particularly in the case of overhead installation, since it can initially be introduced at an angle from below.
  • the course of the support surface can be chosen so that at the end of the insertion process the rear area of the functional side is at a predetermined distance from the functional side of the recipient and the pump only needs to be raised slightly in the front area in order to move the pump into the final fixing position swivel and then finally fasten.
  • Reaching the pre-fixing position can in turn be marked by an end stop which limits the insertion depth exactly to the amount required for the correct relative position of the pump and recipient.
  • the mounting device is designed for only one-sided support or for two-sided support.
  • the pump is only supported on one side and is pivoted from the supported pre-fixing position into a final fixing position before the final fastening.
  • the assembly device is preferably designed for two-sided support.
  • the final attachment of the pump to the recipient can take place directly in the pre-fixing position after it has been transferred into a final fixing position different from the pre-fixing position.
  • the vacuum pump has a longitudinal extension with a longitudinal axis running parallel to a pump rotor and an end face running transversely to the longitudinal axis, a counterpart of the vacuum pump provided for only one-sided support being arranged in the area of a face end of the functional side running parallel to the longitudinal axis.
  • the end face can in particular be formed by a connection side of a lower part attached to a housing part.
  • the arrangement of the counterpart in the area of the front end of the vacuum pump is particularly advantageous when, in the case of vertical mounting, the vacuum pump is suspended from the recipient with a vertical longitudinal axis when the orientation is intended. This is because the hanging takes place at a point that is comparatively far removed from the sealing surfaces or sealing elements of the functional sides.
  • the assembly of such pumps can consequently be considerably simplified by the invention.
  • the vacuum pump can comprise a housing part and a separate lower part connected to the housing part in succession along a longitudinal axis, the counterpart of the vacuum pump being arranged on the lower part or on a flange of the housing part running parallel to the longitudinal axis.
  • the assembly concept according to the invention can consequently also be used in pumps of this type both for vertical assembly with a vertically extending longitudinal axis and for horizontal assembly with a horizontally extending longitudinal axis.
  • lower part denotes a separate unit which is attached to the housing containing the pump-active components of the vacuum pump and which can contain components other than the pump-active components and can be provided with external connections. In particular, electrical and electronic components can be accommodated in the lower part.
  • the lower part can also serve to connect a control part.
  • At least one pair of mutually associated connections is formed on connection sides of the vacuum pump and the recipient that are different from the functional sides, the connection of which can be established by hanging or pushing in the vacuum pump.
  • the process of hanging or pushing in to produce the pre-fixing position can advantageously be used at the same time to produce one or more connection connections.
  • the mounting device designed for hanging or pushing in already ensures a correct relative position between the vacuum pump and the recipient when the pre-fixing position is reached.
  • the invention also relates to a vacuum pump for a vacuum system of the type described herein, the vacuum pump consequently comprising a functional side and at least one counterpart which is designed to interact with a respective support member of a recipient, either in the sense of the inventive suspension concept or the inventive Insertion concept.
  • the vacuum pump is in particular a so-called split-flow pump, which has a longitudinal extension with a longitudinal axis running parallel to a pump rotor, the split-flow pump preferably having at least two suction openings arranged at a distance in the longitudinal direction on the functional side, Via which the split-flow pump is connected in the assembled state to one or more chambers of a recipient to be evacuated.
  • suction openings of a split-flow pump are also referred to as ports.
  • Another aspect of the invention relates to a vacuum pump, in particular for a vacuum system of the type described here, with a functional side in which at least one functional area, in particular a suction opening or a connection, is arranged or formed, the functional area being at least partially surrounded by an elevation that protrudes from a surrounding surface of the functional side and around which an annular sealing element is placed or stretched.
  • the annular sealing element is, in particular, an O-ring made of an elastomer material.
  • the sealing element is placed or tensioned around a protruding elevation, it is no longer necessary to produce a receiving groove for the sealing element in the functional side of the pump.
  • the small width of such grooves requires the use of small milling cutters, typically with diameters between 1 and 6 mm. It is such processing that is responsible for the relatively large amount of time required to produce the groove.
  • the invention has the advantage that the functional side can be machined with a comparatively large tool which, for example, has a diameter between 20 and 100 mm. This means that comparatively large cutter heads can be used, which enable particularly economical machining.
  • a side wall of an elevation that remains during processing of the functional side can be given the respectively desired shape.
  • a paragraph formed by the survey on the function page can e.g. be provided with a lateral undercut.
  • Such an undercut can be introduced at the same time as the machining of the machined surface when using a corresponding tool geometry.
  • the annular sealing element is not arranged in a groove.
  • the elevation completely surrounds the respective functional area, that is to say that the elevation is closed around the functional area.
  • the outer wall of the elevation facing away from the functional area and thus facing the sealing element can in principle be provided with any course.
  • the outer wall can run at least substantially perpendicular to the functional side.
  • the outer wall can be provided with an undercut into which the sealing element partially protrudes.
  • the undercut can be designed, for example, as a partial dovetail groove, in particular as a so-called half dovetail.
  • the functional side preferably comprises a flat surface from which the elevation protrudes.
  • the side of the elevation which is higher than the functional side, comprises a flat surface.
  • the flat surface of the elevation can run parallel to a flat surface of the functional side from which the elevation protrudes.
  • the sealing concept according to the invention enables a vacuum-tight connection between the pump and a respective recipient, with which, in particular, leak rates of less than 5 ⁇ 10 -7 mbar l / s can be ensured.
  • a possible material for the sealing element is, for example, fluorinated rubber (abbreviated to FKM).
  • FKM fluorinated rubber
  • the sealing element can be made from any elastomer material.
  • All of the vacuum pumps 11 shown in the figures are each a so-called split-flow vacuum pump, with which a high or ultra-high vacuum can be produced in one or more chambers of a recipient 13.
  • the vacuum pump 11 preferably comprises at least one pump rotor which defines a longitudinal axis 29 and which carries the rotating parts of one or more pump sections.
  • At least one pumping section of the vacuum pump 11 is preferably a turbo-molecular pumping section.
  • the vacuum pump 11 comprises an elongated housing part 25, to which a lower part 27 is attached at the end, which is provided with various connections and a control part, among other things.
  • This structure of a split-flow vacuum pump is basically known, so that it does not need to be discussed in more detail.
  • the vacuum system according to Fig. 1 is designed for vertical assembly with a longitudinal axis 29 running at least substantially vertically in the assembled state.
