EP3650911A4 - Optische vorrichtung - Google Patents
Optische vorrichtung Download PDFInfo
- Publication number
- EP3650911A4 EP3650911A4 EP18827806.3A EP18827806A EP3650911A4 EP 3650911 A4 EP3650911 A4 EP 3650911A4 EP 18827806 A EP18827806 A EP 18827806A EP 3650911 A4 EP3650911 A4 EP 3650911A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- optical device
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017133093 | 2017-07-06 | ||
JP2017235025 | 2017-12-07 | ||
PCT/JP2018/025637 WO2019009395A1 (ja) | 2017-07-06 | 2018-07-06 | 光学デバイス |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3650911A1 EP3650911A1 (de) | 2020-05-13 |
EP3650911A4 true EP3650911A4 (de) | 2021-03-24 |
EP3650911B1 EP3650911B1 (de) | 2023-08-30 |
Family
ID=64951103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP18827806.3A Active EP3650911B1 (de) | 2017-07-06 | 2018-07-06 | Optische vorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US11733509B2 (de) |
EP (1) | EP3650911B1 (de) |
JP (1) | JP6503151B1 (de) |
CN (1) | CN110799884B (de) |
TW (1) | TWI833699B (de) |
WO (1) | WO2019009395A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11513339B2 (en) | 2017-03-14 | 2022-11-29 | Hamamatsu Photonics K.K. | Optical module |
US11561388B2 (en) | 2017-03-14 | 2023-01-24 | Hamamatsu Photonics K.K. | Light module |
JP6778134B2 (ja) * | 2017-03-14 | 2020-10-28 | 浜松ホトニクス株式会社 | 光モジュール及びその実装方法 |
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2018
- 2018-07-06 JP JP2019503585A patent/JP6503151B1/ja active Active
- 2018-07-06 EP EP18827806.3A patent/EP3650911B1/de active Active
- 2018-07-06 US US16/625,695 patent/US11733509B2/en active Active
- 2018-07-06 TW TW107123428A patent/TWI833699B/zh active
- 2018-07-06 CN CN201880042645.8A patent/CN110799884B/zh active Active
- 2018-07-06 WO PCT/JP2018/025637 patent/WO2019009395A1/ja unknown
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JP2006343481A (ja) * | 2005-06-08 | 2006-12-21 | Anritsu Corp | ミラー装置 |
US20080284078A1 (en) * | 2005-11-25 | 2008-11-20 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micromechanical Element Which Can be Deflected |
JP2010008611A (ja) * | 2008-06-25 | 2010-01-14 | Panasonic Electric Works Co Ltd | 可動構造体及びそれを用いたマイクロミラー素子 |
US20110090551A1 (en) * | 2009-10-15 | 2011-04-21 | Tjalf Pirk | Micromechanical assembly having a displaceable component |
Also Published As
Publication number | Publication date |
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JP6503151B1 (ja) | 2019-04-17 |
US20210155471A1 (en) | 2021-05-27 |
EP3650911A1 (de) | 2020-05-13 |
TW201906780A (zh) | 2019-02-16 |
CN110799884B (zh) | 2022-03-01 |
CN110799884A (zh) | 2020-02-14 |
WO2019009395A1 (ja) | 2019-01-10 |
JPWO2019009395A1 (ja) | 2019-07-18 |
EP3650911B1 (de) | 2023-08-30 |
US11733509B2 (en) | 2023-08-22 |
TWI833699B (zh) | 2024-03-01 |
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