  • An assembly device according to the invention comprises two spaced apart support members 17 on the recipient 13, each of which is formed by a screw with a bolt 17a and a locking head 17b screwed into the functional side 13b of the recipient 13.
  • simple cheap standard or norm screws with flange can be used for these screws 17. This also applies to the variants explained below.
  • Counterparts of the vacuum pump 11 for the support members 17 of the recipient 13 are formed by recesses 15 which are formed in a counter flange 15a on the lower part 27 of the pump 11.
  • the recesses 15 are open at the bottom in the direction of the longitudinal axis 29 of the pump 11, so that - as shown in the figure below on the left in FIG Fig. 1 shows - the pump 11 can be mounted in a vertical orientation. This is done by hooking the pump 11 with the recesses 15 from above into the screws 17, the recesses 15 engaging with the bolts 17a. In the suspended state, the pump 11 is locked by the screw heads 17b, ie secured against movement away from the recipient 13.
  • the pivot axis 23 is shown at the bottom right in the figure Fig. 1 indicated by a dashed line.
  • the assembly device For the final fastening of the pump 11 to the recipient 13 in the final fixing position, the assembly device according to the invention comprises fastening means. These are formed on the vacuum pump 11 by two flanges 19 running parallel to the longitudinal axis 29, which are fastened to the housing part 25 or formed in one piece with it and are provided with openings 19a for fastening screws 20. Corresponding threaded openings into which the fastening screws 20 can be screwed are formed on the functional side 13a of the recipient 13. The figure at the bottom right in Fig. 1 .
  • Fig. 1 shows, this assembly concept according to the invention can be used at the same time to produce connection connections between vacuum pump 11 and recipient 13.
  • the downwardly pointing end face 31 of the lower part 27 is provided, inter alia, with a connection 35, to which a connection 37 on a corresponding connection side 33 of the recipient 13 is assigned.
  • This recipient-side connection 37 is provided with a sealing element 37a.
  • Fig. 2 shows a variant in which the vacuum pump 11 is again hung on the recipient 13, but here with a horizontally running longitudinal axis 29.
  • the counterflange 15a of the housing part 25, which runs parallel to the longitudinal axis 29, is provided with three recesses, the two outer recesses 15 being the counterparts for which in turn form support members 17 of the recipient 13, which are in turn designed as screws.
  • a central recess does not serve to support the pump 11 in the pre-fixing position, but to accommodate a fastening screw 20 with which the pump 11 is fastened to the recipient 13 in the area of the counter flange 15a.
  • a flange, not shown here, is provided, which is provided with openings, via which the pump 11 can also be screwed to the top of the recipient 13 after the pump 11 has been suspended and pivoted from this pre-fixing position into the final fixing position.
  • Fig. 3 shows a further variant in which again a vertical assembly takes place with the longitudinal axis 29 of the pump 11 running in the vertical direction.
  • the recesses 15 forming the counterparts here are formed on the end of the housing part 25 opposite the lower part 27.
  • the pump 11 is thus mounted here vertically with the lower part 27 facing upwards and for this purpose - insofar as in the embodiment of FIG Fig. 1 - Suspended on the recipient 13, pivoted if necessary and then fastened to the recipient 13 on the side flanges 19 by means of fastening screws 20.
  • Fig. 4 and 5 show a possible embodiment of an insertion concept according to the invention, here with side assembly with one-sided support by a support rail 17 attached to the recipient 13.
  • the support rail 17 is screwed to the functional side 13a of the recipient 13 and comprises a longitudinally oriented support surface 17c oriented perpendicular to the functional side 13a and a locking web 17d spaced from the functional side 13a, which delimits the support surface 17c.
  • the recipient 13 shown here purely schematically, has three chambers which are to be evacuated by means of the vacuum pump 11 and for this purpose are aligned via functional openings 13b opening into the functional side 13a with corresponding suction openings (not shown here) in the functional side 11a of the vacuum pump 11 when the pump 11 is mounted in the intended manner on the recipient 13.
  • the vacuum pump 11 To assemble the vacuum pump 11, it is pushed onto the support rail 17 with an insertion web running parallel to the longitudinal axis 29 (not shown here) and, after reaching the pushed-on pre-fixing position, is swiveled against the functional side 13a of the recipient 13, whereupon over the fastening web provided on the top of the housing part 25 19 can be screwed to the recipient 13 in order to finally fasten the pump 11 to the recipient 13. Threaded openings 21 in the functional side 13a of the recipient 13, the aforementioned fastening web 19, fastening openings 19a formed therein and fastening screws 20 form the fastening means of the assembly device according to the invention in this exemplary embodiment.
  • the recipient 13 can be provided with an end stop at which the vacuum pump 11 is completely applied state and which indicates to the user that the correct pre-fixing position has been reached, in which the threaded openings 21 on the recipient 13 are aligned with the fastening openings 19a on the fastening flange 19 of the vacuum pump 11.
  • Fig. 6 , 7th and 8th show, in various representations, an insertion concept according to the invention for overhead installation with two-sided support for the vacuum pump 11.
  • the recipient 13 is provided on its downward-facing functional side 13a with two support rails 17, each of which has a support surface 17c which is spaced from the functional side 13a and runs at an angle to the functional side 13a.
  • FIG. 6 shows the beginning of the pushing on of the vacuum pump 11, which is provided with laterally protruding slide-in webs on its functional side 11a, which here each represent the counterpart 15 for the support member 17 formed by the respective support rail of the recipient 13.
  • Fig. 7 shows the pre-fixing position in which the vacuum pump 17 is fully inserted and rests against the end stops 39.
  • the support rails 17 provided with the inclined support surfaces 17c are in turn screwed to the functional side 13a of the recipient 13.
  • the fastening screws 22 are particularly in the upper illustration of the Fig. 8 to recognize.
  • the above explanations show that the components and geometries required for supporting, namely hanging or pushing in, as well as for fastening, can be implemented in a very simple and inexpensive way.
  • the supporting elements - screws or rails - only need to be screwed onto the functional side 13a of the recipient 13 in the exemplary embodiments explained.
  • Fig. 10 shows, during the production of the flat surface 53 surrounding the suction openings 11b, on which the elevations 51 are left standing, a respectively desired shape of the outer walls 57 can take place at the same time.
  • the elevations 51 are each provided with an undercut 59 on their outer wall 57.
  • the ring seals 55 are securely held on the respective elevation 51.
  • ring seal 55 protruding into the undercut 59 protrudes in the state not yet mounted on the recipient over a raised side 61 of the elevation 51 running parallel to the surrounding surface 53.
  • Fig. 11 shows the completed assembly state, in which the vacuum pump 11 is screwed to the recipient 13 and the ring seals 55 surrounding the elevations 51 are pressed in the intended manner between the flat surface 53 surrounding the elevations 51 and a counter-sealing surface of the recipient 13.
  • the assembled state according to Fig. 11 may have been produced by the assembly concept according to the invention, as described above in connection with the Figs. 1 to 9 has been described.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19159473.8A 2019-02-26 2019-02-26 Système à vide Pending EP3702622A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19159473.8A EP3702622A1 (fr) 2019-02-26 2019-02-26 Système à vide
JP2020022274A JP6921253B2 (ja) 2019-02-26 2020-02-13 真空システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19159473.8A EP3702622A1 (fr) 2019-02-26 2019-02-26 Système à vide

Publications (1)

Publication Number Publication Date
EP3702622A1 true EP3702622A1 (fr) 2020-09-02

Family

ID=65598562

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19159473.8A Pending EP3702622A1 (fr) 2019-02-26 2019-02-26 Système à vide

Country Status (2)

Country Link
EP (1) EP3702622A1 (fr)
JP (1) JP6921253B2 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof
EP2228540A2 (fr) * 2009-03-14 2010-09-15 Pfeiffer Vacuum GmbH Agencement doté d'une pompe à vide
US20160195095A1 (en) * 2013-08-09 2016-07-07 Edwards Limited Vacuum system securing devices
CN108930656A (zh) * 2017-05-29 2018-12-04 株式会社岛津制作所 真空排气装置、真空泵及真空阀

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof
EP2228540A2 (fr) * 2009-03-14 2010-09-15 Pfeiffer Vacuum GmbH Agencement doté d'une pompe à vide
US20160195095A1 (en) * 2013-08-09 2016-07-07 Edwards Limited Vacuum system securing devices
CN108930656A (zh) * 2017-05-29 2018-12-04 株式会社岛津制作所 真空排气装置、真空泵及真空阀

Also Published As

Publication number Publication date
JP2020139499A (ja) 2020-09-03
JP6921253B2 (ja) 2021-08-18

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